Particle beam apparatus and composite beam apparatus
Provided is a particle beam apparatus capable of performing appropriate switching selectively between charged particle beam and neutral particle beam. A particle beam column ( 19 ) includes an ion source ( 41 ), a condenser lens ( 52 ), a charge exchange grid ( 55 ), and an objective lens ( 56 ). The ion source ( 41 ) generates ions. The condenser lens ( 52 ) changes focusing of the ion beam so that switching is performed between ion beam and neutral beam as particle beam with which a sample (S) is irradiated. The charge exchange grid ( 55 ) converts at least a part of ion beam into neutral particle beam through neutralization. The objective lens ( 56 ) is placed downstream of the charge exchange grid ( 55 ). The objective lens ( 56 ) reduces the ion beam toward the sample (S) when the sample (S) is irradiated with the neutral particle beam as the particle beam.
1. A particle beam apparatus, comprising:
a particle beam column irradiating a sample with particle beam;
a charged particle source, which is provided inside the particle beam column and generates charged particles;
a conversion unit converting at least a part of the beam of charged particles generated from the charged particle source to a beam of neutral particles by neutralization inside the particle beam column;
a switching unit switching between a beam of charged particles and a beam of neutral particles as the particle beam inside the particle beam column; and
a reduction unit, which is provided downstream of the conversion unit and reduces the beam of the charged particles directed towards the sample.
2. The particle beam apparatus of claim 1 , further comprising:
a blocking unit, which is provided upstream of the conversion unit inside the particle beam column and blocks the beam of the charged particles.
3. The particle beam apparatus of claim 1 , further comprising:
an acceleration electrode accelerating the beam of charged particles inside the particle beam column.
4. A composite beam apparatus, comprising:
the particle beam apparatus of claim 1 ; and
a detector detecting secondary charged particles generated from the sample by irradiation with the beam of the charged particles.
5. The composite beam apparatus of claim 4 , further comprising:
an electron beam column irradiating the sample with electron beam.
6. The composite beam apparatus of claim 4 or 5 , further comprising:
a focused ion beam column irradiating the sample with focused ion beam.