Positioning substrates in imprint lithography processes
An imprint lithography method for positioning substrates includes supporting first and second substrates respectively atop first and second chucks, pneumatically suspending the first and second chucks laterally within first and second bushings, supporting the first and second chucks vertically within the first and second bushings, maintaining the first and second chucks respectively in first and second fixed rotational orientations, and forcing the first and second chucks in a downward direction independently of each other respectively against first and second vertical resistive forces until first and second top surfaces of the first and second substrates are coplanar, while maintaining the first and second chucks suspended laterally within the first and second bushings and while maintaining the first and second chucks in the first and second fixed rotational orientations.
1. An imprint lithography system, comprising:
first and second chucks configured to respectively support first and second substrates;
first and second bushings respectively surrounding the first and second chucks and configured to pneumatically suspend the first and second chucks laterally within the first and second bushings;
one or more supportive mechanisms disposed beneath the first and second chucks and configured to support the first and second chucks vertically within the first and second bushings, respectively; and
first and second features that maintain the first and second chucks in first and second fixed rotational orientations,
wherein the first and second chucks are configured to be forced in a downward direction independently of each other respectively against first and second vertical resistive forces provided by the one or more supportive mechanisms until first and second top surfaces of the first and second substrates are coplanar, while the first and second chucks are suspended laterally within the first and second bushings and while the first and second chucks are maintained in the first and second fixed rotational orientations.
2. The imprint lithography system of claim 1 , wherein a first thickness of the first substrate is different from a second thickness of the second substrate.
3. The imprint lithography system of claim 1 , further comprising a vacuum source configured to respectively suction the first and second substrates to the first and second chucks.
4. The imprint lithography system of claim 1 , wherein the first and second vertical resistive forces comprise an air pressure.
5. The imprint lithography system of claim 4 , wherein the one or more supportive mechanisms comprise an air plenum that is configured to pneumatically suspend the first and second chucks vertically within the first and second bushings.
6. The imprint lithography system of claim 4 , wherein the one or more supportive mechanisms comprise first and second air cylinders that are configured to pneumatically suspend the first and second chucks vertically within the first and second bushings.
7. The imprint lithography system of claim 1 , wherein the one or more supportive mechanisms comprise first and second springs that are configured to respectively support the first and second chucks vertically within the first and second bushings.
8. The imprint lithography system of claim 1 , wherein the first and second features comprise first and second strips that connect the first and second chucks to a base supporting the first and second chucks.
9. The imprint lithography system of claim 1 , wherein the first and second features comprise first and second double-shaft arrangements respectively associated with the first and second bushings.
10. The imprint lithography system of claim 1 , wherein the first and second chucks are configured to apply an upwardly directed force to a substrate processing element.