Display apparatus and method of manufacturing the same
A display apparatus includes a first substrate including a polymer resin, a protective layer on the first substrate, the protective layer including at least one selected from SiOCH, SiOC, SiOF, aromatic amine, diazonium tetrafluoroborate, and an aromatic diazonium compound, and a buffer layer on the protective layer, the buffer layer including a material different from a material included in the protective layer.
1. A display apparatus comprising:
a first substrate including a polymer resin;
a protective layer disposed on the first substrate, the protective layer including at least one selected from SiOCH, SiOC, and SiOF; and
a buffer layer disposed on the protective layer, the buffer layer including a material different from a material included in the protective layer;
wherein the protective layer is directly on the first substrate and is in direct contact with the first substrate.
2. The display apparatus of claim 1 , wherein a ratio of Si—CH3 bonds compared to Si—C bonds and Si—O bonds in the protective layer is about 10%.
3. The display apparatus of claim 2 , wherein a density of the protective layer is about 2 g/cm 3 .
4. The display apparatus of claim 2 , wherein a roughness of the protective layer is about 4.4 nm.
5. The display apparatus of claim 1 , wherein the protective layer is deposited by a plasma-enhanced chemical vapor deposition (PECVD) method.
6. The display apparatus of claim 5 , wherein the protective layer is deposited by using radio frequency (RF) power of 60 W to 100 W.
7. The display apparatus of claim 1 , further comprising a first barrier layer, wherein the first barrier is disposed between the protective layer and the buffer layer.
8. The display apparatus of claim 7 , wherein the first barrier layer includes a material different from a material included in the protective layer.
9. The display apparatus of claim 7 , further comprising:
a second substrate disposed below the first substrate; and
a second barrier layer disposed between the first substrate and the second substrate.
10. The display apparatus of claim 1 , further comprising:
a thin film transistor disposed on the buffer layer; and
an organic light-emitting diode electrically connected to the thin film transistor.
11. The display apparatus of claim 10 , wherein the organic light-emitting diode includes a pixel electrode, an opposite electrode, and an emission layer disposed between the pixel electrode and the opposite electrode.
12. A method of manufacturing a display apparatus, the method comprising steps of:
preparing a first substrate including a polymer resin;
forming a protective layer on the first substrate, the protective layer including at least one selected from SiOCH, SiOC, and SiOF; and
forming a buffer layer on the protective layer, the buffer layer including a material different from a material included in the protective layer;
wherein, in forming of the protective layer on the first substrate, the protective layer is directly formed on the first substrate and is in direct contact with the first substrate.
13. The method of claim 12 , wherein, in forming of the protective layer on the first substrate, the protective layer is formed on the first substrate by a plasma-enhanced chemical vapor deposition (PECVD) method.
14. The method of claim 13 , wherein the protective layer is formed by using radio frequency (RF) power of 60 W to 100 W.
15. The method of claim 12 , wherein a ratio of Si—CH3 bonds compared to Si—C bonds and Si—O bonds in the protective layer is about 10%.
16. The method of claim 12 , wherein a density of the protective layer is about 2 g/cm 3 .
17. The method of claim 12 , wherein a roughness of the protective layer is about 4.4 nm.
18. The method of claim 12 , further comprising a step of:
before forming of the buffer layer on the protective layer, forming a first barrier layer on the protective layer, wherein the first barrier layer includes a different material from a material included in the protective layer.