Semiconductor device having a passivation layer and method of making
A semiconductor device includes a conductive pad over an interconnect structure, wherein the conductive pad is electrically connected to an active device. The semiconductor device further includes a dielectric layer over the conductive pad, wherein the dielectric layer has a first conformity. The semiconductor device further includes a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity different from the first conformity.
1. A method of making a semiconductor device, the method comprising:
depositing a dielectric layer over a conductive pad using a first deposition process; and
depositing a first passivation layer directly over the dielectric layer using a high density plasma chemical vapor deposition (HDPCVD), wherein the first deposition process is different from HDPCVD.
2. The method of claim 1 , wherein the first deposition process comprises plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD), atmospheric pressure chemical vapor deposition (APCVD), or atomic layer deposition (ALD).
3. The method of claim 1 , wherein depositing the dielectric layer comprises depositing the dielectric layer along sidewalls and over a top surface of the conductive pad.
4. The method of claim 3 , wherein depositing the dielectric layer includes depositing the dielectric layer over the sidewalls to a first thickness and over the top surface to a second thickness, and a difference between the first thickness and the second thickness ranges from about 5% to about 10%.
5. The method of claim 3 , wherein depositing the first passivation layer includes depositing the first passivation layer over the sidewalls to a first thickness and over the top surface to a second thickness, and a difference between the first thickness and the second thickness is less than about 3%.
6. The method of claim 1 , further comprising depositing a second passivation layer over the first passivation layer.
7. The method of claim 6 , wherein depositing the second passivation layer comprises depositing the second passivation layer using HDPCVD.
8. The method of claim 6 , wherein depositing the second passivation layer comprises depositing the second passivation layer using PECVD, LPCVD, APCVD, or ALD.
9. A method of making a semiconductor device, the method comprising:
depositing a dielectric layer over a conductive pad, wherein the dielectric layer has a first conformity; and
depositing a first passivation layer directly over the dielectric layer, wherein the first passivation layer has a second conformity greater than the first conformity.
10. The method of claim 9 , further comprising forming the conductive pad over a substrate.
11. The method of claim 10 , wherein depositing the dielectric layer comprises depositing the dielectric layer over a portion of the substrate adjacent to the conductive pad.
12. The method of claim 10 , wherein depositing the first passivation layer comprises depositing the first passivation layer over a portion of the substrate adjacent to the conductive pad.
13. A method of making a semiconductor device, the method comprising:
forming a plurality of conductive pads over a substrate;
depositing a dielectric layer over each of the plurality of conductive pads, wherein the dielectric layer has a first conformity; and
depositing a passivation layer over the dielectric layer, wherein the passivation layer has a second conformity, and the second conformity is different from the first conformity.
14. The method of claim 13 , wherein depositing the dielectric layer comprises depositing the dielectric layer using plasma enhanced chemical vapor deposition (PECVD), low pressure chemical vapor deposition (LPCVD), atmospheric pressure chemical vapor deposition (APCVD), or atomic layer deposition (ALD).
15. The method of claim 13 , wherein depositing the passivation layer comprises depositing the passivation layer using a high density plasma chemical vapor deposition (HDPCVD).
16. The method of claim 13 , wherein depositing the dielectric layer comprises depositing the dielectric layer along sidewalls of each of the plurality of conductive pads.
17. The method of claim 13 , wherein depositing the dielectric layer comprises depositing the dielectric layer between adjacent conductive pads of the plurality of conductive pads.
18. The method of claim 13 , wherein depositing the dielectric layer includes depositing the dielectric layer over sidewalls of a first conductive pad of the plurality of conductive pads to a first thickness and over a top surface of the first conductive pad to a second thickness, and a difference between the first thickness and the second thickness ranges from about 5% to about 10%.
19. The method of claim 13 , wherein depositing the passivation layer includes depositing the passivation layer over sidewalls of a first conductive pad of the plurality of conductive pads to a first thickness and over a top surface of the first conductive pad to a second thickness, and a difference between the first thickness and the second thickness is less than about 3%.
20. The method of claim 13 , wherein depositing the dielectric layer comprises depositing silicon oxide, silicon nitride, or silicon oxynitride.