Quantum well-based LED structure enhanced with sidewall hole injection
A light emitting diode (LED) structure includes a semiconductor template having a template top-surface, an active quantum well (QW) structure formed over the semiconductor template, and a p-type layer. The p-type layer has a bottom-surface that faces the active QW and the template top-surface. The bottom-surface includes a recess sidewall. The recess sidewall of the p-type layer is configured for promoting injection of holes into the active QW structure through a QW sidewall of the active QW structure.
1. A light-emitting diode (LED) structure, comprising:
a semiconductor template having a planar growth surface;
an active quantum well (QW) structure disposed on the planar growth surface, the active QW structure having a sidewall that is non-parallel with the planar growth surface; and
a p-type layer conformally disposed over the active QW structure, the p-type layer having a surface that faces the sidewall of the active QW structure, the p-type layer terminating at and contacting the planar growth surface,
the surface of the p-type layer and the sidewall of the active QW structure being arranged such that, during operation of the LED structure, holes are injected from the p-type layer into the active QW structure through the surface of the p-type layer and into the active QW structure through the sidewall of the active QW structure in a direction parallel to the planar growth surface.
2. The LED structure of claim 1 , wherein:
the active QW structure includes a plurality of QW layer and quantum barrier layer pairs formed parallel to the semiconductor template and stacked in a surface-normal direction relative to the planar growth surface, and
the surface of the p-type layer and the plurality of QW layer and quantum barrier layer pairs are arranged such that, during operation of the LED structure, holes are injected into each of the plurality of QW layers within the active QW structure through the sidewall of the active QW structure.
3. The LED structure of claim 2 , wherein at least one of the quantum barrier layers in the active QW structure has a thickness greater than fifty nanometers in the surface-normal direction.
4. The LED structure of claim 1 , further comprising a hole-blocking layer formed between the active QW structure and the semiconductor template, the hole-blocking layer, during operation of the LED structure, prevents migration of holes from the active QW structure to the semiconductor template.
5. The LED structure of claim 4 , further comprising a preparation layer disposed between the semiconductor template and the hole-blocking layer.
6. The LED structure of claim 1 , further comprising a p-contact layer disposed on the p-type layer.
7. The LED structure of claim 1 , wherein, in a cross-sectional plane perpendicular to the planar growth surface, the LED structure forms a shape that is one of trapezoidal, triangular, or rectangular.
8. A method for fabricating a light-emitting diode (LED) structure on a semiconductor template, the semiconductor template having a planar growth surface, the method comprising:
forming an active quantum well (QW) structure over planar growth surface, the active QW structure having a sidewall that is non-parallel with the planar growth surface; and
forming a p-type layer conformally over the active QW structure, the p-type layer having a surface that faces the sidewall of the active QW structure, the p-type layer terminating at and contacting the planar growth surface,
the surface of the p-type layer and the sidewall of the active QW structure being arranged such that, during operation of the LED structure, holes are injected from the p-type layer into the active QW structure through the surface of the p-type layer and into the active QW structure through the sidewall of the active QW structure in a direction parallel to the planar growth surface.
9. The method of claim 8 , further comprising:
forming a hole-blocking layer between the active QW structure and the semiconductor template for preventing migration of the holes from the active QW structure to the semiconductor template.
10. The LED structure of claim 1 , wherein the semiconductor template is n-doped.
11. The LED structure of claim 10 , wherein the p-type layer is in direct contact with the planar growth surface.