OLED display panel and method of manufacturing same
An organic light-emitting diode (OLED) display panel and a method of manufacturing the same are disclosed. The OLED display panel includes a base substrate and a plurality of film layers sequentially deposited on a side of the base substrate in a stacked arrangement in a first direction. The plurality of film layers includes a first planarization layer configured to initially planarize an array substrate, and a second planarization layer configured to further planarize the array substrate. The first planarization layer and the second planarization layer are made of different materials.
1. A method of manufacturing an organic light-emitting diode (OLED) display panel, the method of manufacturing the OLED display panel comprising:
S 10 : providing a base substrate, and forming a plurality of film layers sequentially in a stacked arrangement on a side of the base substrate in a first direction, wherein the film layers comprise a passivation layer;
S 20 : forming a first planarization layer on a side of the passivation layer facing away from the base substrate, and curing the first planarization layer;
S 30 : forming a second planarization layer on a side of the first planarization layer facing away from the base substrate, and forming a plurality of via holes and a pattern in a non-display area through a halftone mask technology, wherein the forming the plurality of via holes and the pattern in the non-display area through the halftone mask technology comprises:
S 301 : performing an ashing treatment by introducing oxygen to the side of the first planarization layer facing away from the base substrate to facilitate formation of holes on the first planarization layer;
S 302 : etching, using a same mask, a first through hole in a display area and a through via hole in a non-display area on the side of the second planarization layer facing away from the base substrate such that the first through hole and the second through hole pass through the second planarization layer; and
S 303 : introducing oxygen again and continuously etching the first through hole and the second through hole such that the first through hole and the second through hole pass through the first planarization layer;
S 40 : forming an indium tin oxide (ITO) film on a side of the second planarization layer facing away from the base substrate, and forming a bonding pad in the non-display area by patterning the ITO film;
S 50 : forming an anode reflective film on the side of the second planarization layer facing away from the base substrate, and forming an anode layer by patterning the anode reflective film; and
S 60 : defining a light-emitting area by depositing two embankment corners on two sides of the anode layer in a second direction on the side of the second planarization layer facing away from the base substrate.
2. The method of manufacturing the OLED display panel of claim 1 , wherein a material of the embankment corners is a hydrophobic organic photoresist.