Integrated circuit device with protective antenna diodes integrated therein
An integrated circuit device includes a semiconductor substrate having components of a peripheral circuit structure formed in and on a surface of the semiconductor substrate. The peripheral circuit structure comprising a plurality of protective antenna diodes therein. A memory cell array structure is provided on at least a portion of the peripheral circuit structure. A charge accumulating conductive plate is provided, which extends between the peripheral circuit structure and the memory cell array structure. The conductive plate is electrically connected to current carrying terminals of the antenna diodes within the peripheral circuit structure. The conductive plate may have a generally rectangular planar shape with four corners, and the antenna diodes may be arranged into four groups, which extend between respective corners of the conductive plate and the semiconductor substrate.
1. An integrated circuit device, comprising:
a lower substrate;
a peripheral circuit structure comprising a plurality of antenna diodes formed in the lower substrate;
a conductive plate comprising a tile region having a rectangular shape with four vertices and an edge region surrounding the tile region, the conductive plate covering the peripheral circuit structure;
a cell array structure overlapping the peripheral circuit structure with the tile region of the conductive plate therebetween in a vertical direction; and
a plurality of bypass wiring structures connected between the plurality of antenna diodes and the conductive plate,
wherein the plurality of antenna diodes are under portions of the edge region of the conductive plate, which are respectively adjacent to four vertex portions of the tile region of the conductive plate.
2. The integrated circuit device of claim 1 , wherein each of the plurality of bypass wiring structures comprises a bypass via contact having an upper surface in contact with a lower surface of the conductive plate and a lower surface in contact with the antenna diode.
3. The integrated circuit device of claim 1 , wherein each of the bypass wiring structures comprises:
a bypass via contact having an upper surface in contact with a lower surface of the conductive plate and a lower surface apart from the antenna diode in the vertical direction, and
a middle wiring structure connected between the lower surface of the bypass via contact and the antenna diode.
4. The integrated circuit device of claim 1 , wherein the conductive plate includes plate extension unit extending outward from the edge region, and wherein at least some of the plurality of antenna diodes are under the plate extension unit of the conductive plate.
5. The integrated circuit device of claim 4 , wherein the plate extension unit comprises four plate extension units respectively extending outward from four corners of the edge region.
6. The integrated circuit device of claim 1 , wherein the cell array structure comprises a memory stack, the memory stack comprising a plurality of gate lines stacked on the conductive plate in the vertical direction, a plurality of channel structures passing through the plurality of gate lines in the vertical direction, and a plurality of bit lines on the plurality of channel structures,
the integrated circuit device further comprising a plate contact configured to electrically connect a wiring pattern located at the same vertical level as the plurality of bit lines to the conductive plate, the plate contact having a lower surface in contact with the conductive plate.
7. An integrated circuit device, comprising:
a lower substrate;
a peripheral circuit structure formed in the lower substrate, the peripheral circuit structure comprising a plurality of antenna diodes and a peripheral circuit in a diode region;
a conductive plate comprising a tile region having a rectangular planar shape and an edge region extending along an edge of the tile region and surrounding the tile region, the conductive plate covering the peripheral circuit structure;
a cell array structure overlapping the peripheral circuit structure with the tile region of the conductive plate therebetween in a vertical direction, the cell array structure comprising a memory stack, the memory stack comprising a plurality of gate lines stacked in the vertical direction, a plurality of channel structures passing through the plurality of gate lines in the vertical direction, and a plurality of bit lines on the plurality of channel structures; and
a plurality of bypass wiring structures connected between the plurality of antenna diodes and the conductive plate,
wherein the plurality of antenna diodes are respectively under portions of the edge region of the conductive plate, which are respectively adjacent to four vertex portions of the tile region of the conductive plate.
8. The integrated circuit device of claim 7 , wherein the diode region has an L planar shape.
9. The integrated circuit of claim 7 , wherein an active region of the lower substrate comprises a first conductive type ion implantation region, and the antenna diode comprises a diode ion implantation region comprising a second conductive type ion implantation region having a different conductive type from the first conductive type ion implantation region.
10. The integrated circuit device of claim 9 , wherein each of the plurality of bypass wiring structures comprises a bypass via contact having an upper surface in contact with a lower surface of the conductive plate and a lower surface in contact with the diode ion implantation region.
11. The integrated circuit of claim 9 , wherein each of the bypass wiring structures comprises:
a bypass via contact having an upper surface in contact with a lower surface of the conductive plate and a lower surface apart from the antenna diode in the vertical direction, and
a middle wiring structure connected between a lower surface of the bypass via contact and the diode ion implantation region, the middle wiring structure having a multilayered wiring structure.
12. An integrated circuit device, comprising:
a semiconductor substrate having components of a peripheral circuit structure formed in and on a surface of the semiconductor substrate, said peripheral circuit structure comprising a plurality of antenna diodes therein;
a memory cell array structure on at least a portion of the peripheral circuit structure; and
a conductive plate extending between the peripheral circuit structure and the memory cell array structure, said conductive plate electrically connected to current carrying terminals of the antenna diodes within the peripheral circuit structure; and
wherein the conductive plate has a generally rectangular planar shape with four corners; and wherein the antenna diodes are arranged into four groups that extend between respective corners of the conductive plate and the semiconductor substrate.
13. The device of claim 12 , further comprising bypass wiring structures, which electrically connect the current carrying terminals of the antenna diodes to the conductive plate.
14. The device of claim 12 , wherein the memory cell array structure extends on a first portion of the conductive plate, which is surrounded by a second portion of the conductive plate; and wherein the antenna diodes extend between the second portion of the conductive plate and the semiconductor substrate.
15. The device of claim 12 , further comprising:
a bit line on the memory cell array; and
an electrically conductive through-hole via extending through an opening in the conductive plate, and electrically connecting the bit line to a portion of the peripheral circuit structure.
16. The device of claim 12 , wherein the conductive plate comprises a stacked plurality of layers of electrically conductive materials, which are different from each other.
17. The device of claim 12 , wherein the memory cell array structure has a word line cut region therein, which extends at least partially through the memory cell structure to a surface of the conductive plate.
18. The device of claim 12 , wherein the plurality of antenna diodes are arranged into first through fourth arrays of antenna diodes having respective first through fourth pluralities of anode terminals that contact respective first through fourth portions of the conductive plate, which are located adjacent first through fourth corners of the conductive plate when viewed from a plan perspective.