Method for manufacturing display panel including forming through hole using upper mask and lower mask
A display panel including: a substrate having a through hole, a conductive part disposed on an inner surface of the through hole and a resin part in the through hole and adjacent to the conductive part; a circuit layer disposed at a first side of the substrate; and a pad disposed at a second side of the substrate and electrically connected to the circuit layer by the conductive part, wherein a width of the through hole is larger near the first side or the second side of the substrate than at a center of the through hole.
1. A method for manufacturing a display panel, the method comprising:
forming a through hole in a base substrate;
providing metallic ink to an inner surface of the through hole passing through the base substrate to form a conductive part;
filling the inside of the conductive part with a polymer resin to form a resin part;
forming a circuit layer at an upper side of the base substrate; and
forming a pad at a lower side of the base substrate, wherein the pad overlaps the through hole,
wherein the forming of the through hole in the base substrate comprises:
arranging an upper mask including a transmission part and a non-transmission part at an upper side of a preliminary base substrate, and a lower mask including a transmission part and a non-transmission part at a lower side of the preliminary base substrate;
forming the through hole in the preliminary base substrate, wherein the through hole corresponds to the transmission part of each of the upper and lower masks; and
removing the upper and lower masks.
2. The method of claim 1 , wherein an area of the transmission part of the lower mask at the lower side of the preliminary base substrate is larger than an area of the transmission part of the upper mask at the upper side of the preliminary base substrate.
3. The method of claim 1 , wherein when viewed in a plane, the transmission part of at least one of the upper and lower masks comprises a first transmission part that has a portion with a circumference having a first radius of curvature.
4. The method of claim 3 , wherein the transmission part of the at least one of the upper and lower masks further comprises a second transmission part having a square shape when viewed in a plane and the second transmission part is connected at one side of the first transmission part.
5. The method of claim 4 , wherein the lower mask at the lower side of the preliminary base substrate comprises the first transmission part and the second transmission part, and
the upper mask at the upper side of the preliminary base substrate comprises the first transmission part.
6. The method of claim 4 , wherein the upper mask at the upper side of the preliminary base substrate does not comprise the second transmission part.
7. The method of claim 1 , wherein when viewed in a cross section perpendicular to the thickness direction of the preliminary base substrate,
one edge of the upper mask at the upper side of the preliminary base substrate and one edge of the lower mask at the lower side of the preliminary base substrate overlap each other.
8. The method of claim 1 , wherein a second width of the transmission part of the lower mask at the lower side of the preliminary base substrate is three to five times greater than a first width of the transmission part of the upper mask at the upper side of the preliminary base substrate, and
the first width and the second width each correspond to a width in a direction perpendicular to the thickness direction of the preliminary base substrate.
9. The method of claim 1 , wherein when viewed in a plane, an area of the through hole is smaller than an area of the transmission part of at least one of the upper and lower masks.
10. The method of claim 1 , wherein the forming of the through hole comprises forming a preliminary through hole with a laser and etching the preliminary through hole.
11. The method of claim 1 , wherein when viewed in a plane, the preliminary through hole is circular and has an average diameter of about 0.1 urn to about 10 um.
12. The method of claim 1 , wherein the metallic ink comprises a conductive material and a solvent, and
the forming of the conductive part comprises removing the solvent.
13. The method of claim 1 , wherein the forming of the conductive part further comprises performing plasma treatment on the inner surface of the through hole.