Laminated piezoelectric element and electroacoustic transducer
An object is to provide a laminated piezoelectric element capable of preventing a short circuit between adjacent piezoelectric films and an electroacoustic transducer using the laminated piezoelectric element. The object is solved by laminating a plurality of layers of piezoelectric films polarized in a thickness direction, in which a piezoelectric layer is interposed between two thin film electrodes, and causing polarization directions of the adjacent piezoelectric films to be opposite to each other.
1. A laminated piezoelectric element comprising:
a plurality of layers of laminated piezoelectric films having a piezoelectric layer interposed between two thin film electrodes, and
a bonding layer which bonds adjacent piezoelectric films to each other,
wherein the piezoelectric film is polarized in a thickness direction,
polarization directions of adjacent piezoelectric films are opposite to each other, and
the thickness of the bonding layer is 0.1 to 50 μm.
2. The laminated piezoelectric element according to claim 1 ,
wherein the piezoelectric film is laminated in a plurality of layers by folding back the piezoelectric film a plurality of times.
3. The laminated piezoelectric element according to claim 2 ,
wherein a folded-back portion of the piezoelectric film has a core rod.
4. The laminated piezoelectric element according to claim 2 ,
wherein a bent portion of the piezoelectric film formed by the folding-back extends along a longitudinal direction.
5. The laminated piezoelectric element according to claim 2 ,
wherein a bent portion of the piezoelectric film formed by the folding-back extends along a lateral direction.
6. The laminated piezoelectric element according to claim 1 ,
wherein at least one layer of the laminated piezoelectric film has a protective layer laminated on at least one of the thin film electrodes.
7. The laminated piezoelectric element according to claim 1 ,
wherein a thickness of the bonding layer is smaller than a thickness of the piezoelectric layer.
8. The laminated piezoelectric element according to claim 1 ,
wherein the bonding layer is a layer consisting of an adhesive.
9. The laminated piezoelectric element according to claim 1 ,
wherein a spring constant of the bonding layer is equal to or less than a spring constant of the piezoelectric film.
10. The laminated piezoelectric element according to claim 1 ,
wherein the bonding layer has conductivity.
11. The laminated piezoelectric element according to claim 1 ,
wherein, in the piezoelectric film, a local maximum value of a loss tangent (Tan δ) at a frequency of 1 Hz according to dynamic viscoelasticity measurement exists at room temperature.
12. The laminated piezoelectric element according to claim 1 ,
wherein the piezoelectric film has no in-plane anisotropy in piezoelectric properties.
13. The laminated piezoelectric element according to claim 1 ,
wherein the piezoelectric layer is a polymer composite piezoelectric layer in which piezoelectric particles are dispersed in a polymer material having a cyanoethyl group.
14. The laminated piezoelectric element according to claim 13 ,
wherein the polymer material is cyanoethylated polyvinyl alcohol.
15. The laminated piezoelectric element according to claim 1 , further comprising:
a lead-out wire which is connected to the thin film electrode for connection to an external device,
wherein a value obtained by dividing a current value flowing into the lead-out wire by a width of the lead-out wire is 1 A/cm or less.
16. An electroacoustic transducer comprising:
the laminated piezoelectric element according to claim 1 ; and
a vibration plate in contact with the laminated piezoelectric element.
17. The laminated piezoelectric element according to claim 2 ,
wherein at least one layer of the laminated piezoelectric film has a protective layer laminated on at least one of the thin film electrodes.