RF circuit module and manufacturing method therefor
An RF circuit module includes a module substrate, a first substrate in which a first circuit is implemented, and a second substrate in which a second circuit is implemented. The first circuit includes a control circuit that controls an operation of the second circuit. The second circuit includes a radio-frequency amplifier circuit that amplifies an RF signal. The second substrate is mounted on the first substrate. The first substrate is disposed on the module substrate such that a circuit forming surface faces the module substrate. The first substrate and the second substrate have a circuit-to-circuit connection wire that electrically connects the first circuit and the second circuit without intervening the module substrate.
1. An RF circuit module comprising:
a module substrate having electrodes for mounting components;
a first substrate in which a first circuit is implemented, the first substrate being flip-chip bonded to the module substrate, and the first substrate having a first substrate-side conductor protrusion connected to one of the electrodes of the module substrate; and
a second substrate in which a second circuit is implemented, the second substrate being mounted on the first substrate, the second substrate having a second substrate-side conductor protrusion connected to an other one of the electrodes of the module substrate, and the second circuit including a radio-frequency amplifier circuit configured to amplify an RF signal, wherein
the first circuit includes a control circuit configured to control an operation of the second circuit, and
the first substrate and the second substrate each have a conductor layer that makes up a circuit-to-circuit connection wire that electrically connects the first circuit and the second circuit without intervening the module substrate.
2. The RF circuit module according to claim 1 , wherein
the second substrate-side conductor protrusion is provided nearest to the second circuit.
3. The RF circuit module according to claim 1 , wherein
a first substrate-side electrode is on a surface of the first substrate at a position not overlapping the second substrate, and
the first substrate-side conductor protrusion is connected to the first substrate-side electrode.
4. An RF circuit module comprising:
a module substrate having electrodes for mounting components;
a first substrate in which a first circuit is implemented; and
a second substrate in which a second circuit is implemented, the second substrate being mounted on the first substrate, the second circuit including a radio-frequency amplifier circuit configured to amplify an RF signal, wherein
the first circuit includes a control circuit configured to control an operation of the second circuit,
the first substrate and the second substrate have a conductor layer that makes up a circuit-to-circuit connection wire that electrically connects the first circuit and the second circuit without intervening the module substrate, and
in a plan view of the module substrate, a top surface of a conductor layer that makes up the circuit-to-circuit connection wire is located at or below a top surface of the second circuit.
5. The RF circuit module according to claim 4 , wherein
the first circuit or the second circuit includes an impedance matching circuit that matches impedance between the radio-frequency amplifier circuit and an input or output of the radio-frequency amplifier circuit, or part of the impedance matching circuit.
6. The RF circuit module according to claim 1 , wherein
the first substrate is a substrate made of an elemental semiconductor, and
the second substrate is a substrate made of a compound semiconductor.
7. The RF circuit module according to claim 1 , wherein
the first substrate has a higher thermal conductivity than the second substrate.
8. The RF circuit module according to claim 1 , wherein
the second substrate is thinner than the first substrate.
9. The RF circuit module according to claim 1 , wherein
the control circuit includes a switch circuit for the RF signal.
10. The RF circuit module according to claim 1 , wherein
the first substrate includes a heat spreader including a conductor layer and an insulator layer laminated together, and
the heat spreader is disposed near the second circuit.
11. The RF circuit module according to claim 1 , wherein
the conductor layer that makes up the circuit-to-circuit connection wire includes a same layer as a conductor layer that makes up the second circuit.
12. The RF circuit module according to claim 1 , wherein
the first substrate has the first substrate-side conductor protrusion connected to the one of the electrodes of the module substrate,
the second substrate has the second substrate-side conductor protrusion connected to the another one of the electrodes of the module substrate, and
the first circuit and the second circuit face an electrode surface of the module substrate.
13. The RF circuit module according to claim 12 , wherein
the first substrate-side conductor protrusion is directly in contact with the conductor layer that makes up the circuit-to-circuit connection wire.
14. The RF circuit module according to claim 12 , wherein
a height of the first substrate-side conductor protrusion is less than a thickness of the first substrate.
15. An RF circuit module comprising:
a module substrate having electrodes for connecting components;
a first substrate in which a first circuit electrically continuous with at least one of the electrodes of the module substrate is implemented; and
a second substrate in which a second circuit electrically continuous with at least another one of the electrodes of the module substrate is implemented, wherein
the first circuit or the second circuit includes a radio-frequency amplifier circuit configured to amplify a radio-frequency signal,
the circuit different from the circuit in which the radio-frequency amplifier circuit is implemented includes a control circuit configured to control an operation of the radio-frequency amplifier circuit,
the first substrate and the second substrate overlap such that one of the first substrate and the second substrate is included in an other one of the first substrate and the second substrate in plan view of the module substrate, and
the first substrate and the second substrate have a conductor layer that makes up a circuit-to-circuit connection wire that electrically connects the first circuit and the second circuit without intervening the module substrate.
16. The RF circuit module according to claim 15 , wherein
the conductor layer that makes up the circuit-to-circuit connection wire includes a same layer as a conductor layer that makes up the first circuit or the second circuit.
17. The RF circuit module according to claim 15 , wherein
the first substrate or the second substrate, disposed near the module substrate, has a through conductor that electrically connects a first surface on which a circuit is implemented and a second surface opposite from the first surface.
18. The RF circuit module according to claim 15 , wherein
the first substrate or the second substrate has a conductor protrusion connected to one of the electrodes of the module substrate, and
the first circuit of the first substrate and the second circuit of the second substrate face an electrode surface of the module substrate.
19. The RF circuit module according to claim 18 , wherein
the conductor protrusion is directly in contact with the conductor layer that makes up the circuit-to-circuit connection wire.
20. The RF circuit module according to claim 18 , wherein
one of the first substrate and the second substrate includes an other one of the first substrate and the second substrate in plan view of the module substrate, and the one of the first substrate and the second substrate has the conductor protrusion of which a height is less than a thickness of the first substrate.
21. The RF circuit module according to claim 1 , wherein
the second substrate is between the first substrate and the module substrate.
22. The RF circuit module according to claim 15 , wherein
the second substrate is between the first substrate and the module substrate.