IP Library Granted Patent US 11,674,850
Granted Patent B1
US 11,674,850 · App. 17/230,159 · Granted Jun 13, 2023

Continuous full-resolution two-color infrared detector

Inventors: Michael Goldflam (Albuquerque, NM); David W. Peters (Albuquerque, NM); Paul Davids (Albuquerque, NM); Jin K. Kim (Albuquerque, NM); Evan Michael Anderson (Albuquerque, NM)
Assignee: National Technology & Engineering Solutions of Sandia, LLC
G01J5/0837G01J5/24H01L27/14652H01L31/02327H01L31/09G01J2005/202
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Quick Facts
Patent No.
US 11,674,850
App. No.
17/230,159
Granted
Jun 13, 2023
Kind
B1
Abstract

An apparatus is provided for nanoantenna-enhanced detection of infrared radiation. The apparatus includes one or more detector pixels. A plurality of detector pixels can constitute a focal plane array (FPA). Each detector pixel carries at least a first and a second subpattern of nanoantenna elements, with elements of the second subpattern interpolated between elements of the first subpattern. Each detector pixel also includes separate collection electrodes for collecting photogenerated current from the respective subpatterns.

Claims (28)

1. An apparatus for detecting infrared radiation, comprising:

one or more detector pixels, each having a semiconductor portion;

a first subpattern of one or more nanoantenna elements of a first size disposed on the semiconductor portion of each of the detector pixels;

a second subpattern of one or more nanoantenna elements of a second size unequal to the first size, disposed on the semiconductor portion of each of the detector pixels and interpolated laterally between nanoantenna elements of the first subpattern;

a first collection electrode for collecting photogenerated current from the first subpattern on each of the detector pixels; and

a second collection electrode for collecting photogenerated current from the second subpattern on each of the detector pixels.

2. The apparatus of claim 1 , wherein the first and second subpatterns each consist of a plurality of columns, and wherein the columns of the first subpattern alternate with columns of the second subpattern.

3. The apparatus of claim 2 , wherein each column of the first and second subpatterns consists of a periodic array of pad-like nanoantenna elements.

4. The apparatus of claim 1 , wherein each of a plurality of detector pixels has a first and a second nanoantenna subpattern and a first and a second collection electrode.

5. The apparatus of claim 4 , wherein the plurality of detector pixels consists of detector pixels that are all disposed on a common semiconductor substrate.

6. The apparatus of claim 4 , wherein the plurality of detector pixels constitutes a focal plane array (FPA).

7. The apparatus of claim 4 , wherein:

the plurality of detector pixels consists of detector pixels that are all disposed on a common semiconductor substrate;

the plurality of detector pixels constitutes a focal plane array (FPA);

the FPA further comprises a read-out integrated circuit (ROIC); and

the ROIC is connected to the common semiconductor substrate such that the ROIC receives an input from the first collection electrode and from the second collection electrode of each detector pixel in the plurality of detector pixels.

8. The apparatus of claim 1 , wherein the nanoantenna elements of the first and second nanoantenna subpatterns are dimensioned to provide resonances at respective, unequal, resonant vacuum wavelengths.

9. The apparatus of claim 8 , wherein the nanoantenna elements in the first and second nanoantenna subpatterns are smaller in their lateral dimensions than their respective resonant vacuum wavelengths.

10. The apparatus of claim 1 , wherein:

each of said first and second subpatterns has a fill factor for collecting light from a field of view;

each of said first and second subpatterns covers a coverage fraction of a detector pixel area; and

the fill factor of each of the first and second subpatterns is greater than the corresponding coverage fraction.

11. The apparatus of claim 10 , wherein each of the first and second subpatterns has a fill factor greater than 50% and a coverage fraction of 50% or less.

12. The apparatus of claim 1 , wherein:

the first subpattern has a first sensitivity spectrum;

the second subpattern has a second sensitivity spectrum different from the first sensitivity spectrum; and

the first and second sensitivity spectra overlap.

13. The apparatus of claim 12 , further comprising a processing circuit conformed to compare a response from the first subpattern with a response from the second subpattern, and to provide an output based on the comparison of the respective responses.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 20, 2021
From: GOLDFLAM, MICHAEL; PETERS, DAVID W.; DAVIDS, PAUL; KIM, JIN K.; ANDERSON, EVAN MICHAEL
To: NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
Reel/Frame 057237/0956 →
CONFIRMATORY LICENSE Recorded Jul 12, 2021
From: NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA, LLC
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 056824/0319 →
Continuity (1)
Provisional Application 63013868 · Apr 22, 2020
Cited By (1)
US 12,635,299