IP Library Granted Patent US 11,933,939
Granted Patent B2
US 11,933,939 · App. 17/357,076 · Granted Mar 19, 2024

Metalens with artificial focus pattern

Inventors: Ya Sha Yi (Troy, MI); Mao Ye (Dearborn, MI)
Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
G02B1/002G02B27/42G02B2207/101
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Quick Facts
Patent No.
US 11,933,939
App. No.
17/357,076
Granted
Mar 19, 2024
Kind
B2
Abstract

A metalens configured to shape the focus light into a flexibly designed pattern. The present teachings demonstrate the engineering of metalens with artificial focus pattern by creating line and ring-shaped focus as ‘drawing tools’. These metalens are fabricated through a single layer of silicon-based material through CMOS compatible nano fabrication process. The mechanism to generate artificial focus pattern can be applied to a plethora of future on-chip optical devices with applications ranging from beam engineering to next generation nano lithography.

Claims (95)

1. An on-chip optical metalens transmitting light, the metalens comprising:

a metasurface configured to focus light as a multi-point focused design pattern, wherein the multi-point design pattern is created using line- and ring-shaped focus patterns, the metasurface having a plurality of phase shifters configured according to the following phase profile equation:

Φ

(

x

,

y

)

-

Φ

(

0

,

0

)

=

2

π

λ

(

(

x

+

a

(

y

)

)

2

+

f

2

-

f

)

where x and y are space coordinate, λ is incident wavelength, f is focal length, and a(y) is a function of the coordinate y thereby defining the multi-point focused design pattern as a non-point pattern, the metasurface being made of a single layer of silicon-based material.

2. The metalens according to claim 1 wherein the metasurface comprises a continuous phase profile.

3. The metalens according to claim 1 wherein the plurality of phase shifters comprises a plurality of nano cylinders.

4. The metalens according to claim 1 wherein the plurality of phase shifters comprises a grating-based surface.

5. The metalens according to claim 1 wherein the multi-point focused design pattern comprises a homogeneous focused intensity.

6. The metalens according to claim 5 wherein the homogeneous focused intensity is based on a space-variant focal length modifier.

7. The metalens according to claim 1 wherein the plurality of phase shifters comprises a varying periodicity.

8. A metalens transmitting light to a multi-point design pattern, the metalens comprising:

an integrated planar structure configured to focus light into a multi-point focused design pattern, wherein the multi-point design pattern is created using a plurality of phase shifters configured according to the following phase profile equation:

Φ

(

x

,

y

)

-

Φ

(

0

,

0

)

=

2

π

λ

(

(

x

+

a

(

y

)

)

2

+

f

2

-

f

)

where x and y are space coordinate, λ is incident wavelength, f is focal length, and a(y) is a function of the coordinate y thereby defining the multi-point focused design pattern as a non-point pattern.

9. The metalens according to claim 8 wherein the integrated planar structure comprises a single layer of silicon-based material.

10. The metalens according to claim 8 wherein the metasurface comprises a continuous phase profile.

11. The metalens according to claim 8 wherein the plurality of phase shifters comprises a plurality of nano cylinders.

12. The metalens according to claim 8 wherein the plurality of phase shifters comprises a grating-based surface.

13. The metalens according to claim 8 wherein the multi-point focused design pattern comprises a homogeneous focused intensity.

14. The metalens according to claim 13 wherein the homogeneous focused intensity is based on a space-variant focal length modifier.

15. The metalens according to claim 8 wherein the plurality of phase shifters comprises a varying periodicity.

Assignments (2)
CONFIRMATORY LICENSE Recorded Apr 9, 2025
From: UNIVERSITY OF MICHIGAN
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 070792/0623 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 11, 2021
From: YI, YA SHA, MR.; YE, MAO, MR.
To: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
Reel/Frame 057753/0275 →
Continuity (2)
Provisional Application 63043413 · Jun 24, 2020
Related Publication 20210405257A1 · Dec 30, 2021