Information processing apparatus and information processing method

1. An information processing apparatus comprising:

a processor; and

a memory for storing instructions to be executed by the processor,

wherein the instructions stored in the memory are executed by the processor to:

acquire information containing first process data indicating a result of a substrate process in a first process condition and second process data indicating a result of a substrate process in a second process condition different from the first process condition, and

control a display on a display apparatus based on the acquired information, and

wherein control is performed to selectively display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region, and a second screen displaying the first data group and the second data group in the same region.

2. The information processing apparatus according to claim 1 , wherein the first process data and the second process data are information containing a result of an operation of a processing apparatus that performs the substrate process and containing a state of a substrate having undergone the substrate process.

3. The information processing apparatus according to claim 1 , wherein the first process condition and the second process condition are a condition including a recipe, which is a process condition to be shared and used by a plurality of apparatuses, and an apparatus parameter, which is a process condition not to be shared by the plurality of apparatuses.

4. The information processing apparatus according to claim 1 , wherein the first process data and the second process data are chronologically displayed on a graph.

5. The information processing apparatus according to claim 4 , wherein the display apparatus displays change history information of a process condition which has been changed.

6. The information processing apparatus according to claim 1 , wherein the processor is further configured to calculate lot-based process data based on the acquired substrate-based process data, the lot including a plurality of substrates.

7. The information processing apparatus according to claim 6 , wherein the processor is further configured to calculate the lot-based process data based on one statistical value from a maximum value, a minimum value, a mean value, a median value, and a standard deviation of the substrate-based process data, the lot including the plurality of substrates.

8. The information processing apparatus according to claim 1 , wherein the processor is further configured to control displaying a process condition of a user-designated lot including a plurality of substrates on the display apparatus.

9. An information processing method comprising:

acquiring information containing first process data indicating a result of the substrate process in a first process condition and second process data indicating a result of a substrate process in a second process condition different from the first process condition; and

controlling a display on a display apparatus based on the acquired information,

wherein the control is performed to selectively display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region, and a second screen displaying the first data group and the second data group in the same region.

10. A non-transitory computer-readable storage medium that stores a program for causing a computer to execute an information processing method comprising acquiring and controlling a display,

wherein information containing first process data indicating a result of the substrate process in a first process condition and second process data indicating a result of a substrate process in a second process condition different from the first process condition is acquired in the acquiring, and

wherein a display on a display apparatus is controlled based on the acquired information, and a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically are displayed, the first screen displaying the first data group in a region and the second data group in another region, and a second screen displaying the first data group and the second data group in the same region.

11. An article manufacturing system comprising:

an information processing apparatus; and

a pattern forming apparatus configured to form a pattern on a substrate,

wherein the information processing apparatus manages a plurality of apparatuses including the pattern forming apparatus,

the information processing apparatus comprising:

a processor; and

a memory for storing instructions to be executed by the processor,

wherein the instructions stored in the memory are executed by the processor to:

acquire information containing first process data indicating a result of the substrate process in a first process condition and second process data indicating a result of a substrate process in a second process condition different from the first process condition, and

control a display on a display apparatus based on the acquired information,

wherein control is performed to selectively display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region, and a second screen displaying the first data group and the second data group in the same region.

12. An article manufacturing method comprising:

forming a pattern on a substrate using a pattern forming apparatus managed by an information processing apparatus; and

performing at least one process from oxidation, film forming, vapor deposition, doping, flattening, etching, resist removing, dicing, bonding, and packaging on the substrate having the pattern formed thereon,

wherein an article is manufactured from the processed substrate,

the information processing apparatus comprising:

a processor; and

a memory for storing instructions to be executed by the processor,

wherein the instructions stored in the memory are executed by the processor to:

acquire information containing first process data indicating a result of the substrate process in a first process condition and second process data indicating a result of a substrate process in the second process condition different from the first process condition, and

control a display on a display apparatus based on the acquired information,

wherein control is performed to selectively display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region, and a second screen displaying the first data group and the second data group in the same region.