IP Library Granted Patent US 12,051,588
Granted Patent B2
US 12,051,588 · App. 17/246,997 · Granted Jul 30, 2024

Method of fabricating vertically oriented planar structures for advanced electronic and optoelectronic systems

Inventors: Joshua Alexander Robinson (Spring Mills, PA); Rafael Vila (Sierra Vista, AZ)
Assignee: The Penn State Research Foundation
H01L21/02568H01L21/02376H01L21/02378H01L21/02381H01L21/0242H01L21/02565H01L21/0259H01L21/02612H01L29/045H01L29/0665H01L29/0669H01L29/24H01L21/02664H01L29/66795H01L29/778H01L29/785
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Quick Facts
Patent No.
US 12,051,588
App. No.
17/246,997
Granted
Jul 30, 2024
Kind
B2
Abstract

The present invention relates to methods for fabricating vertical homogenous and heterogeneous two-dimensional structures, the fabricated vertical two-dimensional structures, and methods of using the same. The methods demonstrated herein produce structures that are free standing and electrically isolated.

Claims (41)

1. A method of fabricating vertically oriented planar structures from a first material, comprising the steps of:

placing a substrate on a first crucible in a furnace;

placing an amount of a first material powder in the first crucible underneath the substrate;

introducing a flow of a gas into the furnace and maintaining a furnace pressure of between 1 and 1000 torr;

heating the furnace to at least one temperature between 500 and 1000° C. and holding for at least one period of time between 5 and 120 minutes; and

equilibrating the furnace temperature to room temperature;

wherein at least one planar structure is generated on the substrate such that the at least one planar structure is perpendicular to the substrate surface and has a triangular morphology; and

wherein the first material powder comprises molybdenum dioxide or molybdenum trioxide.

2. The method of claim 1 , further comprising the subsequent steps of:

placing an amount of a second material powder in a second crucible upstream from the first crucible;

introducing a flow of a gas into the furnace and maintaining a furnace pressure of between 1 and 1000 torr;

heating the furnace to at least one temperature between 500 and 1000° C. and holding for at least one period of time between 5 and 120 minutes; and

equilibrating the furnace temperature to room temperature;

wherein the second material powder is annealed to the at least one planar structure on the substrate; and

wherein the second material powder comprises sulfur.

3. The method of claim 2 , wherein the second crucible is a quartz crucible.

4. The method of claim 1 , wherein the first material powder comprises molybdenum trioxide.

5. The method of claim 1 , wherein the substrate is selected from the group consisting of: sapphire, silicon, silicon carbide, silicon dioxide, graphene, graphite, non-alkali glass, poly-silicon carbide, and poly-silicon.

6. The method of claim 1 , wherein the substrate is placed face down.

7. The method of claim 1 , wherein the first crucible is an alumina crucible.

8. The method of claim 1 , wherein the gas is an inert gas.

9. The method of claim 1 , wherein the gas is not an inert gas.

10. The method of claim 1 , wherein the vertically oriented planar structures are electrically isolated.

11. The method of claim 1 , wherein the vertically oriented planar structures are freestanding.

12. The method of claim 1 , wherein the vertically oriented planar structures have a thickness of less than 20 nm.

13. The method of claim 1 , wherein the vertically oriented planar structures have less than 20 layers.

14. The method of claim 13 , wherein each layer is less than 1 nm thick.

15. The method of claim 13 , wherein the layers are parallel to each other.

16. The method of claim 13 , wherein the layers are separated by van der Waals gaps.

17. The method of claim 1 , further comprising the step of adding at least one additional material to the vertically oriented planar structures to form vertically oriented planar heterostructures.

18. A method of fabricating vertically oriented planar structures from a first material and a second material, comprising the steps of:

placing a substrate on a first crucible in a furnace;

placing an amount of a first material powder in the first crucible underneath the substrate;

placing an amount of a second material powder in a second crucible upstream from the first crucible;

introducing a flow of a gas into the furnace and maintaining a furnace pressure of between 1 and 1000 torr;

heating the furnace to at least one temperature between 500 and 1000° C. and holding for at least one period of time between 5 and 120 minutes; and

equilibrating the furnace temperature to room temperature;

wherein at least one vertically oriented planar structure is generated on the substrate such that the at least one vertically oriented planar structure is perpendicular to the substrate surface and has a triangular morphology;

wherein the first material powder comprises molybdenum dioxide or molybdenum trioxide; and

wherein the second material powder comprises sulfur.

19. The method of claim 18 , wherein the first material powder comprises molybdenum trioxide.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2021
From: ROBINSON, JOSHUA ALEXANDER; VILA, RAFAEL
To: THE PENN STATE RESEARCH FOUNDATION
Reel/Frame 056427/0102 →
Continuity (3)
Continuation 15712561 · Sep 22, 2017
Provisional Application 62398751 · Sep 23, 2016
Related Publication 20210257451A1 · Aug 19, 2021