Alumina ceramic
Provided is an alumina ceramic with a low secondary electron emission coefficient and suitable for components of a high frequency generator, a plasma generator and so on. The alumina ceramic contains alumina as a main component, and at least two kinds of elements selected from an alkaline earth metal and from an element belonging to period 3, 4 or 5. The alkaline earth metal and the element belonging to period 3, 4 or 5 have a higher first ionization energy than aluminum. An electronegativity difference between the alkaline earth metal and the element belonging to period 3, 4 or 5 is 0 or more and 0.6 or less. A ratio (x/y) of the grain boundary area (x) to the grain area (y) in the alumina ceramic is 0.0001 to 0.001.
1. An alumina ceramic comprising alumina as a main component, an alkaline earth metal, and an element belonging to period 3, 4 or 5,
wherein the alkaline earth metal and the element belonging to period 3, 4 or 5 have a higher first ionization energy than aluminum,
wherein the alkaline earth metal is magnesium or calcium,
wherein the element belonging to period 3, 4 or 5 is scandium, titanium, yttrium or niobium,
wherein the alkaline earth metal, and the element belonging to period 3, 4 or 5 are a combination of Mg—Sc, Mg—Ti, Mg—Y, Ca—Sc, Ca—Y or Ca—Zr,
wherein an electronegativity difference between the alkaline earth metal and the element belonging to period 3, 4 or 5 is 0 or more and 0.6 or less,
wherein the total content of the alkaline earth metals and the elements belonging to period 3, 4 or 5 in the alumina ceramic is 0.05 wt % or more and 1 wt % or less based on the content of the alumina,
wherein a ratio (x/y) of the grain boundary area (x) to the grain area (y) in the alumina ceramic is 0.0001 to 0.0005,
wherein the density of the alumina ceramic is 3.8 g/cm 3 or more and 4.0 g/cm 3 or less, and
wherein the secondary electron emission coefficient of the alumina ceramic is 5.0 or less.
2. The alumina ceramic according to claim 1 , wherein the alumina ceramic is used in a high frequency generator and a plasma generator.
3. The alumina ceramic according to claim 1 , wherein the alumina ceramic does not contain strontium or barium.
4. A method for preparing the alumina ceramic according to claim 1 , the method comprising:
mixing an alumina source, the alkaline earth metal, and the element of period 3, 4 or 5 so as to have 0.05 to 1 wt % of total weight of the alkaline earth metal and the element of period 3, 4 or 5 based on the alumina source,
granulating a mixture of the alumina source, the alkaline earth metal, and the element of period 3, 4 or 5 so that it has a circularity of not less than 0.5 and that the alumina source has a particle size of 0.2 to 1.5 μm, wherein a mixed granule is formed, and
compression molding and sintering the mixed granule.
5. The alumina ceramic according to claim 1 , wherein the alumina ceramic consists essentially of the alumina, an oxide of the alkaline earth metal, and an oxide of the element belonging to period 3, 4 or 5.