Systems and methods for releveled bump planes for chiplets
An integrated circuit and a method for designing an IC wherein the base or host chip is bonded to smaller chiplets via DBI technology. The bonding of chip to chiplet creates an uneven or multi-level surface of the overall chip requiring a releveling for future bonding. The uneven surface is built up with plating of bumps and subsequently releveled with various methods including planarization.
1. A chip comprising:
an individual chip having a first surface and a second surface and a plurality of side surfaces wherein the first surface comprises a plurality of interconnects;
a plurality of chiplets bonded to the first surface of the individual chip, each of the plurality of chiplets having a first chiplet surface and a second chiplet surface and a plurality of side chiplet surfaces; and
a plurality of plated posts, wherein at least some of the plated posts are disposed on the first surface of the individual chip and at least some of the plated posts are disposed on the first chiplet surface of one or more of the plurality of chiplets, the plurality of plated posts terminating in a single level across an upper portion of the individual chip,
wherein one or more of the plurality of plated posts disposed on the first chiplet surface of a corresponding one of the one or more of the plurality of chiplets are configured to provide direct electrical access to the individual chip vertically through the plurality of chiplets.
2. The chip of claim 1 , wherein the plurality of chiplets comprise one or more elements selected from the group consisting of a serializer/deserializer chip, a memory chip, and a parallel interface chip.
3. The chip of claim 1 , further comprising a permanent layer disposed over the top surface of the individual chip and the top surface of the plurality of chiplets.
4. The chip of claim 1 , further comprising a mold layer disposed over the top surface of the individual chip and the top surface of the plurality of chiplets.
5. The chip of claim 4 , wherein the mold layer is selected from the group consisting of epoxy and silica.
6. The chip of claim 1 , wherein the one or more of the plurality of chiplets has one or more through silicon vias for interconnection between the individual chip and the first chiplet surface of the plurality of chiplets.
7. The chip of claim 6 , wherein the plurality of plated posts are further configured to connect to the through silicon vias of the plurality of chiplets.
8. The chip of claim 7 , wherein the plurality of plated posts are further configured to connect to the plurality of interconnects of the individual chip.
9. The chip of claim 1 , further comprising a solder cap connected to the plurality of plated posts.
10. The chip of claim 1 , wherein at least one of the plurality of chiplets are direct bonded to the first surface of the individual chip without an adhesive layer.
11. The chip of claim 1 , wherein the plurality of chiplets are face-to-face bonded to the first surface of the individual chip.
12. The chip of claim 1 , wherein the direct electrical access is further provided by one or more through silicon vias formed through the corresponding one of the one or more of the plurality of chiplets.
13. The chip of claim 12 , wherein the one or more through silicon vias is direct bonded to an interconnect at the first surface of the individual chip.
14. The chip of claim 13 , wherein the at least some of the plated posts are plated directly on the one or more through silicon vias.
15. The chip of claim 1 , wherein the plurality of plated posts comprise substantially co-terminated upper surfaces that are characteristic of a planarization process.
16. The chip of claim 1 , wherein the one or more of the plurality of chiplets are direct bonded to the first surface of the individual chip along a bonded interface comprising bonded metallic regions and bonded non-metallic regions.
17. A chip comprising:
an individual chip having a first surface and a second surface opposite the first surface, wherein the first surface comprises a plurality of interconnects;
a plurality of chiplets bonded to the first surface of the individual chip, each of the plurality of chiplets having a first chiplet surface and a second chiplet surface opposite the first chiplet surface; and
a plurality of plated posts, wherein at least some of the plurality of plated posts are disposed on the first surface of the individual chip and at least some of the plurality of plated posts are disposed on the first surface of one or more of the plurality of chiplets, the plurality of plated posts terminating in a single level across an upper portion of the individual chip,
wherein at least one of the plurality of chiplets are direct bonded to the first surface of the individual chip without an adhesive layer.
18. The chip of claim 17 , further comprising one or more through silicon vias formed through one or more of the plurality of chiplets to provide direct electrical access to the individual chip through the one or more of the plurality of chiplets.
19. The chip of claim 18 , wherein the one or more of the through silicon vias is direct bonded to the first surface of the individual chip.
20. The chip of claim 17 , wherein at least some of the plurality of plated posts are plated directly on one or more through silicon vias.
21. The chip of claim 17 , wherein the plurality of plated posts comprise substantially co-terminated upper surfaces that are characteristic of a planarization process.
22. The chip of claim 17 , wherein the at least one of the plurality of chiplets are direct bonded to the first surface of the individual chip along a bonded interface comprising bonded metallic regions and bonded non-metallic regions.