IP Library Granted Patent US 12,372,623
Granted Patent B2
US 12,372,623 · App. 17/177,784 · Granted Jul 29, 2025

Conic micro-electro-mechanical system (MEMS) micro-mirror array (MMA) steered active situational awareness sensor

Inventors: Sean D. Keller (Tucson, AZ); Gerald P. Uyeno (Tucson, AZ); Benn H. Gleason (Tucson, AZ)
Assignee: Raytheon Company
G01S7/4817G01S17/04G02B26/0833
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,372,623
App. No.
17/177,784
Granted
Jul 29, 2025
Kind
B2
Abstract

An active situational sensor uses a beam steerer to steer a spot-beam onto a conical shape of a fixed mirror oriented along an optical axis to scan a FOR. The sensor may rapidly scan a 360° horizontal FOR with a specified vertical FOR or any portion thereof, move discretely between multiple specific objects per frame, vary the dwell time on an object or compensate for other external factors to tailor the scan to a particular application or changing conditions in real-time. The fixed mirror includes a MEMS MMA that approximates the conical shape of the mirror. The MEMS MMA being configurable to extend the vertical FOR or shape the spot-beam to adjust size, focus or intensity profile or to produce deviations in the wavefront of the spot-beam to compensate for path length differences or atmospheric distortion. The MEMS MMA being configurable to produce and independently steer a plurality of spot-beams of the same or different wavelengths.

Claims (56)

1. A situational awareness sensor, comprising:

a laser configured to generate a beam of optical radiation;

a fixed mirror having a conical shape oriented along an optical axis;

a beam steerer responsive to command signals to focus the optical radiation into a spot-beam on the conical shape of the fixed mirror and steer the spot-beam in two-dimensions about the optical axis to re-direct the spot-beam to scan a field-of-regard (FOR) in a first angular direction around the optical axis;

said fixed mirror comprising a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors that in combination approximate the conical shape, said mirrors responsive to command signals to tip and tilt to scan the spot-beam in a second angular direction along the optical axis to expand the FOR in the second angular direction; and

a detector configured to sense a reflected component of the spot-beam,

wherein the beam steerer responsive to command signals steers the spot-beam axially along the conic shape of the fixed mirror to scan the FOR in the second angular direction, said FOR in the second angular direction being expanded by operation of the MEMS MMA.

2. The situational awareness sensor of claim 1 , wherein the beam steerer comprises one of a gimbaled mirror, a liquid crystal waveguide (LCWG) or a steering MEMS MMA.

3. The situational awareness sensor of claim 1 , wherein the beam steerer comprises an N-port optical switch configured to selectively route the beam from 1 of N ports at discrete steering angles about the optical axis spaced around the conical shape of the fixed mirror and focus the optical radiation into the spot-beam on the conical shape of the fixed mirror to re-direct the spot-beam to scan a field-of-regard (FOR) at discrete scan angles in a first angular direction around the optical axis, said MEMS MMA's mirrors responsive to command signals to tip and tilt to scan the spot-beam in the first angular direction to span the discrete scan angles and provide a continuous FOR in the first angular direction.

4. The situational awareness sensor of claim 1 , wherein the fixed mirror comprises at least three triangular-shaped planar MEMS MMAs configured to form an N-sided pyramid that approximates the conic shape of the fixed mirror.

5. The situational awareness sensor of claim 1 , wherein the fixed mirror comprises one or more MEMS MMAs formed on a flexible substrate and wrapped on a conic mandrel to approximate the conic shape of the fixed mirror.

6. A situational awareness sensor, comprising:

a laser configured to generate a beam of optical radiation;

a fixed mirror having a conical shape oriented along an optical axis;

a beam steerer responsive to command signals to focus the optical radiation into a spot-beam on the conical shape of the fixed mirror and steer the spot-beam in two-dimensions about the optical axis to re-direct the spot-beam to scan a field-of-regard (FOR) in a first angular direction around the optical axis;

said fixed mirror comprising a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors that in combination approximate the conical shape, said mirrors responsive to command signals to tip and tilt to scan the spot-beam in a second angular direction along the optical axis to expand the FOR in the second angular direction; and

a detector configured to sense a reflected component of the spot-beam,

wherein the beam steerer comprises:

a parabolic mirror having a hole formed at its center through which the beam of optical radiation passes; and

a steering MEMS MMA positioned in front of the parabolic mirror to receive the beam, said steering MEMS MMA comprising one or more independent and continuously controlled mirrors that tip and tilt to steer the beam onto different off-axis sections of the parabolic mirror that focus the optical radiation into the spot-beam and steer the spot-beam about the optical axis.

7. The situational awareness sensor of claim 6 , wherein the mirrors of the fixed mirror's MEMS MMA and the steering MEMSM MMA are further configured to piston to shape the spot-beam.

8. A situational awareness sensor, comprising:

a laser configured to generate a beam of optical radiation:

a fixed mirror having a conical shape oriented along an optical axis;

a beam steerer responsive to command signals to focus the optical radiation into a spot-beam on the conical shape of the fixed mirror and steer the spot-beam in two-dimensions about the optical axis to re-direct the spot-beam to scan a field-of-regard (FOR) in a first angular direction around the optical axis,

said fixed mirror comprising a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors that in combination approximate the conical shape, said mirrors responsive to command signals to tip and tilt to scan the spot-beam in a second angular direction along the optical axis to expand the FOR in the second angular direction; and

a detector configured to sense a reflected component of the spot-beam, wherein the beam steerer comprises:

a steering MEMS MMA positioned to receive the beam at an angle of incidence, said steering MEMS MMA comprising a plurality of independent and continuously controlled mirrors that approximate an off-axis section of a parabolic surface to re-direct and focus the optical radiation into the spot-beam on the conical shape of the fixed mirror, said mirrors responsive to command signals to tip, tilt and piston each mirror to steer the spot-beam in two-dimensions about the optical axis.

9. The situational awareness sensor of claim 8 , wherein the mirrors of the fixed mirror's MEMS MMA and the steering MEMS MMA are further configured to piston to shape the spot-beam.

10. A situational awareness sensor, comprising:

a laser configured to generate a beam of optical radiation;

a fixed mirror having a conical shape oriented along an optical axis;

a beam steerer responsive to command signals to focus the optical radiation into a spot-beam on the conical shape of the fixed mirror and steer the spot-beam in two-dimensions about the optical axis to re-direct the spot-beam to scan a field-of-regard (FOR) in a first angular direction around the optical axis;

said fixed mirror comprising a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors that in combination approximate the conical shape, said mirrors responsive to command signals to tip, tilt and piston to scan and shape the spot-beam in a second angular direction along the optical axis to expand and scan the FOR in the second angular direction; and

a detector configured to sense a reflected component of the spot-beam.

11. The situational awareness sensor of claim 10 , wherein each said mirror rotates about X and Y orthogonal axes, respectively, and translates along a Z axis orthogonal to the XY plane to tip, tilt and piston, respectively.

12. The situational awareness sensor of claim 11 , wherein each said mirror is supported at three vertices of a triangle, wherein lines defined by three different pairs of said vertices provide three axes at 60 degrees to one another in the XY plane, wherein each said mirror pivots about each said axes to produce tilt, tip and piston in an XYZ space.

13. The situational awareness sensor of claim 10 , wherein the mirrors are configured to at least partially collimate the spot-beam.

14. The situational awareness sensor of claim 10 , wherein said mirrors tip, tilt and piston to shape the spot-beam to perform one or more of the following:

adjust a size, divergence or intensity profile of the spot-beam;

produce deviations in the wavefront of the spot-beam to compensate for atmospheric distortion; and

adjust the phase and maintain a zero phase difference across the spot-beam.

15. A situational awareness sensor, comprising:

a laser configured to generate a beam of optical radiation;

a fixed mirror having a conical shape oriented along an optical axis;

a beam steerer responsive to command signals to focus the optical radiation into a spot-beam on the conical shape of the fixed mirror and steer the spot-beam in two-dimensions about the optical axis to re-direct the spot-beam to scan a field-of-regard (FOR) in a first angular direction around the optical axis;

said fixed mirror comprising a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors that in combination approximate the conical shape, said mirrors responsive to command signals to tip and tilt to scan the spot-beam in a second angular direction along the optical axis to expand the FOR in the second angular direction; and

a detector configured to sense a reflected component of the spot-beam,

wherein the MEMS MMA is partitioned into a plurality of segments illuminated by the spot-beam, each segment including at least one mirror, said MEMS MMA responsive to tip and tilt the mirrors in each segment to separate the spot-beam into a plurality of spot-beams to scan the FOR.

16. The situational awareness sensor of claim 15 , wherein the MEMS MMA is partitioned into a plurality of segments illuminated by the spot-beam, each segment including at least one mirror, said MEMS MMA responsive to tip, tilt and piston the mirrors in each segment to separate the spot-beam into a plurality of spot-beams to scan the FOR.

17. A situational awareness sensor, comprising:

a laser configured to generate a beam of optical radiation;

a fixed mirror having a conical shape oriented along an optical axis;

a beam steerer responsive to command signals to focus the optical radiation into a spot-beam on the conical shape of the fixed mirror and steer the spot-beam in two-dimensions about the optical axis to re-direct the spot-beam to scan a field-of-regard (FOR) in a first angular direction around the optical axis;

said fixed mirror comprising a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) including a plurality of mirrors that in combination approximate the conical shape, said mirrors responsive to command signals to tip and tilt scan the spot-beam in a second angular direction along the optical axis to expand the FOR in the second angular direction and to tip, tilt and piston to shape and at least partially collimate the spot-beam that scans the FOR; and

a detector configured to sense a reflected component of the spot-beam.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 17, 2021
From: KELLER, SEAN D.; UYENO, GERALD P.; GLEASON, BENN H.
To: RAYTHEON COMPANY
Reel/Frame 055297/0843 →
Continuity (1)
Related Publication 20220260685A1 · Aug 18, 2022
References Cited (131)
US 5404375A · Kroeger et al. · 1995 [cited by applicant]
US 5854702A · Ishikawa et al. · 1998 [cited by applicant]
US 6181450B1 · Dishman et al. · 2001 [cited by applicant]
US 6271953B1 · Dishman et al. · 2001 [cited by applicant]
US 6327063B1 · Rockwell · 2001 [cited by applicant]
US 6567574B1 · Ma et al. · 2003 [cited by applicant]
US 6792028B2 · Cook et al. · 2004 [cited by applicant]
US 7304296B2 · Mills et al. · 2007 [cited by applicant]
US 7593641B2 · Tegge, Jr. · 2009 [cited by applicant]
US 7626152B2 · King et al. · 2009 [cited by applicant]
US 7660235B2 · Alicherry et al. · 2010 [cited by applicant]
US 7667190B2 · Mills et al. · 2010 [cited by applicant]
US 7969558B2 · Hall · 2011 [cited by applicant]
US 8164037B2 · Jenkins et al. · 2012 [cited by applicant]
US 8301027B2 · Shaw et al. · 2012 [cited by applicant]
US 8305578B1 · Mudge et al. · 2012 [cited by applicant]
US 8311372B2 · Anderson et al. · 2012 [cited by applicant]
US 8368889B2 · Schwiegerling et al. · 2013 [cited by applicant]
US 8380025B2 · Anderson et al. · 2013 [cited by applicant]
US 8463080B1 · Anderson et al. · 2013 [cited by applicant]
US 8767190B2 · Hall · 2014 [cited by applicant]
US 8823848B2 · Chipman et al. · 2014 [cited by applicant]
US 8983293B2 · Frankel et al. · 2015 [cited by applicant]
US 9473768B2 · Uyeno et al. · 2016 [cited by applicant]
US 9477135B1 · Uyeno et al. · 2016 [cited by applicant]
US 9632166B2 · Trail et al. · 2017 [cited by applicant]
US 9857226B2 · LeMaster et al. · 2018 [cited by applicant]
US 9904081B2 · Uyeno et al. · 2018 [cited by applicant]
US 9927515B2 · Keller et al. · 2018 [cited by applicant]
US 10148056B2 · Uyeno et al. · 2018 [cited by applicant]
US 10209439B2 · Keller et al. · 2019 [cited by applicant]
US 10243654B1 · Uyeno et al. · 2019 [cited by applicant]
US 10267915B2 · Uyeno et al. · 2019 [cited by applicant]
US 10381701B2 · Motoi · 2019 [cited by applicant]
US 10444492B2 · Hopkins et al. · 2019 [cited by applicant]
US 10718491B1 · Raring et al. · 2020 [cited by applicant]
US 10969598B2 · Fest et al. · 2021 [cited by applicant]
US 10998965B2 · Tong et al. · 2021 [cited by applicant]
US 11042025B2 · Uyeno et al. · 2021 [cited by applicant]
US 11333879B2 · Uyeno et al. · 2022 [cited by applicant]
US 12025790B2 · Keller · 2024 [cited by examiner]
US 12117607B2 · Gleason · 2024 [cited by examiner]
US 20020141689A1 · Qian et al. · 2002 [cited by applicant]
US 20020196506A1 · Graves et al. · 2002 [cited by applicant]
US 20030062468A1 · Byren et al. · 2003 [cited by applicant]
US 20030081321A1 · Moon et al. · 2003 [cited by applicant]
US 20030185488A1 · Blumenthal · 2003 [cited by applicant]
US 20040072540A1 · Wilson et al. · 2004 [cited by applicant]
US 20040081466A1 · Walther et al. · 2004 [cited by applicant]
US 20040141752A1 · Shelton et al. · 2004 [cited by applicant]
US 20040258415A1 · Boone et al. · 2004 [cited by applicant]
US 20050031255A1 · Schroeder et al. · 2005 [cited by applicant]
US 20050100339A1 · Tegge · 2005 [cited by applicant]
US 20050122566A1 · Cicchiello · 2005 [cited by applicant]
US 20050288031A1 · Davis et al. · 2005 [cited by applicant]
US 20060038103A1 · Helmbrecht · 2006 [cited by applicant]
US 20060245033A1 · Baba-ali et al. · 2006 [cited by applicant]
US 20070031157A1 · Yamada et al. · 2007 [cited by applicant]
US 20070036480A1 · Wu · 2007 [cited by applicant]
US 20080050064A1 · Sakai et al. · 2008 [cited by applicant]
US 20080130090A1 · Aubuchon · 2008 [cited by applicant]
US 20100149533A1 · Fest · 2010 [cited by applicant]
US 20100166430A1 · Alten · 2010 [cited by applicant]
US 20100192941A1 · Stoia et al. · 2010 [cited by applicant]
US 20120002973A1 · Bruzzi et al. · 2012 [cited by applicant]
US 20120008133A1 · Silny et al. · 2012 [cited by applicant]
US 20120103065A1 · Muehleisen · 2012 [cited by applicant]
US 20120114337A1 · Aoki · 2012 [cited by applicant]
US 20120155885A1 · Hannah et al. · 2012 [cited by applicant]
US 20120168605A1 · Milanovic · 2012 [cited by applicant]
US 20130271818A1 · Bastien et al. · 2013 [cited by applicant]
US 20140063299A1 · Fest et al. · 2014 [cited by applicant]
US 20150099476A1 · Beals · 2015 [cited by applicant]
US 20150172218A1 · Beshai · 2015 [cited by applicant]
US 20150311981A1 · Inagaki et al. · 2015 [cited by applicant]
US 20150378242A1 · Auxier et al. · 2015 [cited by applicant]
US 20160003677A1 · Pezzaniti et al. · 2016 [cited by applicant]
US 20160043800A1 · Kingsbury et al. · 2016 [cited by applicant]
US 20160234703A1 · Aldana et al. · 2016 [cited by applicant]
US 20160294472A1 · Palmer et al. · 2016 [cited by applicant]
US 20170293137A1 · Zhao et al. · 2017 [cited by applicant]
US 20170365970A1 · Uyeno et al. · 2017 [cited by applicant]
US 20180231715A1 · Bishop et al. · 2018 [cited by applicant]
US 20190066320A1 · Uyeno et al. · 2019 [cited by applicant]
US 20190154921A1 · Xing et al. · 2019 [cited by applicant]
US 20200166430A1 · Bradbury et al. · 2020 [cited by applicant]
US 20200244359A1 · Csonka et al. · 2020 [cited by applicant]
US 20210088776A1 · Uyeno et al. · 2021 [cited by applicant]
US 20210091854A1 · Uyeno et al. · 2021 [cited by applicant]
US 20210092260A1 · Uyeno et al. · 2021 [cited by applicant]
US 20220236383A1 · Uyeno et al. · 2022 [cited by applicant]
US 20220260827A1 · Keller et al. · 2022 [cited by applicant]
US 20220350133A1 · Gleason et al. · 2022 [cited by applicant]
DE 1020111040238B4 · 2019 [cited by applicant]
EP 2667142A1 · 2013 [cited by applicant]
EP 2533003B1 · 2018 [cited by applicant]
WO WO2014200581A2 · 2014 [cited by applicant]
“MEMS Mirror Array—Beam Steering Mode”, [Online]. Retrieved from the Internet: <www.youtube.com/watch?v=wHIUU3kKtzM>, (Aug. 10, 2017), 2 pgs. [cited by applicant]
Rodriguez, et al., “Beam steering by digital micro-mirror device for multi-beam and single-chip lidar”, Proc. SPIE 10757, Optical Data Storage 2018: Industrial Optical Devices and Systems, (Sep. 14, 2018), 7 pgs. [cited by applicant]
Ryf, et al., “MEMS tip/tilt and piston mirror arrays as diffractive optical elements”, Proc. SPIE 5894, Advanced Wavefront Control: Methods, Devices, and Applications III, (Aug. 30, 2005), 12 pgs. [cited by applicant]
Tsou, et al., “Extended-image spatial tracking technique for deep-space optical downlinks”, Proc. SPIE 3762, Adaptive Optics Systems and Technology, (Sep. 27, 1999), 101-109. [cited by applicant]
Tuantranont, et al., “Optical beam steering using MEMS-controllable microlens array”, Sensors and Actuators A: Physical vol. 91, Issue 3, (Jul. 15, 2001), 363-372. [cited by applicant]
“U.S. Appl. No. 17/177,755, Non Final Office Action mailed Sep. 21, 2023”, 5 pgs. [cited by applicant]
“U.S. Appl. No. 17/177,755, Response filed Dec. 20, 2023 to Non Final Office Action mailed Sep. 21, 2023”, 8 pgs. [cited by applicant]
“U.S. Appl. No. 17/177,755, Notice of Allowance mailed Feb. 22, 2024”, 8 pgs. [cited by applicant]
“U.S. Appl. No. 17/159,967, Non Final Office Action mailed Apr. 24, 2024”, 21 pgs. [cited by applicant]
“U.S. Appl. No. 16/871,602, Non Final Office Action mailed Nov. 9, 2020”, 18 pgs. [cited by applicant]
“U.S. Appl. No. 16/871,602, Notice of Allowance mailed Feb. 24, 2021”, 5 pgs. [cited by applicant]
“U.S. Appl. No. 16/871,602, Response filed Feb. 8, 2021 to Non Final Office Action mailed Nov. 9, 2020”, 12 pgs. [cited by applicant]
“U.S. Appl. No. 17/007,917, Non Final Office Action mailed Aug. 3, 2021”, 35 pgs. [cited by applicant]
“U.S. Appl. No. 17/007,917, Response filed Dec. 1, 2021 to Non Final Office Action mailed Aug. 3, 2021”, 16 pgs. [cited by applicant]
“High Contrast IR Wire Grid Polarizers”, Edmund Optics, [Online]. Retrieved from the Internet: <URL: https://www.edmundoptics.com/f/high-contrast-ir-wire-grid-polarizers/14797/>, (Accessed Sep. 4, 2021), 1 pg. [cited by applicant]
“Mid-Wave Infrared (MWIR) and Long-Wave Infrared (LWIF) Waveplates”, Edmund Optics, [Online]. Retrieved from the Internet: <URL: https://www.edmundoptics.com/f/mid-wave-infrared-mwir-and-long-wave-infrared-lwir-waveplat… [cited by applicant]
“Mirrorcle Technologies MEMS Mirrors—Technical Overview”, Mirrorcle Technologies, Inc., (2018), 7 pgs. [cited by applicant]
Ayral, J.-L., et al., “Phase-conjugate Nd:YAG laser with internal acousto-optic beam steering”, Optics Letters, vol. 16, No. 16, (Aug. 15, 1991), 1225-1227. [cited by applicant]
Chiu, Yi, et al., “Shape-Optimized Electrooptic Beam Scanners: Analysis, Design, and Simulation”, Journal of Lightwave Technology, vol. 17, No. 1, (Jan. 1999), 108-114. [cited by applicant]
Kim, et al., “Demonstration of large-angle nonmechanical laser beam steering based on LC polymer polarization grating”, Proc.. of SPIE vol. 8052 80520T, (May 13, 2011). [cited by applicant]
Kim, Jihwan, et al., “Wide-angle, nonmechanical beam steering using thin liquid crystal polarization gratings”, Proc. of SPIE, vol. 7093, (2008), 12 pgs. [cited by applicant]
King, D F, et al., “3rd-Generation 1280×720 FPA development status at Raytheon Vision Systems”, Proc. of SPIE vol. 6206 62060W-1, (2006), 16 pgs. [cited by applicant]
Norton, Andrew, et al., “High-Power Visible-Laser Effect on a 37-Segment Iris AO Deformable Mirror”, Proc. SPIE 7595, MEMS Adaptive Optics IV, 759506, (Feb. 17, 2010), 12 pgs. [cited by applicant]
Salmon, J.T., et al., “An Adaptive Optics System for Solid-State Laser Systems used in Inertial Confinement Fusion”, First Annual International Conference on Solid-State Lasers for Application of Intertial Confinement F… [cited by applicant]
Wang, Jinxue, et al., “Doppler Winds Lidar Technology Development and Demonstration”, AIAA-2005-6772, Space 2005, Long Beach, California, Aug. 30-1, 2005, 11 pgs. [cited by applicant]
Yamamoto, R., et al., “Evolution of a Solid State Laser”, Proc. SPIE 6552, Laser Source Technology for Defense and Security III, 655205, (May 10, 2007), 11 pgs. [cited by applicant]
“U.S. Appl. No. 17/159,967, Response filed Jun. 27, 2024 to Non Final Office Action mailed Apr. 24, 2024”, 10 pgs. [cited by applicant]
“U.S. Appl. No. 17/159,967, Final Office Action mailed Jul. 16, 2024”, 18 pgs. [cited by applicant]
“U.S. Appl. No. 17/159,967, Response filed Aug. 27, 2024 to Final Office Action mailed Jul. 16, 2024”, 12 pgs. [cited by applicant]
“U.S. Appl. No. 17/159,967, Advisory Action mailed Sep. 5, 2024”, 3 pgs. [cited by applicant]
“U.S. Appl. No. 17/159,967, Non Final Office Action mailed Nov. 7, 2024”, 23 pgs. [cited by applicant]
Phillip, A. Himmer, “Off-axis variable focus and aberration control mirrors”, Proc. SPIE 4985, MOEMS Display and Imaging Systems, [Online]. Retrieved from the Internet: https: doi.Org 10.1117 12.477815, (2003). [cited by applicant]
“U.S. Appl. No. 17/007,917, Notice of Allowance mailed Jan. 10, 2022”, 14 pgs. [cited by applicant]
“U.S. Appl. No. 17/007,917, Supplemental Notice of Allowability mailed Apr. 19, 2022”, 2 pgs. [cited by applicant]