Methods and structures for contacting shield conductor in a semiconductor device
A semiconductor device includes a region of semiconductor material comprising a major surface and a first conductivity type and a shielded-gate trench structure. The shielded-gate trench structure includes an active trench, an insulated shield electrode in the lower portion of the active trench; an insulated gate electrode adjacent to the gate dielectric in an upper portion of the active trench; and an inter-pad dielectric (IPD) interposed between the gate electrode and the shield electrode. An interlayer dielectric (ILD) structure is over the major surface. A conductive region is within the active trench and extends through the ILD structure, the gate electrode, and the IPD, and is electrically connected to the shield electrode. The conductive region is electrically isolated from the gate electrode by a dielectric spacer. The gate electrode comprises a shape that surrounds the conductive region in a top view so that the gate electrode is uninterrupted by the conductive region and the dielectric spacer.
1. A semiconductor device, comprising:
a region of semiconductor material comprising a first major surface and a first conductivity type;
a shielded-gate trench structure comprising:
an active trench extending from the first major surface into the region of semiconductor material;
a shield dielectric layer adjacent to a lower portion of the active trench;
a shield electrode adjacent to the shield dielectric layer in the lower portion of the active trench;
a gate dielectric adjacent to an upper portion of the active trench;
a gate electrode adjacent to the gate dielectric in the upper portion of the active trench; and
an inter-pad dielectric (IPD) interposed between the gate electrode and the shield electrode;
a body region of a second conductivity type opposite to the first conductive type in the region of semiconductor material extending from the major surface adjacent to the shielded-gate trench structure;
a source region of the first conductivity type in the body region adjacent to the shielded-gate trench structure;
an interlayer dielectric (ILD) structure over the first major surface; and
a first conductive region within the active trench and extending through the ILD structure, the gate electrode, and the IPD, wherein:
the first conductive region is coupled to the shield electrode;
the first conductive region is electrically isolated from the gate electrode by a first dielectric spacer; and
the gate electrode comprises a shape that surrounds the first conductive region in a top view so that the gate electrode is uninterrupted by the first conductive region and the first dielectric spacer.
2. The device of claim 1 , wherein:
the first conductive region extends to a first depth through the ILD structure, the gate electrode, and the IPD; and
the first dielectric spacer extends to a second depth through the ILD structure, the gate electrode, and the IPD that is less than the first depth.
3. The device of claim 1 , wherein:
the first conductive region extends to a first depth through the ILD structure, the gate electrode, and the IPD; and
the first dielectric spacer extends to the first depth.
4. The device of claim 1 , further comprising:
a second conductive region extending through the ILD to the body region; and
a spacer interposed between the second conductive region and the ILD structure.
5. The device of claim 4 , wherein:
the spacer comprises a second dielectric spacer.
6. The device of claim 1 , wherein:
the semiconductor comprises an active area; and
the first conductive region is one of a plurality of first conductive regions.
7. The device of claim 6 , wherein:
the plurality of first conductive regions is distributed non-uniformly within the active area.
8. The device of claim 6 , wherein:
the plurality of first conductive regions is distributed uniformly within the active area.
9. The device of claim 1 , further comprising:
a gate conductive layer interposed between the gate electrode and the ILD structure, wherein:
the first conductive region extends through the gate conductive layer; and
the gate conductive layer and the gate electrode comprise different material.
10. The device of claim 1 , further comprising:
a shield conductive layer interposed between the first conductive region and the shield electrode, wherein:
the shield conductive layer and the shield electrode comprise different material.
11. A semiconductor device, comprising:
a region of semiconductor material comprising a first major surface and a first conductivity type;
a shielded-gate trench structure comprising:
an active trench extending from the first major surface into the region of semiconductor material and having a first side and a second side opposite to the first side;
a shield dielectric layer adjacent to a lower portion of the active trench;
a shield electrode adjacent to the shield dielectric layer in the lower portion of the active trench;
a gate dielectric adjacent to an upper portion of the active trench;
a gate electrode adjacent to the gate dielectric in the upper portion of the active trench; and
an inter-pad dielectric (IPD) interposed between the gate electrode and the shield electrode;
a body region of a second conductivity type opposite to the first conductive type in the region of semiconductor material extending from the major surface adjacent to the first side and the second side of the active trench;
a source region of the first conductivity type in the body region adjacent to the first side and the second side of the active trench;
an interlayer dielectric (ILD) structure over the first major surface;
a first conductive region within the active trench and extending through the ILD structure, the gate electrode, and the IPD; and
a second conductive region extending through the ILD structure and the source region, wherein:
the first conductive region is coupled to the shield electrode;
the first conductive region is electrically isolated from the gate electrode by a first dielectric spacer; and
the gate electrode comprises a shape in a top view that surrounds each side of the first conductive region in the top view.
12. The device of claim 11 , further comprising
a spacer interposed between the second conductive region and the ILD structure.
13. The device of claim 12 , wherein:
the spacer comprises a second dielectric spacer; and
the first dielectric spacer and the second dielectric spacer comprise a same material.
14. The device of claim 11 , wherein:
the semiconductor comprises an active area; and
the first conductive region is one of a plurality of first conductive regions within the active area.
15. The device of claim 14 , wherein:
the plurality of first conductive regions is distributed non-uniformly within the active area.
16. The device of claim 11 , further comprising:
a shield conductive layer interposed between the first conductive region and the shield electrode; and
a gate conductive layer interposed between the gate electrode and the ILD structure, wherein:
the first conductive region extends through the gate conductive layer.
17. A method of forming a semiconductor device, comprising:
providing a region of semiconductor material comprising a first major surface and a first conductivity type;
providing a shielded-gate trench structure comprising:
an active trench extending from the first major surface into the region of semiconductor material and having a first side and a second side opposite to the first side;
a shield dielectric layer adjacent to a lower portion of the active trench;
a shield electrode adjacent to the shield dielectric layer in the lower portion of the active trench;
a gate dielectric adjacent to an upper portion of the active trench;
a gate electrode adjacent to the gate dielectric in the upper portion of the active trench; and
an inter-pad dielectric (IPD) interposed between the gate electrode and the shield electrode;
providing a body region of a second conductivity type opposite to the first conductive type in the region of semiconductor material extending from the major surface adjacent to the first side and the second side of the active trench;
providing a source region of the first conductivity type in the body region adjacent to the first side and the second side of the active trench;
providing an interlayer dielectric (ILD) structure over the first major surface;
providing a first conductive region within the active trench and extending through the ILD structure, the gate electrode, and the IPD; and
providing a second conductive region extending through the ILD structure and the source region, wherein:
the first conductive region is coupled to the shield electrode;
the first conductive region is electrically isolated from the gate electrode by a first dielectric spacer; and
the gate electrode comprises a shape in a top view that surrounds each side of the first conductive region in the top view.
18. The method of claim 17 , wherein:
providing the first conductive region comprises:
forming a first contact opening extending through the ILD structure, the gate conductor, and at least a portion of the IPD;
forming the first dielectric spacer within the first contact opening; and
providing a conductive material adjacent to the first dielectric spacer within the first contact opening; and
providing the second conductive region comprises
forming a second contact opening extending through the ILD structure and the source region;
forming a second dielectric spacer within the second contact opening; and
providing the conductive material adjacent the second dielectric spacer within the second contact opening.
19. The method of claim 18 , wherein:
forming the first contact opening and forming the first dielectric spacer occurs before forming the second contact opening.
20. The method of claim 17 , further comprising:
providing a shield conductive layer interposed between the first conductive region and the shield electrode; and
providing a gate conductive layer interposed between the gate electrode and the ILD structure, wherein:
the first conductive region extends through the gate conductive layer.