IP Library Granted Patent US 11,921,141
Granted Patent B2
US 11,921,141 · App. 17/191,443 · Granted Mar 5, 2024

Broadband radiation sensor based on a resonantly-coupled graphene SNS junction

Inventors: Raj M. Katti (Pasadena, CA); Harpreet Singh Arora (Pasadena, CA); Keith C. Schwab (Pasadena, CA); Michael L Roukes (Pasadena, CA); Stevan Nadj-Perge (Pasadena, CA)
Assignee: California Institute of Technology
G01R29/0878G01R31/2824H01L31/02019H01L31/1013H01L31/112H10N60/12
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Quick Facts
Patent No.
US 11,921,141
App. No.
17/191,443
Granted
Mar 5, 2024
Kind
B2
Abstract

A graphene-based broadband radiation sensor and methods for operation thereof are disclosed. The radiation sensor includes an electrical signal path for carrying electrical signals and one or more resonance structures connected to the electrical signal path. Each resonance structure includes a resonator having a resonant frequency. Each resonance structure also includes a graphene junction connected in series with the resonator, the graphene junction including a graphene layer and having an impedance that is dependent on a temperature of the graphene layer. Each resonance structure further includes a heating element that is thermally coupled to the graphene layer and is configured to receive an incident photon, where the temperature of the graphene layer increases in response to the heating element receiving the incident photon.

Claims (40)

1. A radiation sensor comprising:

an electrical signal path for carrying electrical signals; and

a resonance structure connected to the electrical signal path, the resonance structure comprising:

a resonator having a resonant frequency;

a graphene junction connected in series with the resonator, the graphene junction including a graphene layer and having an impedance that is dependent on a temperature of the graphene layer, wherein the graphene junction is connected between the resonator and ground; and

a heating element that is thermally coupled to the graphene layer and is configured to receive an incident photon, wherein the temperature of the graphene layer increases in response to the heating element receiving the incident photon.

2. The radiation sensor of claim 1 , wherein the electrical signal path is coupled to at least one port through which electrical measurements can be made to detect a shift in the resonant frequency of the resonator.

3. The radiation sensor of claim 2 , wherein the electrical measurements include S-parameter measurements.

4. The radiation sensor of claim 1 , wherein the heating element includes a heater line that is connected to the graphene layer at one end of the heater line.

5. The radiation sensor of claim 1 , further comprising:

a back gate voltage circuit that applies a back gate voltage to the graphene junction.

6. The radiation sensor of claim 1 , wherein the graphene junction is a superconductor-graphene-superconductor (S-G-S) junction.

7. The radiation sensor of claim 1 , wherein the resonator comprises Niobium Titanium Nitride (NbTiN).

8. The radiation sensor of claim 1 , further comprising:

a second resonance structure connected to the electrical signal path, the second resonance structure comprising:

a second resonator having a second resonant frequency different from the resonant frequency;

a second graphene junction connected in series with the second resonator, the second graphene junction including a second graphene layer and having a second impedance that is dependent on a second temperature of the second graphene layer; and

a second heating element that is thermally coupled to the second graphene layer and is configured to receive a second incident photon, wherein the temperature of the second graphene layer increases in response to the second heating element receiving the second incident photon.

9. A method of operating a radiation sensor, the method comprising:

receiving an incident photon at a heating element of a resonance structure of the radiation sensor;

heating a graphene layer of a graphene junction of the resonance structure in response to receiving the incident photon;

changing an impedance of the graphene junction in response to heating the graphene layer;

shifting a resonant frequency of a resonator of the resonance structure in response to changing the impedance of the graphene junction, wherein the graphene junction is connected between the resonator and ground; and

receiving electrical signals at one or more ports coupled to an electrical signal path of the radiation sensor, wherein the resonance structure is connected to the electrical signal path.

10. The method of claim 9 , wherein the electrical signals are provided at the one or more ports to perform electrical measurements to detect a shift in the resonant frequency of the resonator.

11. The method of claim 10 , wherein the electrical measurements include S-parameter measurements.

12. The method of claim 9 , wherein the heating element includes a heater line that is connected to the graphene layer at one end of the heater line.

13. The method of claim 9 , further comprising:

applying a back gate voltage to the graphene junction using a back gate voltage circuit.

14. The method of claim 9 , wherein the graphene junction is a superconductor-graphene-superconductor (S-G-S) junction.

15. The method of claim 9 , wherein the resonator comprises Niobium Titanium Nitride (NbTiN).

16. A method of making electrical measurements using a radiation sensor, the method comprising:

providing an input signal at one or more ports coupled to an electrical signal path of the radiation sensor, wherein the radiation sensor comprises a resonance structure connected to the electrical signal path, the resonance structure comprising a resonator, a graphene junction connected in series with the resonator and including a graphene layer, and a heating element that converts an incident photon into heating of the graphene layer, wherein the graphene junction is connected between the resonator and ground;

receiving an output signal at the one or more ports coupled to the electrical signal path;

comparing the output signal to the input signal to detect a shift in a resonant frequency of the resonator; and

detecting the incident photon based on the shift in the resonant frequency of the resonator.

17. The method of claim 16 , wherein the electrical measurements include S-parameter measurements.

18. The method of claim 16 , wherein the heating element includes a heater line that is connected to the graphene layer at one end of the heater line.

19. The method of claim 16 , wherein the graphene junction is a superconductor-graphene-superconductor (S-G-S) junction.

20. The method of claim 16 , wherein the resonator comprises Niobium Titanium Nitride (NbTiN).

Assignments (2)
CONFIRMATORY LICENSE Recorded Nov 22, 2023
From: CALIFORNIA INSTITUTE OF TECHNOLOGY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 065645/0375 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 15, 2021
From: KATTI, RAJ M.; ARORA, HARPREET SINGH; SCHWAB, KEITH C.; ROUKES, MICHAEL L.; NADJ-PERGE, STEVAN
To: CALIFORNIA INSTITUTE OF TECHNOLOGY
Reel/Frame 056553/0789 →
Continuity (2)
Provisional Application 62984451 · Mar 3, 2020
Related Publication 20210311101A1 · Oct 7, 2021