IP Library › Granted Patent US 11,721,714
Granted Patent B2
US 11,721,714 · App. 17/214,333 · Granted Aug 8, 2023

Pixel isolation elements, devices and associated methods

Inventors: Martin U. Pralle (Wayland, MA); Jeffrey McKee (Tualatin, OR); Jason Sickler (Arlington, MA)
Assignee: SiOnyx, LLC
H01L27/1463H01L27/1462H01L27/14607H01L27/14625H01L27/14627H01L27/14629H01L27/14645H01L27/14685H01L27/14689
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Quick Facts
Patent No.
US 11,721,714
App. No.
17/214,333
Granted
Aug 8, 2023
Kind
B2
Abstract

Light trapping pixels, devices incorporating such pixels, and various associated methods are provided. In one aspect, for example, a light trapping pixel device can include a light sensitive pixel having a light incident surface, a backside surface opposite the light incident surface, and a peripheral sidewall disposed into at least a portion of the pixel and extending at least substantially around the pixel periphery. The pixel can also include a backside light trapping material substantially covering the backside surface and a peripheral light trapping material substantially covering the peripheral sidewall. The light contacting the backside light trapping material or the peripheral light trapping material is thus reflected back toward the pixel.

Claims (23)

1. A light trapping device, comprising:

at least one light sensitive pixel having a light incident surface, a backside surface opposite the light incident surface, and a peripheral sidewall disposed into at least a portion of the pixel and extending at least substantially around the pixel periphery;

a backside light trapping material at least partially covering the backside surface; and

a peripheral light trapping material substantially covering the peripheral sidewall;

wherein light contacting the backside light trapping material or the peripheral light trapping material is reflected back toward the pixel;

wherein at least one of the backside light trapping material or the peripheral light trapping material includes a high refractive index material sandwiched between two low refractive index materials.

2. The device of claim 1 , wherein the two low refractive index materials have a refractive index of less than about 2.1.

3. The device of claim 2 , wherein at least one of the two low refractive index material includes a member selected from the group consisting of an oxide, a nitride, oxynitrides, a gas, at least a partial vacuum, and combinations thereof.

4. The device of claim 2 , wherein the at least one of the two low refractive index materials includes a member selected from the group consisting of silicon oxide, silicon nitride, silicon dioxide, and combinations thereof.

5. The device of claim 1 , wherein the high refractive index material includes a material having a refractive index of greater than or equal to about 2.1.

6. The device of claim 5 , wherein the high refractive index material includes a member selected from the group consisting of polycrystalline silicon, amorphous silicon, single crystal silicon, multicrystalline silicon, nanocrystalline silicon, germanium, and combinations thereof.

7. The device of claim 1 , wherein at least one of the two low refractive index materials is doped with a dopant to create a surface field.

8. The device of claim 7 , wherein the dopant is boron or antimony.

9. The device of claim 1 , wherein at least one of the backside light trapping material and the peripheral light trapping material includes a first material sandwiched between two second materials, wherein the first material has a higher refractive index as compared to the two second materials, and wherein the difference in refractive index between the first material and the two second materials is at least 0.2.

10. The device of claim 1 , wherein the peripheral sidewall extends completely around the pixel periphery.

11. The device of claim 1 , wherein the peripheral sidewall extends from the light incident surface to the backside surface.

12. The device of claim 1 , further comprising a frontside light trapping material at least partially covering the light incident surface.

13. The device of claim 12 , wherein the frontside light trapping material is an antireflective layer coating.

14. The device of claim 12 , wherein the frontside light trapping material is a reflective layer having an aperture to allow entry of light into the pixel, wherein the reflective layer is operable to reflect light impinging thereupon from inside the pixel back into the pixel.

15. The device of claim 14 , further comprising a lens functionally coupled to the aperture and operable to focus incident light through the aperture and into the pixel.

16. The device of claim 14 , wherein the aperture has an effective surface area of 90% of the incident light surface total surface area.

17. The device of claim 1 , wherein at least one of the backside light trapping material and the peripheral light trapping material is a metal layer.

18. The device of claim 1 , wherein at least one of the backside light trapping material and the peripheral light trapping material has a sloped surface at the pixel device interface.

Assignments (2)
CONVERSION Recorded May 26, 2021
From: SIONYX, INC.
To: SIONYX, LLC
Reel/Frame 056396/0419 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 26, 2021
From: PRALLE, MARTIN U.; MCKEE, JEFFREY; SICKLER, JASON
To: SIONYX, INC.
Reel/Frame 056359/0517 →
Continuity (6)
Continuation 16290740 · Mar 1, 2019
Continuation 15216244 · Jul 21, 2016
Continuation 14747875 · Jun 23, 2015
Continuation 13841120 · Mar 15, 2013
Provisional Application 61614275 · Mar 22, 2012
Related Publication 20210217788A1 · Jul 15, 2021