Barrier structure with passage for waveguide in photonic integrated circuit
Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.
1. A photonic integrated circuit (PIC) structure, comprising:
a barrier structure on a substrate, the barrier structure having a first sidewall, and a second sidewall opposite the first sidewall;
a guard ring alongside an interior sidewall of the barrier structure, the guard ring physically separated from the barrier structure by a distance;
a passage within the barrier structure, the passage extending from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure, wherein the passage includes a reversal segment between the first end and the second end, and an orientation of the passage within the reversal segment transitions from a first direction between the first sidewall and the second sidewall to a second direction opposite the first direction; and
a waveguide within the passage and extending from the first end to the second end thereof.
2. The PIC structure of claim 1 , wherein:
the passage includes a plurality of passages within the barrier structure, each of the plurality of passages extending from a respective first end at the first sidewall of the barrier structure to a respective second end at the second sidewall of the barrier structure, each of the plurality of passages including a respective reversal segment between the respective first end and the respective second end thereof; and
the waveguide includes a waveguide in each of the plurality of passages.
3. The PIC structure of claim 1 , wherein the barrier structure includes a metal crack stop structure.
4. The PIC structure of claim 1 , wherein the passage includes at least one segment extending approximately 90 degrees from a horizontal plane of the substrate.
5. The PIC structure of claim 1 , wherein the passage includes at least one pair of branching segments between the first end and the second end thereof.
6. A photonic integrated circuit (PIC) structure, comprising:
a crack stop structure on a substrate, the crack stop structure having an interior sidewall, and an exterior sidewall facing toward a perimeter sidewall of the substrate;
a passage within the crack stop structure, the passage extending from a first end at the exterior sidewall of the crack stop structure to a second end at the interior sidewall of the crack stop structure, wherein the passage includes a reversal segment between the first end and the second end, and an orientation of the passage within the reversal segment transitions from a first direction between the first end at the exterior sidewall of the crack stop structure and the second end at the interior sidewall of the crack stop structure to a second direction opposite the first direction;
a waveguide within the passage and extending from the first end to the second end thereof; and
a guard ring on the substrate and abutting the interior sidewall of the crack stop structure, wherein the waveguide includes at least one bridge segment positioned over the guard ring.
7. The PIC structure of claim 6 , wherein:
the passage includes a plurality of passages within the crack stop structure, each of the plurality of passages extending from a respective first end at the exterior sidewall of the crack stop structure to a respective second end at the interior sidewall of the crack stop structure, each of the plurality of passages including a respective reversal segment between the respective first end and the respective second end; and
the waveguide includes a waveguide in each of the plurality of passages.
8. The PIC structure of claim 7 , wherein each waveguide is coupled between circuitry on the substrate and a single optical fiber.
9. The PIC structure of claim 6 , wherein the passage includes at least one segment extending approximately 90 degrees from a horizontal plane of the substrate.
10. The PIC structure of claim 6 , wherein the passage includes at least one pair of branching segments between the first end and the second end thereof.
11. The PIC structure of claim 6 , wherein the passage has a lateral width of approximately eight micrometers (μm), and extends across a distance of at least approximately 150 micrometers μm from the first end to the second end.
12. A photonic integrated circuit (PIC) structure, comprising:
a set of grating couplers on a substrate;
an oxidation and mechanical barrier on the substrate, the oxidation and mechanical barrier having a first sidewall facing toward the set of grating couplers, and a second sidewall opposite the first sidewall;
a passage within the oxidation and mechanical barrier, the passage extending from a first end at the first sidewall of the oxidation and mechanical barrier to a second end at the second sidewall of the oxidation and mechanical barrier without intersecting itself, wherein the passage includes a reversal segment between the first end and the second end, and an orientation of the passage within the reversal segment transitions from a first direction between the first sidewall and the second sidewall to a second direction opposite the first direction; and
a waveguide including a semiconductor material and within the passage extending from the first end to the second end thereof, wherein the waveguide couples the set of grating couplers to circuitry on the substrate.
13. The PIC structure of claim 12 , wherein:
the passage includes a plurality of passages within the oxidation and mechanical barrier, each of the plurality of passages extending from a respective first end at the first sidewall of the oxidation and mechanical barrier to a respective second end at the second sidewall of the oxidation and mechanical barrier, each of the plurality of passages including a respective reversal segment between the respective first end and the respective second end; and
the waveguide includes a waveguide within each of the plurality of passages.
14. The PIC structure of claim 13 , wherein each waveguide within the plurality of passages is coupled between the circuitry and a single optical fiber, and the single optical fiber is vertically coupled to the set of grating couplers.
15. The PIC structure of claim 12 , further comprising a crack stop structure on the substrate, wherein the crack stop structure is horizontally between the circuitry and a perimeter sidewall of the substrate.
16. The PIC structure of claim 12 , wherein the passage includes at least one segment extending approximately 90 degrees from a horizontal plane of the substrate.
17. The PIC structure of claim 12 , wherein the passage has a lateral width of approximately eight micrometers (μm), and extends across a distance of at least approximately 150 μm from the first end to the second end.
18. The PIC structure of claim 12 , wherein the oxidation and mechanical barrier includes a nitride film.
19. The PIC structure of claim 12 , further comprising a guard ring alongside an interior sidewall of the oxidation and mechanical barrier, the guard ring physically separated from the oxidation and mechanical barrier by a distance.
20. The PIC structure of claim 19 , wherein the waveguide includes a bridge segment positioned over the guard ring.