IP Library Granted Patent US 11,578,230
Granted Patent B2
US 11,578,230 · App. 17/196,006 · Granted Feb 14, 2023

Composition, polymer, and method of producing substrate

Inventors: Hiroyuki Komatsu (Tokyo, JP); Miki Tamada (Tokyo, JP); Ryo Kumegawa (Tokyo, JP); Tatsuya Sakai (Tokyo, JP)
Assignee: JSR CORPORATION
C09D125/16B05D1/005C08F212/08C08F212/12C08L101/02C23C18/00C23C18/18B05D3/0272B05D7/24B05D2202/40B05D2202/45B05D2203/30B05D2401/10H01L23/145
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Quick Facts
Patent No.
US 11,578,230
App. No.
17/196,006
Granted
Feb 14, 2023
Kind
B2
Abstract

A method of producing a substrate includes: applying a composition on a metal basal plate to form a coating film; and forming a metal-containing layer on at least a part of the coating film. The composition contains a solvent, and a polymer having a first terminal structure and a second terminal structure in a single molecule. Each of the first terminal structure and the second terminal structure is at least one selected from the group consisting of a structure represented by formula (1) and a structure represented by formula (2). A 1 and A 2 each independently represent a monovalent group having a functional group capable of forming a chemical bond with a metal atom. L 2 represents —S—, —NR—, or —NA 22 -, wherein A 22 represents a monovalent group having a functional group capable of forming a chemical bond with a metal atom.

Claims (32)

1. A method of producing a substrate, the method comprising:

applying a composition on a metal basal plate to form a coating film; and

forming a metal-containing layer on at least a part of the coating film, wherein

the composition comprises a solvent, and a polymer comprising a first terminal structure and a second terminal structure in a single molecule, wherein

the first terminal structure is a structure represented by formula (1), and the second terminal structure is represented by formula (2),

wherein:

in the formula (1), L 1 represents a trivalent group having 1 to 20 carbon atoms; A 1 represents a monovalent group comprising a functional group capable of forming a chemical bond with a metal atom; X represents a hydrogen atom, —SH, —S-A 11 , or a monovalent organic group having 1 to 20 carbon atoms, wherein A 11 represents a monovalent group comprising a functional group capable of forming a chemical bond with a metal atom; n denotes a number of structural units constituting a block represented by (-L 1 (-A 1 )-) n , and is an integer of no less than 2, wherein a plurality of A 1 s are identical or different, and A 1 and A 11 are identical or different; and * denotes a site bonding to a part other than the structure represented by the formula (1) in the polymer; and

in the formula (2), L 2 represents —S—, —NR—, or —NA 22 -, wherein R represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, and A 22 represents a monovalent group comprising a functional group capable of forming a chemical bond with a metal atom; A 2 represents a monovalent group comprising a functional group capable of forming a chemical bond with a metal atom, and A 2 and A 22 are identical or different; m is 0 or 1; and * denotes a site bonding to a part other than the structure represented by the formula (2) in the polymer, and

wherein the polymer is synthesized by: polymerizing first monomers in a presence of a polymerization initiator that gives the second terminal structure; and then by polymerizing second monomers each of which gives the first terminal structure.

2. The method according to claim 1 , wherein in the polymer, the functional group which is capable of forming a chemical bond with a metal atom and is in the first terminal structure, and the functional group which is capable of forming a chemical bond with a metal atom and is in the second terminal structure are different from each other.

3. The method according to claim 1 , wherein A 1 in the formula (1) represents a phosphoric acid group, and A 2 in the formula (2) represents at least one selected from the group consisting of a nitrile group, a carboxy group, an ester group, and a hydroxy group.

4. The method according to claim 1 , wherein X in the formula (1) is —SH or a hydrogen atom.

5. The method according to claim 1 , wherein n in the formula (1) is an integer of 2 to 10.

6. The method according to claim 1 , wherein the polymer comprises a structural unit derived from hydrocarbon group-substituted or unsubstituted styrene.

7. The method according to claim 1 , wherein:

the metal basal plate comprises a first metal atom, and the metal-containing layer comprises a second metal atom being different from the first metal atom; and

in the polymer, the functional group of the first terminal structure is capable of forming a chemical bond with the first metal atom, and the functional group of the second terminal structure is capable of forming a chemical bond with the second metal atom.

8. The method according to claim 7 , wherein

the functional group of the first terminal structure is a phosphoric acid group, and

the functional group of the second terminal structure is at least one selected from the group consisting of a nitrile group, a carboxy group, an ester group, and a hydroxy group.

9. The method according to claim 7 , wherein the polymerization initiator is azobisisobutyronitrile.

10. The method according to claim 7 , wherein the polymer is synthesized by RAFT (Reversible Addition-Fragmentation Chain Transfer) polymerization.

11. The method according to claim 7 , wherein the first terminal structure comprises a block derived from vinylphosphoric acid.

12. The method according to claim 7 , wherein the second terminal structure is a cyanoalkyl group.

13. The method according to claim 7 , wherein X in the formula (1) is —SH or a hydrogen atom.

14. The method according to claim 7 , wherein n in the formula (1) is an integer of 2 to 10.

15. The method according to claim 7 , wherein the polymer comprises a structural unit derived from a hydrocarbon group-substituted or unsubstituted styrene.

16. The method according to claim 1 , wherein the polymerization initiator is azobisisobutyronitrile.

17. The method according to claim 1 , wherein the polymer is synthesized by RAFT (Reversible Addition-Fragmentation Chain Transfer) polymerization.

18. The method according to claim 1 , wherein the first terminal structure comprises a block derived from vinylphosphoric acid.

19. The method according to claim 1 , wherein the second terminal structure is a cyanoalkyl group.

20. The method according to claim 1 , wherein the first monomer is a hydrocarbon group-substituted or unsubstituted styrene, the first terminal structure comprises a block derived from vinylphosphoric acid, and the second terminal structure is a cyanoalkyl group.

Assignments (3)
MERGER Recorded Mar 23, 2026
From: JSR CORPORATION
To: JICC-02, CO., LTD
Reel/Frame 075191/0149 →
CHANGE OF NAME Recorded Mar 23, 2026
From: JICC-02 CO., LTD
To: JSR CORPORATION
Reel/Frame 075192/0023 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2021
From: KOMATSU, HIROYUKI; TAMADA, MIKI; KUMEGAWA, RYO; SAKAI, TATSUYA
To: JSR CORPORATION
Reel/Frame 055533/0796 →
Priority Claims (1)
JP JP2018-188640 · Oct 3, 2018 · national
Continuity (2)
Continuation PCTJP2019038636 · Sep 30, 2019
Related Publication 20210189553A1 · Jun 24, 2021