IP Library › Granted Patent US 11,754,765
Granted Patent B2
US 11,754,765 · App. 17/359,923 · Granted Sep 12, 2023

Polarizer nanoimprint lithography

Inventors: Bradley R. Williams (Pocatello, ID); R. Stewart Nielson (Pleasant Grove, UT); Anubhav Diwan (Provo, UT); Eric Gardner (Eagle Mountain, UT); Shaun Patrick Ogden (Saratoga Springs, UT); Bob West (Orem, UT)
Assignee: Moxtek, Inc.
G02B5/3041B29D11/0073B29D11/00644G02B5/3058G03F7/0002G03F7/70566B82Y40/00
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Quick Facts
Patent No.
US 11,754,765
App. No.
17/359,923
Granted
Sep 12, 2023
Kind
B2
Abstract

A method of making a polarizer can include applying a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, then forming this into a different phase including a solid, interconnecting network of the inorganic nanoparticles. This method can improve manufacturability and reducing manufacturing cost. This method can be used to provide an antireflective coating, to provide a protective coating on polarization structures, to provide thin films for optical properties, or to form the polarization structures themselves.

Claims (35)

1. A method of making a polarizer, the method comprising:

providing polarization structures located on a substrate, the polarization structures arranged in a pattern for polarization of light;

applying an uncured fill layer on top of the polarization structures and extending into channels between the polarization structures, the uncured fill layer being a solution including molecules in a solvent, the solvent including water and an organic liquid, the molecules including metal atoms bonded to reactive groups, where each reactive-group is independently —Cl, —OR 1 , —OCOR 1 , or —N(R 1 ) 2 , and R 1 is an alkyl group;

chemistry of the uncured fill layer and chemistry of a surface of the polarization structures are attractive to each other; and

reacting the molecules to form a solid of the metal atoms interconnected with each other, defining a cured fill layer.

2. The method of claim 1 , wherein the substrate is a first substrate, the method further comprising placing a second substrate onto the uncured fill layer before forming the uncured fill layer into the cured fill layer.

3. The method of claim 1 , wherein the cured fill layer has an index of refraction of ≤1.3.

4. The method of claim 1 , wherein ≥99% of the solid inorganic nanoparticles in the uncured fill layer have a diameter of ≤2 nm.

5. A method of making a polarizer, the method comprising:

providing polarization structures located on a substrate, the polarization structures arranged in a pattern for polarization of light;

applying an uncured fill layer on top of the polarization structures and extending into channels between the polarization structures, the uncured fill layer being a colloidal suspension including a dispersed phase and a continuous phase;

surface energy of a surface of the polarization structures is greater than a surface tension of the uncured fill layer; and

curing the uncured fill layer by removing the continuous phase to form a solid, defining a cured fill layer.

6. The method of claim 5 , wherein the surface energy is five times greater than the surface tension of the uncured fill layer.

7. The method of claim 5 , wherein the substrate is a first substrate, the method further comprising placing a second substrate onto the uncured fill layer before forming the uncured fill layer into the cured fill layer.

8. The method of claim 5 , wherein the cured fill layer has an index of refraction of ≤1.3.

9. A method of making a polarizer, the method comprising:

providing polarization structures located on a substrate, the polarization structures arranged in a pattern for polarization of light;

applying an uncured fill layer on top of the polarization structures and extending into channels between the polarization structures, the uncured fill layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase; and

curing the uncured fill layer to form a cured fill layer, the cured fill layer including a solid, interconnecting network of the inorganic nanoparticles.

10. The method of claim 9 , wherein the substrate is a first substrate, the method further comprising placing a second substrate onto the uncured fill layer before forming the uncured fill layer into the cured fill layer.

11. The method of claim 9 , wherein applying the uncured fill layer and curing the uncured fill layer into the cured fill layer includes the following steps in the following order:

spin coating part of the uncured fill layer onto the polarization device, defining a first spin coat;

baking the polarizer, defining a first bake;

spin coating part of the uncured fill layer onto the polarization device, defining a second spin coat; then

baking the polarizer, defining a second bake.

12. The method of claim 11 , wherein the first spin coat is performed at a speed of ≥1000 rpm and ≤4000 rpm, the first bake is performed at a temperature of ≥50° C. and ≤300° C., the second spin coat is performed at a speed of ≥1000 rpm and ≤4000 rpm, and the second bake is performed at a temperature of ≥50° C. and ≤300° C.

13. The method of claim 9 , wherein the cured fill layer has an index of refraction of ≤1.3.

14. The method of claim 9 , wherein chemistry of the uncured fill layer and chemistry of a surface of the polarization structures are attractive to each other.

15. The method of claim 9 , wherein surface energy of a surface of the polarization structures is greater than a surface tension of the uncured fill layer.

16. The method of claim 9 , wherein the uncured fill layer fills ≥90% of the channels.

17. The method of claim 9 , wherein ≥99% of the solid inorganic nanoparticles in the uncured fill layer have a diameter of ≤2 nm.

18. The method of claim 9 , wherein forming the uncured fill layer into the cured fill layer occurs at a temperature of ≤250° C.

19. The method of claim 9 , wherein the inorganic nanoparticles comprise aluminum oxide.

20. The method of claim 9 , further comprising, before forming the uncured fill layer into the cured fill layer, imprinting a pattern of structures in the uncured fill layer, the structures sized and shaped to reduce reflection of incident light, to increase heat transfer away from the polarizer, or both.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 28, 2021
From: WILLIAMS, BRADLEY R.; NIELSON, R. STEWART; DIWAN, ANUBHAV; GARDNER, ERIC; OGDEN, SHAUN PATRICK; WEST, BOB
To: MOXTEK, INC.
Reel/Frame 056685/0445 →
Continuity (3)
Continuation 16366932 · Mar 27, 2019
Provisional Application 62656759 · Apr 12, 2018
Related Publication 20210325589A1 · Oct 21, 2021
Cited By (1)
US 12,189,161