IP Library Granted Patent US 11,715,813
Granted Patent B2
US 11,715,813 · App. 17/324,461 · Granted Aug 1, 2023

Quantum well-based LED structure enhanced with sidewall hole injection

Inventors: Benjamin Leung (Sunnyvale, CA); Miao-Chan Tsai (Sunnyvale, CA)
Assignee: GOOGLE LLC
H01L33/06H01L33/0075H01L33/145H01L33/20H01L33/385
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Quick Facts
Patent No.
US 11,715,813
App. No.
17/324,461
Filed
May 19, 2021
Granted
Aug 1, 2023
Kind
B2
Art Unit
2891
USPC
257/13
Abstract

A light emitting diode (LED) structure includes a semiconductor template having a template top-surface, an active quantum well (QW) structure formed over the semiconductor template, and a p-type layer. The p-type layer has a bottom-surface that faces the active QW and the template top-surface. The bottom-surface includes a recess sidewall. The recess sidewall of the p-type layer is configured for promoting injection of holes into the active QW structure through a QW sidewall of the active QW structure.

Claims (21)

1. A light-emitting diode (LED) structure, comprising:

a semiconductor template having a planar growth surface;

an active quantum well (QW) structure disposed on the planar growth surface, the active QW structure having a sidewall that is non-parallel with the planar growth surface; and

a p-type layer conformally disposed over the active QW structure, the p-type layer having a surface that faces the sidewall of the active QW structure, the p-type layer terminating at and contacting the planar growth surface,

the surface of the p-type layer and the sidewall of the active QW structure being arranged such that, during operation of the LED structure, holes are injected from the p-type layer into the active QW structure through the surface of the p-type layer and into the active QW structure through the sidewall of the active QW structure in a direction parallel to the planar growth surface.

2. The LED structure of claim 1 , wherein:

the active QW structure includes a plurality of QW layer and quantum barrier layer pairs formed parallel to the semiconductor template and stacked in a surface-normal direction relative to the planar growth surface, and

the surface of the p-type layer and the plurality of QW layer and quantum barrier layer pairs are arranged such that, during operation of the LED structure, holes are injected into each of the plurality of QW layers within the active QW structure through the sidewall of the active QW structure.

3. The LED structure of claim 2 , wherein at least one of the quantum barrier layers in the active QW structure has a thickness greater than fifty nanometers in the surface-normal direction.

4. The LED structure of claim 1 , further comprising a hole-blocking layer formed between the active QW structure and the semiconductor template, the hole-blocking layer, during operation of the LED structure, prevents migration of holes from the active QW structure to the semiconductor template.

5. The LED structure of claim 4 , further comprising a preparation layer disposed between the semiconductor template and the hole-blocking layer.

6. The LED structure of claim 1 , further comprising a p-contact layer disposed on the p-type layer.

7. The LED structure of claim 1 , wherein, in a cross-sectional plane perpendicular to the planar growth surface, the LED structure forms a shape that is one of trapezoidal, triangular, or rectangular.

8. A method for fabricating a light-emitting diode (LED) structure on a semiconductor template, the semiconductor template having a planar growth surface, the method comprising:

forming an active quantum well (QW) structure over planar growth surface, the active QW structure having a sidewall that is non-parallel with the planar growth surface; and

forming a p-type layer conformally over the active QW structure, the p-type layer having a surface that faces the sidewall of the active QW structure, the p-type layer terminating at and contacting the planar growth surface,

the surface of the p-type layer and the sidewall of the active QW structure being arranged such that, during operation of the LED structure, holes are injected from the p-type layer into the active QW structure through the surface of the p-type layer and into the active QW structure through the sidewall of the active QW structure in a direction parallel to the planar growth surface.

9. The method of claim 8 , further comprising:

forming a hole-blocking layer between the active QW structure and the semiconductor template for preventing migration of the holes from the active QW structure to the semiconductor template.

10. The LED structure of claim 1 , wherein the semiconductor template is n-doped.

11. The LED structure of claim 10 , wherein the p-type layer is in direct contact with the planar growth surface.

Assignments (3)
CORRECTIVE ASSIGNMENT TO CORRECT THE EXECUTION DATE FROM 3/3/2022 TO 5/4/2022 PREVIOUSLY RECORDED ON REEL 061448 FRAME 0903. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNORS INTEREST. Recorded Mar 23, 2023
From: RAXIUM INC.
To: GOOGLE LLC
Reel/Frame 063149/0640 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 25, 2022
From: RAXIUM INC.
To: GOOGLE LLC
Reel/Frame 061448/0903 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 19, 2021
From: LEUNG, BENJAMIN; TSAI, MIAO-CHAN
To: RAXIUM, INC.
Reel/Frame 056287/0419 →
Continuity (2)
Provisional Application 63027069 · May 19, 2020
Related Publication 20210367099A1 · Nov 25, 2021