IP Library Granted Patent US 11,586,782
Granted Patent B2
US 11,586,782 · App. 17/322,347 · Granted Feb 21, 2023

Guide layout creating apparatus, guide layout creating method and recording medium

Inventor: Hironobu Sato (Taito Tokyo, JP)
Assignee: Kioxia Corporation
G06F30/00G03F7/0002G03F7/0035H01L23/49838G06F2119/18
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Quick Facts
Patent No.
US 11,586,782
App. No.
17/322,347
Granted
Feb 21, 2023
Kind
B2
Abstract

In one embodiment, a guide layout creating apparatus includes a selection module that selects a first point as a point on which a guide to array a plurality of particles in a first array is arranged. The apparatus further includes a calculation module that calculates first free energy when the plurality of particles are arrayed in the first array by the guide arranged on the first point, and second free energy when the plurality of particles are arrayed in a second array by the guide arranged on the first point, a type of the second array being different from a type of the first array. The apparatus further includes a determination module that determines whether the first point is employed as the point on which the guide is arranged on the basis of the first free energy and the second free energy.

Claims (17)

1. A guide layout creating apparatus comprising:

a selection module that selects a first point as a point on which a guide to array a plurality of particles in a first array is arranged;

a calculation module that calculates first free energy when the plurality of particles are arrayed in the first array by the guide arranged on the first point, and second free energy when the plurality of particles are arrayed in a second array by the guide arranged on the first point, a type of the second array being different from a type of the first array; and

a determination module that determines whether the first point is employed as the point on which the guide is arranged on the basis of the first free energy and the second free energy.

2. The apparatus of claim 1 , wherein the determination module determines to employ the first point as the point on which the guide is arranged on a condition that the first free energy is lower than the second free energy.

3. The apparatus of claim 1 , wherein patterns of the first and second arrays are hexagonal close-packed patterns.

4. The apparatus of claim 1 , wherein the guide is a chemical guide or a physical guide.

5. The apparatus of claim 1 , wherein

the selection module selects a second point as a point on which the guide is arranged;

the calculation module calculates third free energy when the plurality of particles are arrayed in the first array by the guide arranged on the second point, and fourth free energy when the plurality of particles are arrayed in the second array by the guide arranged on the second point; and

the determination module determines to employ the first point as the point on which the guide is arranged when a first difference obtained by subtracting the first free energy from the second free energy is larger than a second difference obtained by subtracting the third free energy from the fourth free energy.

6. The apparatus of claim 1 , wherein the selection module automatically selects the first point at random.

7. The apparatus of claim 1 , wherein the selection module selects a first region as a repetition unit of arrangement of the guide, and selects the first point in the first region.

8. The apparatus of claim 1 , wherein

the calculation module calculates fifth free energy when the plurality of particles are arrayed in a third array in rotary symmetry to the first array by the guide arranged on the first point; and

the determination module determines whether or not the first point is employed as the point on which the guide is arranged on the basis of the first free energy and the fifth free energy.

9. The apparatus of claim 8 , wherein the determination module determines to employ the first point as the point on which the guide is arranged on a condition that the first free energy is lower than the fifth free energy.

Assignments (3)
CHANGE OF NAME Recorded Feb 18, 2022
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 059118/0357 →
MERGER AND CHANGE OF NAME Recorded Feb 1, 2022
From: TOSHIBA MEMORY CORPORATION; K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 059861/0561 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 17, 2021
From: SATO, HIRONOBU
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 056262/0807 →
Priority Claims (1)
JP JP2017-176080 · Sep 13, 2017 · national
Continuity (2)
Division 15891408 · Feb 8, 2018
Related Publication 20210271781A1 · Sep 2, 2021