Crystalline silicon carbide fiber and method for manufacturing same, and ceramic composite substrate
A crystalline silicon carbide fiber containing silicon carbide and boron nitride, the crystalline silicon carbide fiber having a content of Si of 64% to 72% by weight, a content of C of 28% to 35% by weight, and a content of B of 0.1% to 3.0% by weight, and including, at a surface portion, a composition gradient layer in which a content of silicon carbide increases while a content of boron nitride decreases toward a depth direction.
1. A crystalline silicon carbide fiber comprising:
silicon carbide; and
boron nitride;
the crystalline silicon carbide fiber having a content of Si of 64% to 72% by weight, a content of C of 28% to 35% by weight, a content of B of 0.1% to 3.0% by weight, and a content of Ti of less than 0.1% by weight, and
the crystalline silicon carbide fiber including, at a surface portion, a composition gradient layer in which a content of silicon carbide increases while a content of boron nitride decreases toward a depth direction.
2. The crystalline silicon carbide fiber according to claim 1 ,
wherein the crystalline silicon carbide fiber includes a main body portion containing silicon carbide as a main component on a side closer to the center than the composition gradient layer, and
the composition gradient layer includes a B-rich portion having a higher atomic ratio of B than that of Si on a surface side; and a Si-rich portion having a higher atomic ratio of Si than that of B on a side closer to a main body portion side than the B-rich portion.
3. The crystalline silicon carbide fiber according to claim 2 , wherein the B-rich portion has a thickness of 30 nm or more.
4. The crystalline silicon carbide fiber according to claim 2 , wherein the atomic ratio of B in the B-rich portion is 5 atom % or more.
5. The crystalline silicon carbide fiber according to claim 1 , wherein the composition gradient layer has a thickness of 30 nm or more.
6. The crystalline silicon carbide fiber according to claim 1 ,
the crystalline silicon carbide fiber including at least one element selected from the group consisting of Al, Y, Zr, and Mg,
wherein in the case of including Al, a content thereof is 3.8% by weight or less,
in the case of including Y, a content thereof is 3.8% by weight or less,
in the case of including Zr, a content thereof is 3.8% by weight, and
in the case of including Mg, a content thereof is 3.8% by weight or less.
7. A method for manufacturing a crystalline silicon carbide fiber, the method comprising:
a calcination step of heating an amorphous silicon carbide fiber containing boron to 1550° ° C. to 2200° C. in an inert atmosphere including nitrogen and thereby forming, at a surface portion, a composition gradient layer in which a content of silicon carbide increases while a content of boron nitride decreases toward a depth direction;
wherein the content of Si is 64% to 72% by weight, the content of C is 28% to 35% by weight, the content of B is 0.1% to 3.0% by weight, and a content of Ti is less than 0.1% by weight.
8. The method for manufacturing a crystalline silicon carbide fiber according to claim 7 , the method comprising:
a pretreatment step of heating, before the calcination step, the amorphous silicon carbide fiber containing boron at 1550° ° C. to 1850° C. in an inert atmosphere different from nitrogen and obtaining a heating treatment product,
wherein in the calcination step, the heating treatment product is heated at a temperature higher than that of the pretreatment step, in an inert atmosphere including nitrogen.
9. The method for manufacturing a crystalline silicon carbide fiber according to claim 8 , wherein in the calcination step, the heating treatment product is heated to 1900° ° C. to 2200° ° C.
10. The method for manufacturing a crystalline silicon carbide fiber according to claim 7 , the method comprising:
a spinning step of melt-spinning a thermoplastic polymer composition including an organosilicon polymer and an organoboron compound to obtain a fiber;
an infusibilization step of heating the fiber in an atmosphere including oxygen; and
a heating step of heating a infusibilized fiber at a temperature in the range of 800° ° C. to 1500° C. in an inert gas and thereby obtaining the amorphous silicon carbide fiber.
11. A ceramic composite substrate comprising:
a ceramic material; and
the crystalline silicon carbide fiber according to claim 1 .
12. The crystalline silicon carbide fiber according to claim 3 , wherein the atomic ratio of B in the B-rich portion is 5 atom % or more.
13. The crystalline silicon carbide fiber according to claim 2 , wherein the composition gradient layer has a thickness of 30 nm or more.
14. The crystalline silicon carbide fiber according to claim 3 , wherein the composition gradient layer has a thickness of 30 nm or more.
15. The crystalline silicon carbide fiber according to claim 4 , wherein the composition gradient layer has a thickness of 30 nm or more.
16. The crystalline silicon carbide fiber according to claim 2 ,
the crystalline silicon carbide fiber including at least one element selected from the group consisting of Al, Y, Zr, and Mg,
wherein in the case of including Al, a content thereof is 3.8% by weight or less,
in the case of including Y, a content thereof is 3.8% by weight or less,
in the case of including Zr, a content thereof is 3.8% by weight, and
in the case of including Mg, a content thereof is 3.8% by weight or less.
17. The crystalline silicon carbide fiber according to claim 3 ,
the crystalline silicon carbide fiber including at least one element selected from the group consisting of Al, Y, Zr, and Mg,
wherein in the case of including Al, a content thereof is 3.8% by weight or less,
in the case of including Y, a content thereof is 3.8% by weight or less,
in the case of including Zr, a content thereof is 3.8% by weight, and
in the case of including Mg, a content thereof is 3.8% by weight or less.
18. The crystalline silicon carbide fiber according to claim 4 ,
the crystalline silicon carbide fiber including at least one element selected from the group consisting of Al, Y, Zr, and Mg,
wherein in the case of including Al, a content thereof is 3.8% by weight or less,
in the case of including Y, a content thereof is 3.8% by weight or less,
in the case of including Zr, a content thereof is 3.8% by weight, and
in the case of including Mg, a content thereof is 3.8% by weight or less.
19. The crystalline silicon carbide fiber according to claim 5 ,
the crystalline silicon carbide fiber including at least one element selected from the group consisting of Al, Y, Zr, and Mg,
wherein in the case of including Al, a content thereof is 3.8% by weight or less,
in the case of including Y, a content thereof is 3.8% by weight or less,
in the case of including Zr, a content thereof is 3.8% by weight, and
in the case of including Mg, a content thereof is 3.8% by weight or less.
20. The method for manufacturing a crystalline silicon carbide fiber according to claim 8 , the method comprising:
a spinning step of melt-spinning a thermoplastic polymer composition including an organosilicon polymer and an organoboron compound to obtain a fiber;
an infusibilization step of heating the fiber in an atmosphere including oxygen; and
a heating step of heating a infusibilized fiber at a temperature in the range of 800° ° C. to 1500° C. in an inert gas and thereby obtaining the amorphous silicon carbide fiber.
21. The method for manufacturing a crystalline silicon carbide fiber according to claim 9 , the method comprising:
a spinning step of melt-spinning a thermoplastic polymer composition including an organosilicon polymer and an organoboron compound to obtain a fiber;
an infusibilization step of heating the fiber in an atmosphere including oxygen; and
a heating step of heating an infusibilized fiber at a temperature in the range of 800° ° C. to 1500° ° C. in an inert gas and thereby obtaining the amorphous silicon carbide fiber.
22. A ceramic composite substrate comprising:
a ceramic material; and
the crystalline silicon carbide fiber according to claim 6 .