Image sensor and electronic equipment
View Patent ↗The present disclosure provides an image sensor and electronic equipment. The image sensor includes: a pixel array, comprising a plurality of pixels, wherein a light-transmitting part is disposed between adjacent pixels; a protective layer, covering at least a part of a surface of the pixel; a conversion layer, configured to convert X-ray into visible light; wherein when X-ray is incident from a side of the image sensor, a portion of the X-ray is incident on the protective layer, another portion of X-ray transmits through the light-transmitting part between the pixels, reaches the conversion layer, and is converted into visible light by the conversion layer and received by the pixel. With the above solution, the pixels can be protected from the damage of X-ray high-energy photons while improving the resolution of the captured X-ray image.
1. An image sensor, comprising:
a pixel array, comprising a plurality of pixels, wherein a light-transmitting part is disposed between adjacent pixels;
a protective layer, covering at least a part of a surface of the pixel and facing an incident direction of an X-ray; and
a conversion layer, configured to convert the X-ray into visible light;
wherein when the X-ray is incident from a side of the image sensor, a portion of the X-ray is incident on the protective layer, and another portion of X-ray transmits through a light-transmitting part between the pixels, reaches the conversion layer, and is converted into visible light by the conversion layer and received by the pixel.
2. The image sensor according to claim 1 , wherein the protective layer only covers a top surface of each pixel in the pixel array; or the protective layer covers the top surface and sidewalls of each pixel in the pixel array.
3. The image sensor according to claim 2 , wherein the X-ray reaching the conversion layer is converted into visible light and received by a bottom surface of the pixel, and the bottom surface is opposite to the top surface of the pixel.
4. The image sensor according to claim 1 , wherein the protective layer is made from a material configured to block the X-ray.
5. The image sensor according to claim 1 , wherein the conversion layer is disposed on a side of the protective layer and the pixel array away from the incident direction of the X-ray.
6. The image sensor according to claim 1 , further comprising: a substrate, wherein the substrate is disposed on the protective layer and configured to receive and transmit the X-ray.
7. The image sensor according to claim 6 , wherein the substrate is made from a material configured to transmit the X-ray.
8. The image sensor according to claim 6 , wherein the substrate is made from glass or a soft material.
9. The image sensor according to claim 1 , wherein the conversion layer is made from a fluorescent material.
10. The image sensor according to claim 1 , further comprising: a reflective layer disposed on a side of the conversion layer away from the pixel array.
11. An electronic equipment, comprising the image sensor according to claim 1 .
12. The image sensor according to claim 1 , wherein a photosensitive side of the pixel array is disposed opposite to the incident direction of the X-ray, and the conversion layer is proximate to the photosensitive side of the pixel array.