Acoustic wave device and ladder filter
An acoustic wave device includes an IDT electrode on a piezoelectric body and the IDT electrode includes first and second busbars, and first and second electrode fingers. A first dielectric film extends from a region between tip end portions of the first electrode fingers and the piezoelectric body to a region between the second busbar and the piezoelectric body with a first gap in between. The second electrode fingers are in direct contact with the piezoelectric body at a center of an overlap width, and a permittivity of the first dielectric film is lower than a permittivity of the piezoelectric body.
1. An acoustic wave device comprising:
a piezoelectric body; and
an IDT electrode on the piezoelectric body; wherein
the IDT electrode includes a first busbar, a second busbar being separate from the first busbar, a plurality of first electrode fingers each of which includes a base end and a tip end, and a plurality of second electrode fingers each of which includes a base end and a tip end, the plurality of first electrode fingers and the plurality of second electrode fingers are interdigitated with each other, the base ends of the first electrode fingers are connected to the first busbar, the tip ends of the first electrode fingers face the second busbar with a first gap therebetween, the base ends of the second electrode fingers are connected to the second busbar, and the tip ends of the second electrode fingers face the first busbar with a second gap therebetween;
a first dielectric film extends from a region between tip end portions of the first electrode fingers and the piezoelectric body to a region between the second busbar and the piezoelectric body via the first gap;
the second electrode fingers are in direct contact with the piezoelectric body at a center or approximate center of an overlap width; and
a permittivity of the first dielectric film is lower than a permittivity of the piezoelectric body.
2. The acoustic wave device according to claim 1 , wherein
each of the first busbar and the second busbar includes an inner busbar connected to the first electrode fingers or the second electrode fingers, and an outer busbar located outside the inner busbar in an overlap width direction, and a region including an intermediate busbar connecting the inner busbar and the outer busbar; and
an acoustic velocity in the region including the intermediate busbar is higher than an acoustic velocity in the tip end portions of the first electrode fingers and in the tip end portions of the second electrode fingers.
3. The acoustic wave device according to claim 2 , wherein the first dielectric film extends to at least a region between the inner busbar and the piezoelectric body.
4. The acoustic wave device according to claim 3 , wherein
the piezoelectric body includes a high acoustic velocity member, a piezoelectric thin film, and a low acoustic velocity film layered between the high acoustic velocity member and the piezoelectric thin film; and
an acoustic wave velocity of an acoustic wave propagating through the high acoustic velocity member is higher than an acoustic velocity of an acoustic wave propagating through the piezoelectric thin film, and an acoustic velocity of an acoustic wave propagating through the low acoustic velocity film is lower than the acoustic velocity of the acoustic wave propagating through the piezoelectric thin film.
5. The acoustic wave device according to claim 3 , wherein
a reverse-velocity surface of the piezoelectric body is convex; and
an acoustic velocity in the first dielectric film is lower than an acoustic velocity of the acoustic wave propagating through the piezoelectric body.
6. The acoustic wave device according to claim 2 , wherein
the piezoelectric body includes a high acoustic velocity member, a piezoelectric thin film, and a low acoustic velocity film layered between the high acoustic velocity member and the piezoelectric thin film; and
an acoustic wave velocity of an acoustic wave propagating through the high acoustic velocity member is higher than an acoustic velocity of an acoustic wave propagating through the piezoelectric thin film, and an acoustic velocity of an acoustic wave propagating through the low acoustic velocity film is lower than the acoustic velocity of the acoustic wave propagating through the piezoelectric thin film.
7. The acoustic wave device according to claim 2 , wherein
a reverse-velocity surface of the piezoelectric body is convex; and
an acoustic velocity in the first dielectric film is lower than an acoustic velocity of the acoustic wave propagating through the piezoelectric body.
8. The acoustic wave device according to claim 1 , wherein
the piezoelectric body is a lithium tantalate film or a lithium niobate film; and
an acoustic velocity in the first dielectric film is lower than an acoustic velocity of the acoustic wave propagating through the piezoelectric body.
9. The acoustic wave device according to claim 1 , wherein
the first dielectric film is a layered dielectric film including a plurality of dielectric films that are layered.
10. The acoustic wave device according to claim 9 , wherein
the layered dielectric film includes a piezoelectric-body-side dielectric film and an IDT-electrode-side dielectric film closer to the IDT electrode than the piezoelectric-body-side dielectric film.
11. The acoustic wave device according to claim 10 , wherein an acoustic velocity of the piezoelectric-body-side dielectric film is higher than an acoustic velocity of the IDT-electrode-side dielectric film.
12. The acoustic wave device according to claim 10 , wherein
a permittivity of the piezoelectric-body-side dielectric film is lower than the permittivity of the piezoelectric body, and is higher than a permittivity of the IDT-electrode-side dielectric film.
13. The acoustic wave device according to claim 1 , wherein the first dielectric film is disposed in a partial region of the second busbar of the IDT electrode along an acoustic wave propagation direction.
14. The acoustic wave device according to claim 13 , wherein the first dielectric film is not disposed in a portion where the first busbar and the second electrode fingers face each other in a remaining region excluding the partial region.
15. A ladder filter comprising:
a resonator defined by the acoustic wave device of claim 1 .
16. The acoustic wave device according to claim 1 , further comprising:
a second dielectric film extending from a region between tip end portions of the second electrode fingers and the piezoelectric body to a region between the first busbar and the piezoelectric body via the second gap; wherein
the first electrode fingers are in direct contact with the piezoelectric body at the center or the approximate center of the overlap width; and
a permittivity of the second dielectric film is lower than the permittivity of the piezoelectric body.
17. The acoustic wave device according to claim 16 , wherein
the piezoelectric body includes a high acoustic velocity member, a piezoelectric thin film, and a low acoustic velocity film layered between the high acoustic velocity member and the piezoelectric thin film; and
an acoustic wave velocity of an acoustic wave propagating through the high acoustic velocity member is higher than an acoustic velocity of an acoustic wave propagating through the piezoelectric thin film, and an acoustic velocity of an acoustic wave propagating through the low acoustic velocity film is lower than the acoustic velocity of the acoustic wave propagating through the piezoelectric thin film.
18. The acoustic wave device according to claim 1 , wherein
the piezoelectric body includes a high acoustic velocity member, a piezoelectric thin film, and a low acoustic velocity film layered between the high acoustic velocity member and the piezoelectric thin film; and
an acoustic wave velocity of an acoustic wave propagating through the high acoustic velocity member is higher than an acoustic velocity of an acoustic wave propagating through the piezoelectric thin film, and an acoustic velocity of an acoustic wave propagating through the low acoustic velocity film is lower than the acoustic velocity of the acoustic wave propagating through the piezoelectric thin film.
19. The acoustic wave device according to claim 18 , wherein
the high acoustic velocity member includes a support substrate and a high acoustic velocity film disposed on the support substrate; and
the acoustic velocity of the acoustic wave propagating through the high acoustic velocity film is higher than the acoustic velocity of the acoustic wave propagating through the piezoelectric thin film.
20. The acoustic wave device according to claim 18 , wherein the high acoustic velocity member includes a high acoustic velocity support substrate.