IP Library › Granted Patent US 11,923,458
Granted Patent B2
US 11,923,458 · App. 17/336,534 · Granted Mar 5, 2024

FeFET with double gate structure

Inventors: Takashi Ando (Eastchester, NY); Guy M. Cohen (Ossining, NY); Nanbo Gong (White Plains, NY)
Assignee: International Business Machines Corporation
H01L29/7855H01L29/6684H01L29/66484H01L29/66795H01L29/78391
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,923,458
App. No.
17/336,534
Granted
Mar 5, 2024
Kind
B2
Abstract

An approach for representing both positive and negative weights in neuromorphic computing is disclosed. The approach leverages a double gate FeFET (ferroelectric field effect transistor) device. The device leverages a double-gate FeFET with four terminals (two separate gates and source and drain) and ferroelectric gate dielectric. The device may have a junction-less channel. A synaptic weight is programmed by biasing one of the two gates. The store weight is sensed via a current flow from source to drain. A pre-defined bias is applied to the other gate during the sensing, such that a reference current is subtracted from the drain current. The net current for sensing is current from the synaptic devices subtracted by the pre-defined reference current.

Claims (15)

1. A device for computing, the device comprising:

one or more gate stacks are disposed on a fin semiconductor device;

a first gate stack of the one or more gate stacks comprises of a first ferroelectric layer and first interfacial layer, respectively;

a second gate stack of the one or more gate stacks comprises of a second ferroelectric layer and second interfacial layer, respectively and wherein the second ferroelectric layer contains a higher concentration of defects than the first ferroelectric layer which contributes to a leakage current, wherein the leakage current flows from the first gate stack towards the second gate stack;

the first gate stack of the one or more gate stacks contains a first gate and the second gate stack of the one or more gate stacks contains a second gate;

a fin is disposed between the second interfacial layer and the first interfacial layer, wherein the fin consists of a junction-less channel and the fin consists of one or more depletion layers; and

a source terminal and a drain terminal formed on either ends of the fin, wherein a drain current flows from the source terminal towards the drain terminal.

2. The device of claim 1 , wherein the semiconductor device comprises of nanosheet, planar and FET structures.

3. The device of claim 1 , wherein the defects consists of oxygen vacancies.

4. The device of claim 1 , wherein the first ferroelectric layer act as a dielectric for the first gate.

5. The device of claim 1 , wherein the second ferroelectric layer act as a dielectric for the second gate.

6. The device of claim 1 , wherein the first interfacial layer has a different thickness than the second interfacial layer by 0.5 nm to 1.0 nm.

7. The device of claim 1 , wherein one or more channels is doped with either n-type or p-type and wherein concentration of doping is 1E19 cm −3 or higher.

8. The device of claim 1 , wherein thickness of the first ferroelectric layer and the second ferroelectric layer is between 2 to 10 nm.

9. The device of claim 6 , wherein the first and second interfacial layers, respectively, has a thickness range between 0.5 nm to 1.5 nm and is composed of SiO 2 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 2, 2021
From: ANDO, TAKASHI; COHEN, GUY M.; GONG, NANBO
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 056412/0490 →
Continuity (1)
Related Publication 20220393031A1 · Dec 8, 2022