IP Library Granted Patent US 12,581,825
Granted Patent B2
US 12,581,825 · App. 17/389,934 · Granted Mar 17, 2026

Conductive oxide overhang structures for OLED devices

Inventors: Ji-young Choung (Hwaseong-si, KR); Chung-Chia Chen (Hsinchu, TW); Yu Hsin Lin (Zhubei, TW); Jungmin Lee (Santa Clara, CA); Dieter Haas (San Jose, CA); Si Kyoung Kim (Gwangju-si, KR)
Assignee: Applied Materials, Inc.
H10K59/173H10K59/122H10K59/80522H10K59/873H10K71/16H10K59/80521H10K2102/00H10K2102/103
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Quick Facts
Patent No.
US 12,581,825
App. No.
17/389,934
Granted
Mar 17, 2026
Kind
B2
Abstract

Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in an organic light-emitting diode (OLED) display are described herein. The overhang structures are permanent to the sub-pixel circuit. The overhang structures include a conductive oxide. A first configuration of the overhang structures includes a base portion and a top portion with the top portion disposed on the base portion. In a first sub-configuration, the base portion includes the conductive oxide of at least one of a TCO material or a TMO material. In a second sub-configuration, the base portion includes a metal alloy material and the conductive oxide of a metal oxide surface. A second configuration of the overhang structures includes the base portion and the top portion with a body portion disposed between the base portion and the top portion. The body portion includes the metal alloy body and the metal oxide surface.

Claims (77)

1 . A device, comprising:

a substrate;

overhang structures disposed over the substrate, the overhang structures defining sub-pixels of the device, the overhang structures including a second portion disposed over and directly contacting a first portion, at least one of the second portion or the first portion includes a conductive oxide, the first portion comprising at least one of:

a transparent conductive oxide (TCO) material;

a transition metal oxide (TMO) material; or

a metal alloy body including a metal alloy material and a metal oxide surface including one or more oxides of the metal alloy material, and the second portion disposed over the first portion, the second portion comprising a metal material; and

a plurality of sub-pixels, each sub-pixel comprising:

an anode;

an organic light-emitting diode (OLED) material disposed over and in contact with the anode;

a cathode disposed over the OLED material, wherein a cathode material of the cathode is different from an overhang material of the second portion and the second portion of the overhang structures extends over a portion of the OLED material and the cathode; and

an encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the encapsulation layer directly contacts a sidewall of the first portion.

2 . The device of claim 1 , wherein each sub-pixel further comprises a plug disposed over the encapsulation layer, the plug having a plug transmittance that is matched or substantially matched to an OLED transmittance of the OLED material.

3 . The device of claim 1 , further comprising a global encapsulation layer disposed over the conductive oxide overhang structures and the encapsulation layer.

4 . The device of claim 1 , wherein the device comprises a dot-type architecture or a line-type architecture.

5 . The device of claim 1 , wherein the substrate is a pre-patterned indium tin oxide (ITO) glass substrate.

6 . The device of claim 1 further comprising:

adjacent pixel-defining layer (PDL) structures disposed over the substrate and defining sub-pixels of the device.

7 . The device of claim 6 , wherein the overhang structures are disposed over an upper surface of the PDL structures.

8 . A device, comprising:

a substrate;

overhang structures disposed over the substrate, the overhang structures defining sub-pixels of the device, the overhang structures including a second portion disposed over and directly contacting a first portion, the first portion disposed on PDL structures, at least one of the second portion or the first portion includes a conductive oxide, the first portion comprising at least one of:

a transparent conductive oxide (TCO) material;

a transition metal oxide (TMO) material; or

a metal alloy body including a metal alloy material and a metal oxide surface including one or more oxides of the metal alloy material, and the second portion disposed over the first portion, the second portion comprising a metal material; and

a plurality of sub-pixels, each sub-pixel comprising:

an anode;

an organic light-emitting diode (OLED) material disposed over and in contact with the anode;

a cathode disposed over the OLED material, wherein a cathode material of the cathode is different from an overhang material of the second portion and the second portion of the overhang structures extends over a portion of the OLED material and the cathode; and

an encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the encapsulation layer directly contacts a sidewall of the first portion.

9 . The device of claim 8 , wherein adjacent overhangs of the conductive oxide overhang structures are defined by:

an overhang width from a sidewall of the first portion to an underside of the second portion; and

an overhang depth from a PDL structure to the underside of the second portion.

10 . The device of claim 8 , wherein:

the TCO material comprises one or more of indium zinc oxide (IZO), indium gallium zinc oxide (IGZO), indium tin oxide (ITO), or combinations thereof;

the TMO material includes comprises an oxide of a transition metal; and

the metal material comprises Ti, Cu, Mo, ITO, IZO, or combinations thereof.

11 . The device of claim 8 , wherein the cathode contacts at least a portion of the first portion.

12 . A device, comprising:

a substrate;

overhang structures disposed over the substrate, the overhang structures defining sub-pixels of the device, the overhang structures including a second portion disposed over and directly contacting a first portion, the first portion disposed on PDL structures, at least one of the second portion or the first portion includes a conductive oxide, the first portion comprising at least one of:

a transparent conductive oxide (TCO) material;

a transition metal oxide (TMO) material; or

a metal alloy body including a metal alloy material and a metal oxide surface including one or more oxides of the metal alloy material, and the second portion disposed over the first portion, the second portion comprising a metal material; and

a plurality of sub-pixels, each sub-pixel comprising:

an anode;

an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and

a cathode disposed over the OLED material, wherein a cathode material of the cathode is different from an overhang material of the second portion and the second portion of the overhang structures extends over a portion of the OLED material and the cathode, wherein adjacent overhangs of the conductive oxide overhang structures are defined by an overhang width from a sidewall of the first portion to an underside of the second portion and an overhang depth from a PDL structure to the underside of the second portion, wherein the overhang width of each of the conductive oxide overhang structures are about 0.5 μm (micrometers) to about 1 μm and are within 15 percent of each other.

13 . A device comprising a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent overhang structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed over the OLED material, the overhang structures including a second portion directly contacting a first portion, at least one of the second portion or the first portion includes a conductive oxide, the first portion comprising at least one of:

a transparent conductive oxide (TCO) material;

a transition metal oxide (TMO) material; or

a metal alloy body including a metal alloy material and a metal oxide surface including one or more oxides of the metal alloy material, and the second portion disposed over the first portion, the second portion comprising a metal material, wherein the device is made by a process comprising:

depositing the OLED material using evaporation deposition over a substrate, the OLED material disposed over and in contact with the anode, the OLED material having an OLED edge defined by defined by adjacent overhangs of the conductive oxide overhang structures;

depositing the cathode using evaporation deposition, wherein a cathode material of the cathode is different from an overhang material of the second portion and the overhang structures extend over a portion of the OLED material and the cathode, the overhang structures including the conductive oxide; and

depositing an encapsulation layer over the cathode and past an endpoint of the cathode, wherein the encapsulation layer directly contacts a sidewall of the first portion.

14 . The device of claim 13 , wherein each of the overhang structures comprise:

the first portion disposed on the PDL structures.

15 . The device of claim 13 , further comprising pixel-defining layer (PDL) structures wherein the overhang structures are disposed over the PDL structures.

16 . A device, comprising:

a substrate;

overhang structures defining sub-pixels of the device, the overhang structures including a second portion directly contacting a first portion, at least one of the second portion or the first portion includes a conductive oxide, the first portion comprising at least one of:

a transparent conductive oxide (TCO) material;

a transition metal oxide (TMO) material; or

a metal alloy body including a metal alloy material and a metal oxide surface including one or more oxides of the metal alloy material, and the second portion disposed over the first portion, the second portion comprising a metal material, wherein a bottom surface of the second portion is planar to a top surface of the first portion; and

a plurality of sub-pixels, each sub-pixel comprising:

an anode;

an organic light-emitting diode (OLED) material disposed over and in contact with the anode; and

a cathode disposed over the OLED material, wherein the second portion of the overhang structures extends over a portion of the OLED material and the cathode.

17 . The device of claim 16 , wherein the metal material comprises Ti, Cu, Mo, ITO, IZO, or combinations thereof.

18 . A device, comprising:

a substrate;

overhang structures disposed over the substrate, the overhang structures defining sub-pixels of the device, the overhang structures including a second portion disposed over and directly contacting a first portion, at least one of the second portion or the first portion includes a conductive oxide; and

a plurality of sub-pixels, each sub-pixel comprising:

an anode;

an organic light-emitting diode (OLED) material disposed over and in contact with the anode;

a cathode disposed over the OLED material, wherein a cathode material of the cathode is different from an overhang material of the second portion and the second portion of the overhang structures extends over a portion of the OLED material and the cathode;

a first encapsulation layer disposed over the cathode and past an endpoint of the cathode, wherein the first encapsulation layer extends under at least a portion of the overhang structures along a sidewall of the second portion and contacts a bottom surface of the second portion of the overhang structures, wherein the first encapsulation layer directly contacts a sidewall of the first portion; and

a second encapsulation layer disposed over the first encapsulation layer, wherein the second encapsulation layer is disposed within a well of each sub-pixel and directly contacting the second portion of the overhang structures.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 13, 2021
From: CHOUNG, JI-YOUNG; CHEN, CHUNG-CHIA; LIN, YU HSIN; LEE, JUNGMIN; HAAS, DIETER; KIM, SI KYOUNG
To: APPLIED MATERIALS, INC.
Reel/Frame 057168/0153 →
Continuity (2)
Provisional Application 63179074 · Apr 23, 2021
Related Publication 20220344417A1 · Oct 27, 2022
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