Laser welding device
A laser welding device includes a chamber which has an internal space in which a workpiece is disposed, a laser beam irradiation unit which irradiates the workpiece with a laser beam to weld the workpiece, a vacuum pump which suctions air in the chamber to decrease a pressure in the chamber, a laser transmission window through which the laser beam emitted from the laser beam irradiation unit is transmitted, and a shutter which is disposed on the chamber side with respect to the laser transmission window and closed when the pressure in the chamber is returned to the atmospheric pressure after laser welding.
1. A laser welding device comprising:
a chamber which has an internal space in which a workpiece is disposed;
a laser beam irradiation unit which irradiates the workpiece with a laser beam to weld the workpiece;
a pump which suctions air in the chamber and decreases a pressure in the chamber;
a laser transmission window through which the laser beam emitted from the laser beam irradiation unit is transmitted; and
a shutter which is disposed on a chamber side with respect to the laser transmission window and configured to close so as to isolate the laser transmission window from the internal space when the pressure in the chamber is returned to an atmospheric pressure after laser welding.
2. The laser welding device according to claim 1 , further comprising:
an opening unit which is provided in the chamber and opened when the pressure in the chamber is returned to the atmospheric pressure; and
a control unit which performs control, when the pressure in the chamber is returned to the atmospheric pressure, to stop irradiation of the laser beam performed by the laser beam irradiation unit, close the shutter, and then open the opening unit.
3. The laser welding device according to claim 1 ,
wherein the shutter is made of a material which does not allow solidified particles of metal vapor generated during welding to pass through when the shutter is closed.
4. The laser welding device according to claim 1 , further comprising:
a tubular portion through which the laser beam emitted from the laser beam irradiation unit passes and which communicates with the chamber,
wherein the laser transmission window and the shutter are disposed in the tubular portion.
5. The laser welding device according to claim 4 ,
wherein the tubular portion includes a first tubular portion in which the laser transmission window and the shutter are disposed and a second tubular portion which is disposed to be adjacent to the chamber side with respect to the first tubular portion and has an area larger than that of the first tubular portion in a cross section perpendicular to an optical axis direction of the laser beam.
6. The laser welding device according to claim 1 , further comprising:
a gas introduction unit which is disposed on the chamber side of the laser transmission window and introduces an inert gas toward the chamber side.
7. The laser welding device according to claim 6 ,
wherein the gas introduction unit is disposed between the shutter and the laser transmission window.
8. The laser welding device according to claim 7 , further comprising:
a control unit which controls opening or closing of the shutter,
wherein the control unit is configured to control opening the shutter in a state where the inert gas is introduced from the gas introduction unit when the pressure in the chamber is reduced by the pump.
9. The laser welding device according to claim 1 ,
wherein the shutter includes a gate valve.