Intermediate connecting member and inspection apparatus
An intermediate connecting member according to one aspect of the present disclosure is provided between a first member including multiple first terminals and a second member including multiple second terminals. The intermediate connecting member includes multiple connection parts configured to electrically connect the first terminals to the second terminals, and a retainer holding the multiple connection parts. Each of the multiple connection parts is formed of an elastic member to which an electrically conductive property is given at least on a surface of the elastic member.
1. An inspection apparatus comprising:
a tester configured to apply electrical signals to a plurality of devices formed on a substrate to inspect electrical characteristics of the plurality of devices;
a probe card including probes configured to contact electrodes of the plurality of devices;
an intermediate connecting member including a plurality of connection parts and a retainer that holds the plurality of connection parts, the plurality of connection parts being configured to electrically connect respective terminals of the tester to respective terminals of the probe card; and
a mechanism configured to
allow the probe card to be loaded together with the substrate, as one unit, to the inspection apparatus while the probes of the probe card are being in contact with the electrodes of the plurality of devices,
cause the terminals of the probe card formed on a top surface thereof to be brought in contact with the terminals of the tester formed on a bottom portion of a tester motherboard thereof through the connection parts of the intermediate connecting member, and
cause the plurality of devices to be inspected.
2. The inspection apparatus as claimed in claim 1 , wherein the mechanism is configured to allow the probe card to be loaded to the inspection apparatus while the terminals of the probe card formed on the top surface thereof are being in electrical contact with the connection parts of the intermediate connecting member.
3. The inspection apparatus as claimed in claim 1 , wherein the mechanism includes:
a belt conveyor configured to convey the probe card and the substrate to a location under the tester while the probes of the probe card are being in contact with the electrodes of the plurality of devices; and
a lift unit configured to lift up and down the probe card and the substrate, and
wherein the lift unit is extended to lift up the probe card and the substrate.
4. The inspection apparatus as claimed in claim 2 , wherein the mechanism includes:
a belt conveyor configured to convey the probe card and the substrate to a location under the tester while the probes of the probe card are being in contact with the electrodes of the plurality of devices; and
a lift unit configured to lift up and down the probe card and the substrate, and
wherein the lift unit is extended to lift up the probe card and the substrate.