Granted Patent
B2
US 12,327,984 · App. 17/343,587 · Granted Jun 10, 2025
Low voltage laser diodes on {20-21} gallium and nitrogen containing surfaces
Inventors:
James W. Raring (Santa Barbara, CA); Mathew Schmidt (Goleta, CA); Christiane Poblenz (Goleta, CA)
Assignee:
KYOCERA SLD Laser, Inc.
H01S5/34333B82Y20/00H01L21/02389H01L21/02433H01L21/0254H01S5/2009H01S5/227H01S5/3202H01S5/320275H01S5/3407B28D5/0011H01L21/467H01S5/0014H01S5/0202H01S5/028H01S5/32025H01S5/3213H01S5/4025
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Abstract
A low voltage laser device having an active region configured for one or more selected wavelengths of light emissions.
Claims (53)
1. A system comprising:
a laser diode device;
a package configured to enclose the laser diode device, wherein
the laser diode device is configured for an application and the laser diode device comprises:
a gallium and nitrogen containing material including a {20-21} crystalline surface region orientation;
an n-type cladding material overlying the gallium and nitrogen containing material;
an active region comprising at least two quantum wells and a plurality of barrier layers, each of the quantum wells having a thickness of 1 nm and greater, and each of the plurality of barrier layers having a thickness ranging from 1 nm to less than 3 nm, each adjacent pair of the quantum wells separated by one of the plurality of barrier layers;
a p-type cladding material overlying the active region, at least one of the n-type cladding material or the p-type cladding material being substantially free from AlGaN;
a p-type material overlying the p-type cladding material;
a laser stripe region overlying the crystalline surface region, the laser stripe region being aligned substantially in a projection of the c-direction, the laser stripe region comprising a first end and a second end;
a first facet formed on the first end; and
a second facet formed on the second end.
2. The system of claim 1 wherein the active region comprises at least six quantum-well regions.
3. The system of claim 1 wherein the application is selected from a display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.
4. The system of claim 1 wherein the plurality of barrier layers is at least about 2.5 nm in thickness.
5. The system of claim 1 wherein each of the plurality of barrier layers is at least about 1.5 nm to about 2.5 nm in thickness.
6. The system of claim 1 wherein the {20-21} crystalline surface region is off-cut less than less than +/−10 deg towards a c-plane and/or an a-plane.
7. The system of claim 1 wherein one or more of the plurality of barrier layers is made of a material selected from GaN, InGaN, AlGaN, or InAlGaN.
8. The system of claim 1 wherein each of the quantum wells comprises at least InGaN.
9. The system of claim 1 wherein each of the plurality of barrier layers is substantially free from a dopant species.
10. A system comprising:
a laser diode device;
a package configured to enclose the laser diode device, wherein
the laser diode device is configured for an application and the laser diode device comprises:
a gallium and nitrogen containing material including a {20-21} crystalline surface region orientation;
an n-type cladding material overlying the gallium and nitrogen containing material, the n-type cladding material being substantially free from an aluminum bearing material;
an active region comprising a plurality of quantum wells, and a plurality of barrier layers, each of the quantum wells having a thickness of 1 nm and greater, and each of the plurality of barrier layers having a p-type characteristic and a thickness ranging from 1 nm to less than 3 nm, each adjacent pair of the quantum wells separated by one of the plurality of barrier layers;
a p-type cladding material overlying the active region, the p-type cladding material being substantially free from AlGaN;
a p-type material overlying the p-type cladding material;
a laser stripe region overlying the crystalline surface region, the laser stripe region being aligned substantially in a projection of the c-direction, the laser stripe region comprising a first end and a second end;
a first facet formed on the first end; and
a second facet formed on the second end.
11. The system of claim 10 wherein the application is selected from a display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application.
12. The system of claim 10 wherein the active region is configured operably for a forward voltage of less than 7V for an output power of 60 mW and greater.
13. The system of claim 10 wherein each of the plurality of barrier layers is at least about 2.5 nm in thickness.
14. The system of claim 10 wherein each of the plurality of barrier layers is at least about 1.5 nm to about 2.5 nm in thickness.
15. The system of claim 10 wherein the {20-21} crystalline surface region is off-cut less than less than +/−8 deg towards a c-plane and/or an a-plane.
16. The system of claim 10 further comprising an electron blocking region between the active region and the p-type cladding material.
17. The system of claim 10 wherein one or more of the plurality of barrier layers is made of a material selected from GaN, InGaN, AlGaN, or InAlGaN.
18. The system of claim 10 wherein each of the quantum wells comprises at least InGaN.
19. The system of claim 10 wherein the p-type impurity characteristic comprising a magnesium species.
20. A system comprising:
a laser diode device;
a package configured to enclose the laser diode device, wherein
the laser diode device is configured for an application, the application is selected from a display application, a metrology application, a communications application, a health care application, a surgery application, and an information technology application, the laser diode device comprising:
a gallium and nitrogen containing material including a {20-21} crystalline surface region orientation;
an n-type cladding material overlying the gallium and nitrogen containing material
an active region comprising a plurality of quantum wells and a plurality of barrier layers, each of the quantum wells having a thickness of 1 nm and greater, and each barrier layer of the plurality of barrier layers having a thickness ranging from 1 nm to 3 nm, each adjacent pair of the quantum wells separated by one of the plurality of barrier layers;
a p-type cladding material overlying the active region, at least one of the n-type cladding material or the p-type cladding material being substantially free from AlGaN;
a p-type material overlying the p-type cladding material;
a laser stripe region overlying the crystalline surface region, the laser stripe region being aligned substantially in a projection of the c-direction, the laser stripe region comprising a first end and a second end;
a first facet formed on the first end; and
a second facet formed on the second end, wherein the active region is configured operably for a forward voltage of less than 7V for an output power of 60 mW and greater.
Continuity (9)
Provisional Application
61249568
· Oct 7, 2009
Provisional Application
61243502
· Sep 17, 2009
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