Single mode semiconductor laser with phase control
The invention relates to a method for producing a semiconductor laser comprising the method steps: generating a lateral structure layer, at least in the material abrasion areas, a basic selection of the laser modes amplified or amplifiable through stimulated emission taking place via the lateral structure layer; and generating an optical element for defining the phasing of the amplified or amplifiable laser modes, the optical element being generated in such a manner that it has a distance d to an end of the lateral structure layer in the longitudinal direction of the waveguide ridge, distance d fulfilling the condition min d - m · λ e f f 2 ≤ λ e f f 4 , m being a natural number (m∈ ) and λ eff being the effective wavelength in the material.
1. A semiconductor laser, comprising:
a multilayer structure comprising at least one waveguide ridge and material abrasion areas laterally abutting against the waveguide ridge, the multilayer structure being disposed on a semiconductor substrate and a layer extension plane being defined by a surface of the semiconductor substrate, the multilayer structure having at least one active region, the active region having a layer structure and/or material structure for forming a laser layer based on the principle of stimulated emission, a lateral structure layer being provided at least in the material abrasion areas, a selection of the laser modes amplified or amplifiable via stimulated emission taking place via the lateral structure layer, and facet layer structures, which serve for reflecting and/or decoupling laser radiation, being formed on a cavity end or on two opposite cavity ends perpendicular to the layer extension plane in the longitudinal direction of the waveguide ridge,
wherein the semiconductor laser has an optical element for defining the phasing of the amplified or amplifiable laser modes, the optical element having a distance d to an end of the lateral structure layer in the longitudinal direction of the waveguide ridge, the distance d fulfilling the condition of a minimum of an absolute value of an expression d−m·λ_eff/2 being less than or equal to λ_eff/4, m being a natural number (m∈ ) and λeff being the effective wavelength in the material, and
wherein meta-optical metal structures are formed on a facet layer structure of the optical element.
2. The semiconductor laser according to claim 1 , wherein the optical element is embedded in the facet layer structure or is disposed on the facet layer structure.
3. The semiconductor laser according to claim 1 , wherein the optical element has metallic and/or organic three-dimensional structures, which are hardened selectively from a liquid or a viscous precursor.
4. The semiconductor laser according to claim 1 , wherein the optical element has dielectric layer structures and/or mirror layer structures.
5. The semiconductor laser according to claim 1 , wherein the optical element is formed in the area of the multilayer structure.
6. The semiconductor laser according to claim 5 , wherein the optical element is realized as an ion implantation area of the multilayer structure or as an area of the multilayer structure having photonic crystals or as a component of a photonically integrated circuit.