Microelectromechanical microphone having a stoppage member
Technologies are provided for microelectromechanical microphones that can be robust to substantial pressure changes in the environment in which the micromechanical microphones operate. In some embodiments, a microelectromechanical microphone device can include a substrate defining a first opening to receive a pressure wave. The microelectromechanical microphone device also can include a flexible plate mechanically coupled to the substrate and a rigid plate mechanically coupled to the flexible plate. The flexible plate is deformable by the pressure wave. The rigid plate defines multiple openings that permit passage of the pressure wave. The microelectromechanical microphone device can further include at least one stoppage member assembled in a spatial relationship with the flexible plate. The at least one stoppage member can limit motion of the flexible plate in response to the pressure wave including a threshold amplitude.
1. A microelectromechanical microphone device comprising;
a flexible plate configured to be deformed by a pressure wave;
a rigid plate mechanically coupled to the flexible plate, the rigid plate defining multiple openings that permit passage of the pressure wave; and
a stoppage member affixed to the rigid plate and extending perpendicularly relative to a surface of the rigid plate opposite a surface of the flexible plate, the stoppage member having a distal surface that is separated from the surface of the flexible plate by a clearance distance, wherein the stoppage member is configured to limit motion of the flexible plate in response to the pressure wave including a threshold amplitude.
2. The microelectromechanical microphone device of claim 1 , wherein the rigid plate is mechanically coupled to the flexible plate by a dielectric member that extends between the rigid plate and the flexible plate, and wherein the stoppage member is located at a defined distance from the dielectric member.
3. The microelectromechanical microphone device of claim 1 , wherein the clearance distance has a magnitude in a range from 10 nm to 1 μm.
4. The microelectromechanical microphone device of claim 1 , wherein the stoppage member is monolithically integrated into the rigid plate.
5. The microelectromechanical microphone device of claim 1 , wherein the stoppage member is formed from a dielectric material or an insulator material.
6. The microelectromechanical microphone device of claim 1 , wherein the stoppage member is formed from one of silicon dioxide, silicon nitride or aluminum nitride.
7. The microelectromechanical microphone device of claim 1 , further comprising a second stoppage member affixed to the rigid plate and extending perpendicularly relative to the surface of the rigid plate opposite the surface of the flexible plate, the second stoppage member having a distal surface that is separated from the surface of the flexible plate by a clearance distance, wherein the second stoppage member further limits the motion of the flexible plate in response to the pressure wave having the threshold amplitude.
8. The microelectromechanical microphone device of claim 7 , wherein the second stoppage member is located at a defined position along an arcuate path extending from the stoppage member, the arcuate path pertaining to a path that is centrosymmetric about an axis perpendicular to the surface of the rigid plate.
9. The microelectromechanical microphone device of claim 1 , further comprising multiple second stoppage members affixed to the rigid plate, each one of the multiple second stoppage members extending perpendicularly relative to the surface of the rigid plate opposite the surface of the flexible plate.
10. The microelectromechanical microphone device of claim 9 , wherein the multiple second stoppage members are uniformly distributed along a path that is centrosymmetric about an axis perpendicular to the surface of the rigid plate.
11. A microelectromechanical microphone device comprising:
a substrate defining an opening to receive a pressure wave;
a flexible plate mechanically coupled to the substrate and configured to be deformed by the pressure wave; and
a stoppage member affixed to the flexible plate and extending perpendicularly relative to a surface of the flexible plate opposite a surface of the substrate, the stoppage member having a distal surface that is separated from the surface of the substrate by a clearance distance, wherein the stoppage member is configured to limit motion of the flexible plate in response to the pressure wave including a threshold amplitude.
12. The microelectromechanical microphone device of claim 11 , wherein the substrate is mechanically coupled to the flexible plate by a dielectric member that extends between the substrate and the flexible plate, and wherein the stoppage member is located at a defined distance from the dielectric member.
13. The microelectromechanical microphone device of claim 11 , wherein the clearance distance has a magnitude in a range from 10 nm to 1 μm.
14. The microelectromechanical microphone device of claim 11 , wherein the stoppage member is monolithically integrated into the flexible plate.
15. The microelectromechanical microphone device of claim 11 , further comprising a second stoppage member affixed to the flexible plate and extending perpendicularly relative to the surface of the flexible plate opposite the surface of the substrate, the stoppage member having a distal surface that is separated from the surface of the substrate by a clearance distance, wherein the second stoppage member further limits the motion of the flexible plate in response to the pressure wave having the threshold amplitude.
16. The microelectromechanical microphone device of claim 15 , wherein the second stoppage member is located at a defined position along an arcuate path extending from the stoppage member, the arcuate path pertaining to a path that is centrosymmetric about an axis perpendicular to the surface of the flexible plate.
17. The microelectromechanical microphone device of claim 11 , further comprising multiple second stoppage members affixed to a rigid plate, each one of the multiple second stoppage members extending perpendicularly relative to the surface of the rigid plate opposite the surface of the flexible plate.
18. The microelectromechanical microphone device of claim 17 , wherein the multiple second stoppage members are uniformly distributed along a path that is centrosymmetric about an axis perpendicular to the surface of the flexible plate.
19. A device comprising:
a microelectromechanical microphone device comprising:
a substrate defining a first opening to receive a pressure wave;
a flexible plate mechanically coupled to the substrate and configured to be deformed by the pressure wave;
a rigid plate mechanically coupled to the flexible plate, the rigid plate defining multiple openings that permit passage of the pressure wave; and
at least one stoppage member assembled in a spatial relationship with the flexible plate, the at least one stoppage member configured to limit motion of the flexible plate in response to the pressure wave including a threshold amplitude; and
a circuit coupled to the microelectromechanical microphone device and configured to receive a first signal indicative of a capacitance representative of an amplitude of the pressure wave, the circuit being further configured to generate a second signal representative of the amplitude of the pressure wave.
20. The device of claim 19 , wherein the at least one stoppage member comprises a first stoppage member affixed to the rigid plate and extending perpendicularly relative to a surface of the rigid plate opposite a surface of the flexible plate, the stoppage member having a distal surface that is separated from the surface of the flexible plate by a clearance distance.
21. The device of claim 19 , wherein the at least one stoppage member comprises a first stoppage member affixed to the flexible plate and extending perpendicularly relative to a surface of the flexible plate opposite a surface of the substrate, the first stoppage member having a distal surface that is separated from the surface of the substrate by a clearance distance.
22. The device of claim 19 , wherein the at least one stoppage member comprises a first stoppage member and a second stoppage member,
wherein the first stoppage member is affixed to the rigid plate and extending perpendicularly relative to a surface of the rigid plate opposite a surface of the flexible plate, the stoppage member having a distal surface that is separated from the surface of the flexible plate by a first clearance distance, and
wherein the second stoppage member is affixed to the flexible plate and extending perpendicularly relative to a surface of the flexible plate opposite a surface of the substrate, the second stoppage member having a distal surface that is separated from the surface of the substrate by a second clearance distance.