Optical heating device
An optical heating device for heating a substrate includes: a chamber for accommodating the substrate; a support member for supporting the substrate in the chamber; a flash lamp disposed to face a first main surface of the substrate supported by the support member; a plurality of LED elements for emitting light from outside a flash light irradiation space that is sandwiched between the substrate supported by the support member and the flash lamp, the light traveling toward the first main surface of the substrate or a second main surface of the substrate that is the opposite side of the first main surface; and a light blocking member disposed between the flash lamp and a plurality of the LED elements in a separating direction, and outside the flash light irradiation space, for blocking the light emitted from the flash lamp and traveling toward a plurality of the LED elements.
1. An optical heating device for heating a substrate, the optical heating device comprising:
a chamber for accommodating the substrate;
a support member for supporting the substrate in the chamber;
a flash lamp disposed to face a first main surface of the substrate supported by the support member;
a plurality of LED elements for emitting light from outside a flash light irradiation space that is sandwiched between the substrate supported by the support member and the flash lamp, the light traveling toward the first main surface of the substrate or a second main surface of the substrate that is the opposite side of the first main surface; and
a light blocking member disposed between the flash lamp and the plurality of the LED elements in a separating direction, and outside the flash light irradiation space, for blocking the light emitted from the flash lamp and traveling toward the plurality of the LED elements,
wherein the flash light irradiation space is free from the light blocking member for blocking the light emitted from the flash lamp and traveling toward the plurality of the LED elements, and
the light blocking member is a glass material with a dielectric multilayer film formed on its surface, and the dielectric multilayer film is configured to block light emitted from the flash lamp outside a wavelength range of +50 nm with respect to the main emission wavelength of the LED elements.
2. The optical heating device according to claim 1 , wherein the plurality of the LED elements are arranged to emit light toward the second main surface of the substrate, and the light blocking member is disposed between the substrate supported by the support member and the LED elements.
3. The optical heating device according to claim 1 , wherein the plurality of the LED elements are arranged to emit light toward the second main surface of the substrate, and the light blocking member is disposed to communicate the side surface of the substrate supported by the support member with the inner wall surface of the chamber.
4. The optical heating device according to claim 1 , further comprising an opening/closing controller for controlling the light blocking member to close before the flash lamp is lit,
wherein the plurality of the LED elements are arranged to emit light toward the second main surface of the substrate; and
the light blocking member is disposed between the substrate supported by the support member and the plurality of the LED elements, is a member that is openable and closable, and is configured to switch over between a state in which light is allowed to pass through and a state in which light is blocked by opening and closing the light blocking member.
5. The optical heating device according to claim 2 , further comprising an opening/closing controller for controlling the light blocking member to close before the flash lamp is lit,
wherein the plurality of the LED elements are arranged to emit light toward the second main surface of the substrate; and
the light blocking member is disposed between the substrate supported by the support member and the plurality of the LED elements, is a member that is openable and closable, and is configured to switch over between a state in which light is allowed to pass through and a state in which light is blocked by opening and closing the light blocking member.