Method and device for forming metal gate electrodes for transistors
A semiconductor device includes a first transistor and a second transistor. The first transistor includes: a first source and a first drain separated by a first distance, a first semiconductor structure disposed between the first source and first drain, a first gate electrode disposed over the first semiconductor structure, and a first dielectric structure disposed over the first gate electrode. The first dielectric structure has a lower portion and an upper portion disposed over the lower portion and wider than the lower portion. The second transistor includes: a second source and a second drain separated by a second distance greater than the first distance, a second semiconductor structure disposed between the second source and second drain, a second gate electrode disposed over the second semiconductor structure, and a second dielectric structure disposed over the second gate electrode. The second dielectric structure and the first dielectric structure have different material compositions.
1. A method of semiconductor fabrication, comprising:
providing a device that includes a semiconductor structure, a source/drain, an interlayer dielectric (ILD) disposed over the source/drain, and spacers disposed on sidewalls of the ILD, wherein the semiconductor structure is exposed by an opening;
completely filling the opening with a first metal layer;
forming a second metal layer over the first metal layer;
forming a first dielectric layer over the second metal layer;
performing a planarization process that removes the first dielectric layer and the second metal layer, wherein the planarization process exposes an upper surface of the first metal layer;
forming a protective mask over the first metal layer; and
performing an etching process while the protective mask protects the first metal layer from being etched.
2. The method of claim 1 , wherein the filling the opening with the first metal layer is performed such that portions of the first metal layer are formed over the ILD.
3. The method of claim 1 , further comprising, after the performing the etching process:
partially removing the ILD and the spacers to form a T-shaped opening;
partially filling the T-shaped opening with a third metal layer; and
completely filling the T-shaped opening with a second dielectric layer that has a greater dielectric constant than the first dielectric layer.
4. The method of claim 3 , wherein the partially removing the ILD and the spacers further comprises:
performing a first etch-back process on the first metal layer;
etching away the spacers partially after the first etch-back process has been performed; and
performing a second etch-back process on the first metal layer after the etching away the spacers partially.
5. The method of claim 3 , wherein:
the completely filling the opening with a first metal layer comprises depositing a work function metal layer as the first metal layer; and
the partially filling the T-shaped opening with the third metal layer comprises depositing tungsten as the third metal layer.
6. The method of claim 3 , wherein the partially filling the T-shaped opening with the third metal layer is performed such that an upper surface of the third metal layer is located below upper surfaces of the spacers.
7. A method of semiconductor fabrication, comprising:
providing a device that includes a semiconductor structure, a source/drain, an interlayer dielectric (ILD) disposed over the source/drain, and spacers disposed on sidewalls of the ILD, wherein the semiconductor structure is exposed by an opening;
forming a first metal layer in the opening, wherein the first metal layer contains a work function metal;
forming a second metal layer over the first metal layer, wherein the second metal layer is formed outside the opening;
forming a first dielectric layer over the second metal layer;
polishing the first dielectric layer and the second metal layer until an upper surface of the first metal layer is exposed;
forming a protective mask over the exposed upper surface of the first metal layer;
performing a first etching process while the protective mask protects the first metal layer from being etched;
performing a plurality of second etching processes to the ILD and the spacers to form a T-shaped opening defined by remaining portions of the ILD and the spacers;
forming a third metal layer in the T-shaped opening; and
forming a second dielectric layer over the third metal layer in the opening, wherein the second dielectric layer has a greater dielectric constant than the first dielectric layer.
8. The method of claim 7 , wherein the performing the plurality of second etching processes comprises:
performing a first etch-back process to the first metal layer;
etching away the spacers partially after the first etch-back process has been performed; and
performing a second etch-back process on the first metal layer after the etching away the spacers partially.