Self aligned multiple patterning
A method for forming a nanostructure on a substrate includes performing a first lithography-and-etch process, including patterning a mandrel layer disposed on a first dielectric layer, performing a spacer patterning process, including forming a spacer layer on sidewalls of the patterned mandrel layer, performing a first gap-filling process, including forming a gap-filling layer in openings of the spacer layer on the first dielectric layer and over the patterned mandrel layer, performing a second lithography-and-etch process, including patterning the gap-filling layer and further patterning the patterned mandrel layer, performing a second gap-filling process, including further forming the gap-filling layer in openings of the twice patterned mandrel layer, and performing a spacer removing process, including removing the patterned spacer layer and the twice patterned mandrel layer.
1. A method for forming a nanostructure on a substrate, the method comprising:
performing a first lithography-and-etch process, comprising patterning a mandrel layer disposed on a first dielectric layer;
performing a spacer patterning process, comprising forming a spacer layer on sidewalls of the patterned mandrel layer;
performing a first gap-filling process, comprising forming a gap-filling layer in openings of the spacer layer on the first dielectric layer and over the patterned mandrel layer;
performing a second lithography-and-etch process, comprising patterning the gap-filling layer and further patterning the patterned mandrel layer;
performing a second gap-filling process, comprising further forming the gap-filling layer in openings of the twice patterned mandrel layer; and
performing a spacer removing process, comprising removing the patterned spacer layer and the twice patterned mandrel layer.
2. The method of claim 1 , wherein the patterned mandrel layer has openings having a width of between 1 nm and 200 nm and a pitch of between 1 nm and 200 nm.
3. The method of claim 1 , wherein the mandrel layer comprises a carbon containing material.
4. The method of claim 1 , wherein the forming of the spacer layer on the sidewalls of the patterned mandrel layer in the spacer patterning process comprises:
conformally depositing the spacer layer in openings of the patterned mandrel layer on the first dielectric layer, top surfaces and the sidewalls of the patterned mandrel layer; and
etching the spacer layer such that only portions on the sidewalls of the patterned mandrel layer are left.
5. The method of claim 1 , wherein the spacer layer has a thickness of between 1 nm and 200 nm.
6. The method of claim 1 , wherein the patterned spacer layer has openings having a width of between 1 nm and 200 nm and a pitch of between 1 nm and 200 nm.
7. The method of claim 1 , wherein the spacer layer comprises a doped silicon containing material.
8. The method of claim 1 , wherein
the forming of the gap-filling layer in the first gap-filling process comprises:
delivering flowable dielectric material in the openings of the spacer layer on the first dielectric layer and over the patterned mandrel layer; and
hardening the flowable dielectric material, and
the further forming of the gap-filling layer in the second gap-filling process comprises:
delivering the flowable dielectric material in the openings of the twice patterned mandrel layer;
hardening the flowable dielectric material; and
removing portions of the gap-filling layer from over the patterned spacer layer and the twice patterned mandrel layers.
9. The method of claim 8 , wherein the flowable dielectric material comprises silicon oxide.