Laminate sheet and method of use thereof
There is provided a laminated sheet with which the electrical inspection of a redistribution layer formed later can be efficiently performed, while the laminated sheet is in the form of a sheet useful for the formation of a redistribution layer. This laminated sheet includes a carrier with a release function; a first electrically conductive film provided on the carrier with the release function; an insulating film provided on the first electrically conductive film; and a second electrically conductive film provided on the insulating film. The second electrically conductive film is used for formation of a redistribution layer, and the first electrically conductive film, the insulating film, and the second electrically conductive film function as a capacitor for performing electrical inspection of the redistribution layer.
1. A laminated sheet comprising:
a carrier with a release function;
a first electrically conductive film provided on the carrier with the release function;
an insulating film provided on the first electrically conductive film; and
a second electrically conductive film provided on the insulating film, wherein the second electrically conductive film is used for formation of a redistribution layer, and the first electrically conductive film, the insulating film, and the second electrically conductive film function as a capacitor for performing electrical inspection of the redistribution layer.
2. The laminated sheet according to claim 1 , wherein the carrier with the release function comprises a carrier and a release function film provided on the first electrically conductive film side of the carrier and allowing release of the carrier from the first electrically conductive film.
3. The laminated sheet according to claim 1 , wherein the first electrically conductive film is a metal film or an electrically conductive polymer film.
4. The laminated sheet according to claim 3 , wherein the first electrically conductive film is a metal film comprising at least one metal selected from the group consisting of Al, Ag, Cu, Ni, Ti, Ta, Fe, Co, Mo, Mg, Mn, Zn, Cr, In, and Sn.
5. The laminated sheet according to claim 3 , wherein the first electrically conductive film is an electrically conductive polymer film comprising at least one selected from the group consisting of a polythiophene-based polymer, a polyacetylene-based polymer, a polyaniline-based polymer, and a polypyrrole-based polymer.
6. The laminated sheet according to claim 1 , wherein the first electrically conductive film has a thickness of 5 nm or more and 1000 nm or less.
7. The laminated sheet according to claim 1 , wherein the second electrically conductive film is a seed layer for forming the redistribution layer.
8. The laminated sheet according to claim 1 , wherein the second electrically conductive film is a metal film.
9. The laminated sheet according to claim 1 , wherein the second electrically conductive film is a metal film comprising at least one metal selected from the group consisting of Al, Ag, Cu, Ni, Ti, Ta, Fe, Co, Mo, Mg, Mn, Zn, Cr, In, and Sn.
10. The laminated sheet according to claim 1 , wherein the second electrically conductive film has a thickness of 10 nm or more and 1000 nm or less.
11. The laminated sheet according to claim 1 , wherein the insulating film has a dielectric constant of 2 or more at a frequency of 1 MHz.
12. The laminated sheet according to claim 1 , wherein the insulating film has a thickness of 0.1 μm or more and 10 μm or less.
13. The laminated sheet according to claim 1 , wherein the insulating film has a withstand voltage strength of 1.0×10 4 V/cm or more.
14. The laminated sheet according to claim 1 , wherein the insulating film is at least one selected from the group consisting of an oxide film, a nitride film, a carbide film, a fluoride film, an epoxy resin film, a polyimide resin film, an ethylene resin film, a phenolic resin film, a PPT resin film, an ABS resin film, a nylon resin film, and a PBT resin film.
15. The laminated sheet according to claim 1 , wherein each of the first electrically conductive film and the second electrically conductive film is composed of at least one metal selected from the group consisting of Al, Ag, Cu, Ni, Ti, Ta, Fe, Co, Mo, Mg, Mn, Zn, Cr, In, and Sn, and the insulating film is at least one selected from the group consisting of an oxide film, a nitride film, an epoxy resin film, and a polyimide resin film.