IP Library Granted Patent US 11,501,810
Granted Patent B2
US 11,501,810 · App. 17/204,424 · Granted Nov 15, 2022

Amorphous spin diffusion layer for modified double magnetic tunnel junction structure

Inventors: Daniel Worledge (San Jose, CA); Guohan Hu (Yorktown Heights, NY)
Assignee: International Business Machines Corporation
G11C11/161H01F10/131H01F10/3204H01L43/02H01L43/08H01L43/10
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Quick Facts
Patent No.
US 11,501,810
App. No.
17/204,424
Granted
Nov 15, 2022
Kind
B2
Abstract

A modified double magnetic tunnel junction structure is provided which includes an amorphous spin diffusion layer (i.e., an amorphous non-magnetic, spin-conducting metallic layer) sandwiched between a magnetic free layer and a first tunnel barrier layer; the first tunnel barrier layer contacts a first magnetic reference layer. A second tunnel barrier layer is located on the magnetic free layer and a second magnetic reference layer is located on the second tunnel barrier layer. Such a modified double magnetic tunnel junction structure exhibits efficient switching (at a low current) and speedy readout (high tunnel magnetoresistance).

Claims (31)

1. A modified double magnetic tunnel junction (mDMTJ) structure comprising:

a first magnetic reference layer;

a first tunnel barrier layer having a first surface contacting a surface of the first magnetic reference layer;

an amorphous non-magnetic, spin-conducting metallic layer having a first surface contacting a second surface of the first tunnel barrier layer which is opposite the first surface of the first tunnel barrier layer, wherein the amorphous non-magnetic, spin-conducting metallic layer is composed of a spin-conserving metallic material including a metal having an atomic number of equal to, or less than, 30;

a magnetic free layer having a first surface contacting a second surface of the amorphous non-magnetic, spin-conducting metallic layer which is opposite the first surface of the amorphous non-magnetic, spin-conducting metallic layer;

a second tunnel barrier layer having a first surface contacting a second surface of the magnetic free layer which is opposite the first surface of the magnetic free layer; and

a second magnetic reference layer having a first surface contacting a second surface of the second tunnel barrier layer which is opposite the first surface of the second tunnel barrier layer.

2. The mDMTJ structure of claim 1 , wherein the amorphous non-magnetic, spin-conducting metallic layer is composed of an A-B alloy wherein A is one of magnesium (Mg), aluminum (Al), silicon (Si), titanium (Ti), vanadium (V), copper (Cu), or zinc (Zn), and B is one of beryllium (Be), boron (B), carbon (C) or nitrogen (N).

3. The mDMTJ structure of claim 1 , wherein the first magnetic reference layer is located at a bottom portion of the mDMTJ structure, and the second magnetic reference layer is located at a top portion of the mDMTJ structure.

4. The mDMTJ structure of claim 3 , wherein at least one of the first magnetic reference layer and the second magnetic reference layer comprises a lower magnetic reference layer, an anti-ferromagnetic coupling layer, and an upper magnetic reference layer.

5. The mDMTJ structure of claim 3 , wherein the first tunnel barrier layer and the second tunnel barrier layer have a same lateral dimension.

6. The mDMTJ structure of claim 3 , wherein the first tunnel barrier layer has a first lateral dimension, and the second tunnel barrier layer has a second lateral dimension that is less than the first lateral dimension.

7. The mDMTJ structure of claim 6 , wherein the magnetic free layer is located on a pedestal portion of the amorphous non-magnetic, spin-conducting metallic layer, the pedestal portion of the amorphous non-magnetic, spin-conducting metallic layer has the second lateral dimension, and a remaining portion of the amorphous non-magnetic, spin-conducting metallic layer has the first lateral dimension.

8. The mDMTJ structure of claim 1 , wherein the second magnetic reference layer is located at a bottom portion of the mDMTJ structure, and the first magnetic reference layer is located at a top portion of the mDMTJ structure.

9. The mDMTJ structure of claim 8 , wherein at least one of the first magnetic reference layer and the second magnetic reference layer comprises a lower magnetic reference layer, an anti-ferromagnetic coupling layer, and an upper magnetic reference layer.

10. The mDMTJ structure of claim 8 , wherein the first tunnel barrier layer and the second tunnel barrier layer have a same lateral dimension.

11. The mDMTJ structure of claim 8 , wherein the first tunnel barrier layer has a first lateral dimension, and the second tunnel barrier layer has a second lateral dimension that is less than the first lateral dimension.

12. The mDMTJ structure of claim 11 , wherein the magnetic free layer contacts a lower portion of the amorphous non-magnetic, spin-conducting metallic layer, the lower portion of the amorphous non-magnetic, spin-conducting metallic layer has the second lateral dimension, and an upper portion of the amorphous non-magnetic, spin-conducting metallic layer has the lateral first dimension.

13. A spin-transfer torque (STT) magnetic tunnel junction (MTJ) memory element comprising:

a modified double magnetic tunnel junction (mDMTJ) structure sandwiched between a first electrode and a second electrode, wherein the mDMTJ structure comprises a first magnetic reference layer, a first tunnel barrier layer having a first surface contacting a surface of the first magnetic reference layer, an amorphous non-magnetic, spin-conducting metallic layer having a first surface contacting a second surface of the first tunnel barrier layer which is opposite the first surface of the first tunnel barrier layer, a magnetic free layer having a first surface contacting a second surface of the amorphous non-magnetic, spin-conducting metallic layer which is opposite the first surface of the amorphous non-magnetic, spin-conducting metallic layer, a second tunnel barrier layer having a first surface contacting a second surface of the magnetic free layer which is opposite the first surface of the magnetic free layer, and a second magnetic reference layer having a first surface contacting a second surface of the second tunnel barrier layer which is opposite the first surface of the second tunnel barrier layer, wherein the amorphous non-magnetic, spin-conducting metallic layer is composed of a spin-conserving metallic material including a metal having an atomic number of equal to, or less than, 30.

14. The STT MTJ memory element of claim 13 , wherein the amorphous non-magnetic, spin-conducting metallic layer is composed of an A-B alloy wherein A is one of magnesium (Mg), aluminum (Al), silicon (Si), titanium (Ti), vanadium (V), copper (Cu), or zinc (Zn), and B is one of beryllium (Be), boron (B), carbon (C) or nitrogen (N).

15. The STT MTJ memory element of claim 13 , wherein the first magnetic reference layer is located at a bottom portion of the mDMTJ structure, and the second magnetic reference layer is located at a top portion of the mDMTJ structure.

16. The STT MTJ memory element of claim 15 , wherein at least one of the first magnetic reference layer and the second magnetic reference layer comprises a lower magnetic reference layer, an anti-ferromagnetic coupling layer, and an upper magnetic reference layer.

17. The STT MTJ memory element of claim 15 , wherein the first tunnel barrier layer and the second tunnel barrier layer have a same lateral dimension.

18. The STT MTJ memory element of claim 15 , wherein the first tunnel barrier layer has a first lateral dimension, and the second tunnel barrier layer has a second lateral dimension that is less than the first lateral dimension.

19. The STT MTJ memory element of claim 18 , wherein the magnetic free layer is located on a pedestal portion of the amorphous non-magnetic, spin-conducting metallic layer, the pedestal portion of the amorphous non-magnetic, spin-conducting metallic layer has the second lateral dimension, and a remaining portion of the amorphous non-magnetic, spin-conducting metallic layer has the first lateral dimension.

20. The STT MTJ memory element of claim 13 , wherein the second magnetic reference layer is located at a bottom portion of the mDMTJ structure, and the first magnetic reference layer is located at a top portion of the mDMTJ structure.

21. The STT MTJ memory element of claim 20 , wherein at least one of the first magnetic reference layer and the second magnetic reference layer comprises a lower magnetic reference layer, an anti-ferromagnetic coupling layer, and an upper magnetic reference layer.

22. The STT MTJ memory element of claim 20 , wherein the first tunnel barrier layer and the second tunnel barrier layer have a same lateral dimension.

23. The STT MTJ memory element of claim 20 , wherein the first tunnel barrier layer has a first lateral dimension, and the second tunnel barrier layer has a second lateral dimension that is less than the first lateral dimension.

24. The STT MTJ memory element of claim 23 , wherein the magnetic free layer contacts a lower portion of the amorphous non-magnetic, spin-conducting metallic layer, the lower portion of the amorphous non-magnetic, spin-conducting metallic layer has the second lateral dimension, and an upper portion of the amorphous non-magnetic, spin-conducting metallic layer has the first lateral dimension.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 17, 2021
From: WORLEDGE, DANIEL; HU, GUOHAN
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 055626/0412 →
Continuity (1)
Related Publication 20220301612A1 · Sep 22, 2022