Solid-state imaging device and driving method thereof, and electronic apparatus
A solid-state imaging device includes a photoelectric conversion unit, a light shielding unit and a transfer transistor. The photoelectric conversion unit generates charges by photoelectrically converting light. The light shielding unit is formed by engraving a semiconductor substrate on which the photoelectric conversion unit is formed, so as to surround an outer periphery of the photoelectric conversion unit. The transfer transistor transfers charges generated in the photoelectric conversion unit. During a charge accumulation period in which charges are accumulated in the photoelectric conversion unit, a potential that repels the charges is supplied to the light shielding unit and a gate electrode of the transfer transistor. During a charge transfer period in which charges are transferred from the photoelectric conversion unit, a potential that repels the charges is supplied to the light shielding unit and a potential that attracts the charges is supplied to the gate electrode of the transfer transistor.
1. An imaging device, comprising:
a semiconductor substrate including a first side and a second side,
wherein the first side is opposite to the second side;
a first trench including a first conductive layer;
a second trench including a second conductive layer;
a transparent conductive film disposed on the first side of the semiconductor substrate; and
a photoelectric conversion region disposed between the first trench and the second trench in a cross-sectional view,
wherein the first conductive layer contacts the transparent conductive film in the cross-sectional view, and
wherein the second conductive layer does not contact the transparent conductive film in the cross-sectional view.
2. The imaging device according to claim 1 , wherein the first trench includes a fixed charge film.
3. The imaging device according to claim 1 , wherein the first trench includes an insulating film.
4. The imaging device according to claim 1 , wherein the second trench includes a fixed charge film.
5. The imaging device according to claim 1 , wherein the second trench includes an insulating film.
6. The imaging device according to claim 1 , wherein the first side of the semiconductor substrate is a light-incident side.
7. The imaging device according to claim 1 , further comprising a planar electrode disposed at the second side of the semiconductor substrate.
8. The imaging device according to claim 1 , further comprising a wiring layer disposed at the second side of the semiconductor substrate.
9. The imaging device according to claim 1 , wherein the first trench extends from the first side to the second side.
10. The imaging device according to claim 1 , wherein the second trench extends from the first side to the second side.
11. The imaging device according to claim 1 , wherein the second trench extends from the second side to the first side.
12. The imaging device according to claim 1 , wherein each of the first and second conductive layers includes at least one of a metal material.
13. The imaging device according to claim 1 , wherein a depth of the first trench is different than a depth of the second trench.
14. The imaging device according to claim 1 , further comprising a barrier metal disposed between the transparent conductive film and the first side of the semiconductor substrate.
15. The imaging device according to claim 1 , wherein the transparent conductive film includes at least one of a metal material.
16. The imaging device according to claim 1 , wherein the transparent conductive film contacts the conductive layer.
17. An electronic apparatus, comprising:
an imaging device including:
a semiconductor substrate including a first side and a second side,
wherein the first side is opposite to the second side;
a first trench including a first conductive layer;
a second trench including a second conductive layer;
a transparent conductive film disposed on the first side of the semiconductor substrate; and
a photoelectric conversion region disposed between the first trench and the second trench in a cross-sectional view,
wherein the first conductive layer contacts the transparent conductive film in the cross-sectional view, and
wherein the second conductive layer does not contact the transparent conductive film in the cross-sectional view; and
a lens configured to guide light toward a light-receiving surface of the imaging device.
18. The electronic apparatus according to claim 17 , wherein the first trench includes a fixed charge film.
19. The electronic apparatus according to claim 17 , wherein the first trench includes an insulating film.
20. The electronic apparatus according to claim 17 , wherein the second trench includes a fixed charge film.