Method of programming nonvolatile memory device including reversible resistance device

1. A method of programming a nonvolatile memory device, comprising:

providing a memory element including a plurality of memory cells, each of the plurality of memory cells including a reversible resistance device;

selecting a target memory cell from among the plurality of memory cells;

determining a target resistance state for the reversible resistance device of the target memory cell;

reading a resistance state of the reversible resistance device of the target memory cell;

comparing the read resistance state with the target resistance state; and

performing one of a positive program operation and a negative program operation for the reversible resistance device of the target memory cell when the read resistance state is different from the target resistance state,

wherein the positive program operation includes applying a program voltage having a positive polarity to the reversible resistance device of the target memory cell, and the negative program operation includes applying a program voltage having a negative polarity to the reversible resistance device of the target memory cell.

2. The method of claim 1 , further comprising terminating the positive program operation or the negative program operation for the reversible resistance device of the target memory cell when the read resistance state and the target resistance state are the same.

3. The method of claim 1 ,

wherein the positive program operation reduces a resistance of the reversible resistance device of the target memory cell when the read resistance state is higher than the target resistance state, and

wherein the positive program operation comprises a first writing step of applying a first positive program pulse voltage of a positive polarity to the reversible resistance device and a first verification step of applying a verification pulse voltage of a positive polarity to the reversible resistance device to verify the first writing step.

4. The method of claim 3 , wherein the positive program operation further comprises:

a second writing step of applying a second positive program pulse voltage of a positive polarity greater than the first program pulse voltage by a step voltage to the reversible resistance device when the first verification step determines that a resistance state of the reversible resistance device is higher than the target resistance state; and

a second verification step of applying the verification pulse voltage to the reversible resistance device to verify the second writing step.

5. The method of claim 3 , wherein the positive program operation is terminated when the first verification step determines that a resistance state of the reversible resistance device corresponds to the target resistance state.

6. The method of claim 3 , further comprising performing the negative program operation for the reversible resistance device when the first verification step determines that a resistance state of the reversible resistance device is lower than the target resistance state.

7. The method of claim 1 , wherein the negative program operation increases a resistance of the reversible resistance device of the target memory cell, when the read resistance state is lower than the target resistance state, and

wherein the negative program operation comprises a first writing step of applying a first negative program pulse voltage of a negative polarity to the reversible resistance device and a first verification step of applying a verification pulse voltage of a positive polarity to the reversible resistance device to verify the first writing step.

8. The method of claim 7 , wherein the negative program operation further comprises:

a second writing step of applying a second negative program pulse voltage of a negative polarity greater than the first negative program pulse voltage by a step voltage to the reversible resistance device when the first verification step determines that a resistance state of the reversible resistance device is lower than the target resistance state; and

a second verification step of applying the verification pulse voltage to the reversible resistance device to verify the second writing step.

9. The method of claim 7 , wherein the negative program operation is terminated when the first verification step determines that a resistance state of the reversible resistance device corresponds to the target resistance state.

10. The method of claim 7 , further comprising performing the positive program operation for the reversible resistance device when the first verification step determines that a resistance state of the reversible resistance device is higher than the target resistance state.

11. The method of claim 1 , wherein the positive program operation and the negative program operation change the resistance state of the reversible resistance device to the target resistance state, which is one of a plurality of resistance states at different levels.

12. The method of claim 1 , wherein the memory element comprises:

a substrate;

a channel layer extending in a direction perpendicular to an upper surface of the substrate;

a reversible resistance memory layer disposed to contact the channel layer; and

a plurality of gate electrode layers disposed adjacent to the channel layer and spaced apart from each other along the direction perpendicular to the upper surface of the substrate.

13. A method of programming a nonvolatile memory device, comprising:

providing a memory element including a plurality of memory cells connected in series along a channel layer extending in a direction perpendicular to an upper surface of a substrate, each of the plurality of memory cells including a reversible resistance memory layer and a gate electrode layer that are disposed adjacent to the channel layer;

selecting a target memory cell from among the plurality of memory cells and determining a target resistance state for the reversible resistance memory layer of the target memory cell;

reading a resistance state by measuring an operation current flowing through the reversible resistance memory layer of the target memory cell;

comparing the read resistance state with the target resistance state; and

performing one of a positive program operation and a negative program operation for the reversible resistance memory layer of the target memory cell to change the resistance state of the reversible resistance memory layer when the read resistance state is different from the target resistance state.

14. The method of claim 13 , wherein reading the resistance state of the reversible resistance memory layer comprises:

applying a pass voltage to gate electrode layers of non-target memory cells from among the plurality of memory cells to form conductive channels in portions of the channel layer of the non-target memory cells; and

applying a read voltage to upper and lower ends of the channel layer to measure an operation current flowing through the conductive channels of the non-target memory cells and the reversible resistance memory layer of the target memory cell.

15. The method of claim 13 , further comprising terminating the program operation for the reversible resistance memory layer of the target memory cell when the read resistance state and the target resistance state are the same.

16. The method of claim 13 , wherein the positive program operation of reducing a resistance of the reversible resistance memory layer of the target memory cell is performed when the read resistance state is higher than the target resistance state, and

wherein the positive program operation comprises a first writing step of applying a first positive program pulse voltage of a positive polarity to the reversible resistance memory layer, and a first verification step of applying a verification pulse voltage of a positive polarity to the reversible resistance memory layer to verify the first writing step.

17. The method of claim 16 , wherein the positive program operation further comprises a second writing step of applying a second positive program pulse voltage of a positive polarity greater than the first positive program pulse voltage by a step voltage to the reversible resistance memory layer when the first verification step determines that a resistance state of the reversible resistance memory layer is higher than the target resistance state, and a second verification step of applying the verification pulse voltage to the reversible resistance memory layer to verify the second writing step, and

wherein the negative program operation of increasing a resistance of the reversible resistance memory layer is performed when the first verification step determines that a resistance state of the reversible resistance memory layer is lower than the target resistance state.

18. The method of claim 13 , wherein the negative program operation of increasing a resistance of the reversible resistance memory layer of the target memory cell is performed when the read resistance state is lower than the target resistance state, and

wherein the negative program operation comprises a first writing step of applying a first negative program pulse voltage of a negative polarity to the reversible resistance memory layer and a first verification step of applying a verification pulse voltage of a positive polarity to the reversible resistance memory layer to verify the first writing step.

19. The method of claim 18 , wherein the negative program operation further comprises a second writing step of applying a second negative program pulse voltage of a negative polarity greater than the first negative program pulse voltage by a step voltage to the reversible resistance memory layer when the first verification step determines that a resistance state of the reversible resistance memory layer is lower than the target resistance state, and a second verification step of applying the verification pulse voltage to the reversible resistance memory layer to verify the second writing step, and

wherein the positive program operation of reducing a resistance of the reversible resistance memory layer is performed when the first verification step determines that a resistance of the reversible resistance memory layer is higher than the target resistance state.

20. The programming method of claim 13 , wherein performing the positive program operation for the reversible resistance memory layer of the target memory cell comprises:

applying a pass voltage to gate electrode layers of non-target memory cells from among the plurality of memory cells to form conductive channels in portions of the channel layer of the non-target memory cells; and

applying a write voltage having a positive polarity to upper and lower ends of the channel layer to change a resistance state of the reversible resistance memory layer of the target memory cell.

21. The programming method of claim 13 , wherein performing the negative program operation for the reversible resistance memory layer of the target memory cell comprises:

applying a pass voltage to gate electrode layers of non-target memory cells from among the plurality of memory cells to form conductive channels in the portions of the channel layer of the non-target memory cells; and

applying a write voltage having a negative polarity to upper and lower ends of the channel layer to change a resistance state of the reversible resistance memory layer of the target memory cell.