IP Library › Granted Patent US 11,500,265
Granted Patent B2
US 11,500,265 · App. 17/281,814 · Granted Nov 15, 2022

Harmonic light-generating metasurface

Inventors: Michael Semmlinger (Houston, TX); Ming-Lun Tseng (Taipei, TW); Jian Yang (Houston, TX); Ming Zhang (Houston, TX); Din Ping Tsai (Taipei, TW); Liangliang Dong (Houston, TX); Arash Ahmadivand (Houston, TX); Peter Nordlander (Houston, TX); Naomi Jean Halas (Houston, TX)
Assignees: WILLIAM MARSH RICE UNIVERISTY; ACADEMIA SINICA
G02F1/37G02F1/353G02F1/354G02F2202/30
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,500,265
App. No.
17/281,814
Granted
Nov 15, 2022
Kind
B2
Abstract

A harmonic light-generating metasurface includes a base substrate and a plurality of structures, that include nonlinear material, that are disposed in a pattern on a surface of the base substrate. Each structure of the plurality of structures individually supports a magnetic dipole mode. An electromagnetic field enhancement of the magnetic dipole mode induces generation of a harmonic signal by the plurality of structures. Alternatively, a harmonic light-generating metasurface, includes a base substrate, a supporting substrate that includes a nonlinear material, and a plurality of paired structures disposed in a pattern on a surface of the supporting substrate. Each paired structure, of the plurality of paired structures, collectively supports a toroidal dipole mode. An electromagnetic field enhancement of the toroidal dipole mode penetrates the supporting substrate to induce generation of a harmonic signal by the supporting substrate.

Claims (40)

1. A harmonic light-generating metasurface, comprising:

a base substrate;

a supporting substrate comprising a nonlinear material; and

a plurality of paired structures disposed in a pattern on a surface of the supporting substrate, wherein

each paired structure, of the plurality of paired structures, collectively supports a toroidal dipole mode, and

an electromagnetic field enhancement of the toroidal dipole mode penetrates the supporting substrate to induce generation of a harmonic signal by the supporting substrate.

2. The harmonic light-generating metasurface of claim 1 , wherein the pattern controls an emission profile of the harmonic signal generated by the plurality of paired structures.

3. The harmonic light-generating metasurface of claim 1 , wherein the pattern is rectilinear.

4. The harmonic light-generating metasurface of claim 1 , wherein the pattern is polar and comprises polar coordinate axes.

5. The harmonic light-generating metasurface of claim 1 , wherein the nonlinear material is a wide-bandgap semiconductor.

6. The harmonic light-generating metasurface of claim 5 , wherein the wide-bandgap semiconductor is indium tin oxide (ITO).

7. The harmonic light-generating metasurface of claim 1 , wherein the plurality of paired structures comprise a plasmonic material.

8. The harmonic light-generating metasurface of claim 1 , wherein the plurality of paired structures are covered by an oxide film disposed on the surface of the supporting substrate.

9. The harmonic light-generating metasurface of claim 1 , wherein

the toroidal dipole mode interacts with a second mode of the structure to generate a higher-order multi-pole mode, and

the combined toroidal dipole mode electromagnetic fields and high-order multi-pole mode electromagnetic fields penetrate the supporting substrate to induce generation of the harmonic signal.

10. A harmonic light-generating optical system, comprising:

a pump laser; and

the harmonic light-generating metasurface of claim 1 .

11. The harmonic light-generating optical system according to claim 10 , wherein an ambient atmosphere of the system has access to a first optical path of the pump laser and a second optical path of a harmonic signal generated by the harmonic light-generating metasurface.

12. A method of manufacturing a harmonic light-generating metasurface, the method comprising:

disposing a supporting substrate comprising a nonlinear material on a base substrate; and

patterning a plurality of paired structures on a surface of the supporting substrate, wherein

each paired structure, of the plurality of paired structures, collectively supports a toroidal dipole mode, and

an electromagnetic field enhancement of the toroidal dipole mode penetrates the supporting substrate to induce generation of a harmonic signal by the supporting substrate.

13. The method according to claim 12 , wherein patterning the plurality of paired structures comprises:

disposing a resist film on the surface of the supporting substrate;

pattering the resist film using electron beam lithography;

developing the resist film into a mask with a developer;

disposing a plasmonic material into and onto the mask;

lifting-off the mask with a second developer to leave the pattern of a plurality of paired structures of the plasmonic material directly on the surface of the supporting substrate.

14. The method according to claim 12 , wherein patterning the film comprises stamping the plurality of paired structure onto the surface of the supporting substrate.

15. The method according to claim 12 , wherein the pattern of the plurality of paired structures controls an emission profile of the harmonic signal.

16. The method according to claim 12 , further comprising disposing an oxide film on the surface of the supporting substrate to cover the plurality of paired structures.

17. The method according to claim 12 , wherein

the toroidal dipole mode interacts with a second mode of the structure to generate a higher-order multi-pole resonance, and

the combined toroidal dipole mode electromagnetic fields and high-order multi-pole electromagnetic fields penetrate the supporting substrate to induce generation of the third harmonic signal by the supporting substrate.

18. The method according to claim 12 , wherein the nonlinear material is a wide-bandgap semiconductor.

19. The method according to claim 18 , wherein the wide-bandgap semiconductor is indium tin oxide (ITO).

20. The method according to claim 12 , wherein the plurality of paired structures comprise a plasmonic material.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 26, 2022
From: SEMMLINGER, MICHAEL; YANG, JIAN; ZHANG, MING; DONG, LIANGLIANG; AHMADIVAND, ARASH; NORDLANDER, PETER; HALAS, NAOMI JEAN
To: WILLIAM MARSH RICE UNIVERSITY
Reel/Frame 061217/0082 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 26, 2022
From: TSENG, MING-LUN; TSAI, DIN PING
To: ACADEMIA SINICA
Reel/Frame 061217/0110 →
Continuity (2)
Provisional Application 62739730 · Oct 1, 2018
Related Publication 20220011646A1 · Jan 13, 2022
Cited By (2)
US 12,498,615 US 12,548,964