IP Library Granted Patent US 11,728,189
Granted Patent B2
US 11,728,189 · App. 17/373,408 · Granted Aug 15, 2023

Apparatus to control transfer parameters during transfer of semiconductor devices

Inventors: Justin Wendt (Post Falls, ID); Cody Peterson (Hayden Lake, ID); Andrew Huska (Liberty Lake, WA)
Assignee: Rohinni, Inc.
H01L21/67132H01L21/677H01L21/67144H01L21/6836H01L24/75H01L33/48H01L2221/68363H01L2221/68386H01L2224/75262H01L2224/75303H01L2224/75804H01L2224/75824Y10T29/53174
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Quick Facts
Patent No.
US 11,728,189
App. No.
17/373,408
Granted
Aug 15, 2023
Kind
B2
Abstract

An apparatus includes a transfer mechanism to transfer an electrically-actuatable element directly from a wafer tape to a transfer location on a circuit trace on a product substrate. The transfer mechanism includes one or more transfer wires. Two or more stabilizers disposed on either side of the one or more transfer wires. A needle actuator is connected to the one or more transfer wires and the two or more stabilizers to move the one or more transfer wires and the two or more stabilizers to a die transfer position.

Claims (24)

1. An apparatus comprising:

a transfer mechanism to transfer an electrically-actuatable element directly from a wafer tape to a transfer location on a circuit trace on a product substrate, the transfer mechanism including:

one or more transfer wires,

a needle actuator disposed adjacent a first side of the wafer tape and configured to move the one or more transfer wires toward and away from the transfer location,

a vacuum unit disposed adjacent the first side of the wafer tape, the vacuum unit being configured to engage during at least a portion of the transfer of the electrically-actuatable element,

a first frame configured to hold the wafer tape, and

a second frame configured to secure the product substrate such that the circuit trace is disposed facing the electrically-actuatable element disposed on the first side of the wafer tape, and such that at least one transfer wire of the one or more transfer wires is disposed adjacent a second side of the wafer tape opposite the first side, a length of the at least one transfer wire extending in a direction toward the wafer tape,

wherein the vacuum unit is disposed adjacent the second side of the wafer tape surrounding the one or more transfer wires, the vacuum unit being configured to engage during at least a portion of the direct transfer of the electrically-actuatable element, and

wherein the needle actuator is configured to actuate the at least one transfer wire into a die transfer position at which the at least one transfer wire presses on the second side of the wafer tape to press the electrically-actuatable element into contact with the circuit trace of the product substrate.

2. The apparatus according to claim 1 , further comprising two or more stabilizers disposed adjacent the second side of the wafer tape, a length of the two or more stabilizers extending in a direction toward the wafer tape.

3. The apparatus according to claim 2 , wherein the needle actuator is further configured to actuate the two or more stabilizers into the die transfer position along with the at least one transfer wire.

4. The apparatus according to claim 1 , wherein the vacuum unit is engaged based at least in part on a size of the electrically-actuatable element.

5. The apparatus according to claim 1 , wherein the vacuum unit is engaged until the wafer tape ceases to oscillate after the electrically-actuatable element is released.

6. The apparatus according to claim 1 , further comprising two or more stabilizers, at least one of the two or more stabilizers disposed on each side of the one or more transfer wires.

7. The apparatus according to claim 6 , wherein the needle actuator is configured to actuate the one or more transfer wires and the two or more stabilizers independently and simultaneously in a first direction, the first direction being toward the transfer location.

8. The apparatus according to claim 7 , wherein the needle actuator is configured to actuate the one or more transfer wires and the two or more stabilizers sequentially in the first direction and a second direction, the second direction being away from the transfer location.

9. The apparatus according to claim 6 , wherein the needle actuator is configured to actuate the two or more stabilizers to hold the electrically-actuatable element in a substantially fixed position.

10. The apparatus according to claim 6 , wherein the needle actuator includes:

an electromechanical actuator, and

one or more return springs.

11. The apparatus according to claim 6 , wherein the transfer wires are sized to accommodate transferring a micro-sized LED as the electrically-actuatable element, and

wherein a height of the micro-sized LED ranges between 12.5 microns and 200 microns, between 25 microns and 100 microns, or between 50 microns to 80 microns.

12. The apparatus according to claim 6 , wherein the vacuum unit is engaged based at least in part on a size of the electrically-actuatable element.

13. The apparatus according to claim 6 , wherein the vacuum unit is engaged until the wafer tape ceases to oscillate after the electrically-actuatable element is released.

Assignments (4)
COURT ORDER Recorded May 15, 2024
From: ROHINNI, INC.
To: COWLES SEMI, LLC
Reel/Frame 067426/0706 →
LICENSE Recorded Jan 12, 2024
From: ROHINNI INC.
To: MAGNA ELECTRONICS, INC.
Reel/Frame 066286/0270 →
SECURITY INTEREST Recorded Jul 27, 2023
From: ROHINNI, INC.
To: COWLES COMPANY
Reel/Frame 064417/0238 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 12, 2021
From: WENDT, JUSTIN; PETERSON, CODY; HUSKA, ANDREW
To: ROHINNI, LLC
Reel/Frame 056891/0536 →
Continuity (2)
Division 16146833 · Sep 28, 2018
Related Publication 20210343558A1 · Nov 4, 2021