Doped SiC and SiOC compositions and Methods
Materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC. Doped SiOC and SiC materials for providing semiconductor properties to SiC wafers, including p- and n-type properties.
1. A filled silicon carbide composition comprising:
a. polymer derived SiC particles;
b. wherein the particles consist essentially of a ceramic having a filler bound into the ceramic;
c. wherein the filler is selected to provide a predetermined property to a silicon carbide wafer and wherein the filler comprises a dopant;
d. wherein the particles have less than 0.001% impurities; and
e. wherein the predetermined property is a p-type feature.
2. A filled silicon carbide composition comprising:
a. polymer derived SiC particles;
b. wherein the particles consist essentially of a ceramic having a filler bound into the ceramic;
c. wherein the filler is selected to provide a predetermined property to a silicon carbide wafer and wherein the filler comprises a dopant;
d, wherein the particles have less than 0.001% impurities; and
e. wherein the predetermined property is a n-type feature.
3. A filled polysilocarb composition comprising:
a. polymer derived SOC particles;
b. wherein the particles consist essentially of a ceramic having a filler bound into the ceramic;
c. wherein the filler is selected to provide a predetermined property to a silicon carbide wafer; and,
d. wherein the particles have less than 0.001% impurities.
4. The polysilocarb composition of claim 3 , wherein the filler comprises a dopant.
5. The polysilocarb composition of claim 4 , wherein the predetermined property is a band gap.
6. The polysilocarb composition of claim 4 , wherein the predetermined property is a semiconductor feature.
7. The polysilocarb composition of claim 4 , wherein the predetermined property is a p-type feature.
8. The polysilocarb composition of claim 4 , wherein the predetermined property is a n-type feature.
9. The polysilocarb composition of claim 3 , wherein the filler is a dopant.