IP Library Granted Patent US 12,263,535
Granted Patent B2
US 12,263,535 · App. 17/272,611 · Granted Apr 1, 2025

Frame and exterior shrouding for laser processing system

Inventors: Corie Neufeld (Portland, OR); Jeremy Willey (Portland, OR); Brandon Bilyeu (Apo, DE); Wayne Crowther (Portland, OR); Chris Ryder (Portland, OR)
Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC.
B23K26/127B23K26/142B23K26/702B23K37/006B23K26/08
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,263,535
App. No.
17/272,611
Granted
Apr 1, 2025
Kind
B2
Abstract

A frame for a laser processing module can be characterized as including a platform having an upper surface and a lower surface, an optics bridge spaced apart from, and extending over, the upper surface of the platform and a bridge support interposed between, and coupled to, the platform and the optics bridge. At least one selected from the group consisting of the platform and the optics bridge includes a sandwich panel. The sandwich panel can include a first plate, a second plate and a core interposed between the first plate and the second plate. The first plate and the second plate can be indirectly attached to one another by the core and the core can define at least one channel extending between the first plate and the second plate. The sandwich panel can also include a first port formed at an exterior of the sandwich panel and in fluid communication with the at least one channel, and a second port formed at the exterior of the sandwich panel and in fluid communication with the at least one channel.

Claims (60)

1. A laser processing module for processing a workpiece, the module comprising:

a frame comprising:

a platform having an upper surface and a lower surface;

an optics bridge spaced apart from, and extending over, the upper surface of the platform; and

a bridge support interposed between, and coupled to, the platform and the optics bridge,

wherein at least one selected from the group consisting of the platform and the optics bridge includes a sandwich panel, wherein the sandwich panel includes:

a first plate;

a second plate;

a core interposed between, and attached to, the first plate and the second plate, wherein the first plate and the second plate are indirectly attached to one another by the core and wherein the core defines at least one channel extending between the first plate and the second plate;

a first port formed at an exterior of the sandwich panel and in fluid communication with the at least one channel; and

a second port formed at the exterior of the sandwich panel and in fluid communication with the at least one channel; and

a laser source supported by the optics bridge and operative to generate a beam of laser energy,

wherein the workpiece is supportable on the platform.

2. The module of claim 1 , wherein the core includes a tube.

3. The module of claim 1 , wherein the core includes a plate.

4. The module of claim 3 , wherein the plate is perforated to facilitate air flow within an interior of the sandwich panel between the first plate and the second plate.

5. The module of claim 1 , further comprising a tube arranged within the at least one channel and extending from the first port to the second port such that an interior of the tube is not in fluid communication with the at least one channel of the sandwich panel.

6. The module of claim 5 , wherein the platform includes a sandwich panel and wherein the sandwich panel further includes an exterior wall extending from the first plate to the second plate,

wherein the first port is located in the first plate and the second port is located in the exterior wall.

7. The module of claim 5 ,

wherein the optics bridge includes an optics table and an optics wall, wherein a surface defined by the optics table is not parallel to a surface defined by the optics wall,

the optics bridge includes a sandwich panel, wherein the sandwich panel of the optics bridge further includes an exterior wall extending from the first plate to the second plate, and

the first port is located in the first plate and the second port is located in the exterior wall.

8. The module of claim 7 , wherein the optics table is formed from the second plate.

9. The module of claim 8 , wherein the optics wall is formed from the second plate.

10. The module of claim 7 , further comprising:

a positioner operative to move the beam of laser energy relative to the workpiece, wherein the positioner supported by the optics wall of the optics bridge.

11. The module of claim 7 , wherein the optics bridge further comprises a process wall opposite the optics wall, the module further comprising:

at least one optical component supported by the process wall.

12. The module of claim 11 , further comprising:

a shroud attached to the optics bridge and the platform;

a first door shroud attached to the shroud; and

a plurality of second door shrouds aligned to the first door shroud and attached to the frame at a location below the platform,

wherein the shroud, the first door shroud, the optics bridge and the platform define a process bay within which the workpiece can be supported during processing,

wherein the first door shroud and the plurality of second door shrouds can be opened and closed, and

wherein, when the first door shroud and the plurality of second door shrouds are opened, the at least one optical component is accessible to a user.

13. The module of claim 1 , wherein the optics bridge includes a sandwich panel, the frame further comprising:

a tube external to the optics bridge, wherein an interior of the tube is in fluid communication with the at least one channel of the sandwich panel of the optics bridge.

14. The module of claim 13 , wherein the tube is integrated within the bridge support.

15. The module of claim 1 , further comprising a purge system having at least one purge outlet, wherein the purge system includes at least one purge tube operative to convey fluid to the at least one purge outlet.

16. The module of claim 15 , wherein the at least one purge tube is integrated within the bridge support.

17. The module of claim 15 , wherein the at least one purge tube extends through the optics bridge.

18. The module of claim 17 , wherein

the optics bridge includes an optics table and an optics wall,

wherein a surface defined by the optics table is not parallel to a surface defined by the optics wall, and

wherein the at least one purge tube extends through at least one selected from the group consisting of the optics table and the optics wall.

19. The module of claim 1 , wherein the frame does not include any material selected from the group consisting of granite, diabase, and concrete.

20. The module of claim 1 , wherein the laser is a carbon dioxide laser.

21. The module of claim 20 , wherein the carbon dioxide laser is operative to generate a laser beam having an average power of 200 W or greater.

22. The module of claim 21 , further comprising:

a door shroud attached to the optics bridge; and

wherein the door shroud and the optics bridge partially define an optics bay within which the laser source can be supported,

wherein the door shroud can be opened and closed, and

wherein, when the door shroud is opened and the frame is supported on a surface, the laser source is accessible to a user standing on the surface.

23. The module of claim 1 , wherein the laser is an ultraviolet laser.

24. The module of claim 1 , wherein the frame is supported on an exterior surface by no more than three support pads.

25. The module of claim 1 , wherein the laser is to generate a laser beam configured to process the workpiece, the module further comprising:

a chuck supported by the frame, the chuck configured to support the workpiece within a process bay;

a visual signaling system including at least one light emitting element operative to emit light, wherein the visual signaling system is operative to illuminate at least one object exposed to the process bay with the light; and

a computer communicatively coupled to the visual signaling system, wherein the computer is operative to control the visual signaling system to change at least one characteristic of the light depending upon at least one selected from the group consisting of a functional status of the laser processing module, the type of workpiece to be processed within the laser processing module, a pattern of features to be formed in or on the workpiece during processing, a status of a production run, a throughput of the laser processing module, a cycle time during processing of a workpiece and a takt time.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Apr 29, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; NEWPORT CORPORATION; MKS INSTRUMENTS, INC.
To: BARCLAYS BANK PLC
Reel/Frame 056101/0652 →
PATENT SECURITY AGREEMENT (ABL) Recorded Apr 29, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC
Reel/Frame 056101/0783 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 1, 2021
From: NEUFELD, CORIE; WILLEY, JEREMY; BILYEU, BRANDON; CROWTHER, WAYNE; RYDER, CHRIS
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 055449/0129 →
Continuity (3)
Provisional Application 62788216 · Jan 4, 2019
Provisional Application 62746364 · Oct 16, 2018
Related Publication 20210346985A1 · Nov 11, 2021
References Cited (86)
US 4680442A · Bauer · 1987 [cited by examiner]
US 5402734A · Galpin · 1995 [cited by examiner]
US 5600538A · Xanthopoulos · 1997 [cited by examiner]
US 5626157A · John et al. · 1997 [cited by applicant]
US 5854460A · Graf et al. · 1998 [cited by applicant]
US 5962104A · Gertel · 1999 [cited by examiner]
US 6031199A · Ream · 2000 [cited by examiner]
US 6157450A · Marchese-Ragona · 2000 [cited by examiner]
US 6227515B1 · Broyles · 2001 [cited by examiner]
US 7495848B2 · Hall · 2009 [cited by examiner]
US 8082061B2 · Segal et al. · 2011 [cited by applicant]
US 8231098B2 · Ryaboy · 2012 [cited by examiner]
US 9702619B2 · Kendall et al. · 2017 [cited by applicant]
US 9797558B2 · Kerr et al. · 2017 [cited by applicant]
US 10507545B2 · Brehm · 2019 [cited by examiner]
US 20040134392A1 · Sargeant · 2004 [cited by examiner]
US 20050061778A1 · Arakawa · 2005 [cited by examiner]
US 20050205778A1 · Kitai et al. · 2005 [cited by applicant]
US 20050257573A1 · Henssler et al. · 2005 [cited by applicant]
US 20060076322A1 · Brauchle · 2006 [cited by examiner]
US 20070144409A1 · Zhu · 2007 [cited by examiner]
US 20080102963A1 · Flagg et al. · 2008 [cited by applicant]
US 20100089880A1 · Sercel · 2010 [cited by examiner]
US 20100167076A1 · Nishida · 2010 [cited by examiner]
US 20110084050A1 · Togashi · 2011 [cited by examiner]
US 20130032583A1 · Epperlein et al. · 2013 [cited by applicant]
US 20130104780A1 · Zhu · 2013 [cited by examiner]
US 20150176763A1 · Bunz · 2015 [cited by examiner]
US 20150252604A1 · Inaguchi · 2015 [cited by examiner]
US 20150273387A1 · Hayashi · 2015 [cited by examiner]
US 20150273633A1 · Masauji · 2015 [cited by examiner]
US 20170087682A1 · Leonhard · 2017 [cited by examiner]
US 20170165788A1 · Maruyama · 2017 [cited by examiner]
US 20180141050A1 · Ryan · 2018 [cited by examiner]
US 20180313422A1 · Ryan · 2018 [cited by examiner]
US 20180361522A1 · Fornasero · 2018 [cited by examiner]
US 20180369957A1 · Kosmowski · 2018 [cited by examiner]
US 20210276125A1 · Lu · 2021 [cited by examiner]
CN 201012431Y · 2008 [cited by applicant]
CN 201799776U · 2011 [cited by examiner]
CN 104223358A · 2014 [cited by examiner]
CN 204522064U · 2015 [cited by applicant]
CN 105562925A · 2016 [cited by examiner]
CN 106216854A · 2016 [cited by examiner]
CN 107030380A · 2017 [cited by examiner]
CN 107584208A · 2018 [cited by applicant]
CN 107671440A · 2018 [cited by examiner]
CN 108279584A · 2018 [cited by examiner]
CN 108296637A · 2018 [cited by examiner]
CN 207642496U · 2018 [cited by examiner]
CN 108356432A · 2018 [cited by examiner]
CN 108515271A · 2018 [cited by applicant]
CN 107052590B · 2018 [cited by examiner]
CN 108655593A · 2018 [cited by examiner]
EP 0596600A1 · 1994 [cited by examiner]
EP 3130456A2 · 2017 [cited by examiner]
GB 2175199A · 1986 [cited by examiner]
JP 198321889A · 1983 [cited by applicant]
JP 1985114431A · 1985 [cited by applicant]
JP S6154536B2 · 1986 [cited by examiner]
JP 1997117836A · 1997 [cited by applicant]
JP H09117836A · 1997 [cited by examiner]
JP 2011155167A · 2011 [cited by applicant]
JP 2011255472A · 2011 [cited by examiner]
KR 101778088B1 · 2017 [cited by examiner]
KR 1020160096328B1 · 2017 [cited by applicant]
WO WO9707903A1 · 1997 [cited by applicant]
WO WO2013178281A1 · 2013 [cited by examiner]
WO WO2017132369A1 · 2017 [cited by examiner]
KR 101778088 B1 english translation (Year: 2017). [cited by examiner]
CN 201799776 U english translation (Year: 2011). [cited by examiner]
CN 107030380 A english translation (Year: 2017). [cited by examiner]
Roland DWX-4W User's Manual, 2015 (Year: 2015). [cited by examiner]
JP-S6154536-B2 English translation (Year: 1986) (Year: 1986). [cited by examiner]
CN-201799776-U English translation (Year: 2011) (Year: 2011). [cited by examiner]
Roland DWX-4W User's Manual, 2015 (Year: 2015) (Year: 2015). [cited by examiner]
KR-101778088-B1 English translation (Year: 2017) (Year: 2017). [cited by examiner]
CN-105562925-A English translation (Year: 2016). [cited by examiner]
PCT/US2019/056216, international search report issued Feb. 11, 2020, 4 pages. [cited by applicant]
PCT/US2019/056216, written opinion, 8 pages. [cited by applicant]
Office Action report for Chinese counterpart application No. 201980057738.2 mailed Mar. 1, 2023. (13 pages). [cited by applicant]
Office Action report for Chinese counterpart application No. 2019-80057738.2 mailed Jul. 14, 2022 (19 pages). [cited by applicant]
Written opinion issued Dec. 29, 2021 to Singapore patent application No. 11202101856S, 103 pages. [cited by applicant]
Office Action issued for JP counterpart application No. 2021-520929 dated Jun. 20, 2023 (3 pages). [cited by applicant]
Search Report for Taiwanese counterpart application No. 108137233 completed on Sep. 12, 2023. (2 pages). [cited by applicant]
Office Action issued for KR counterpart application No. 10-2021-7014764 dated Jul. 29, 2024 (6 pages). [cited by applicant]