Methods of forming interconnect structures in semiconductor fabrication
A method of fabricating a semiconductor interconnect structure includes forming a via in a dielectric layer, depositing a ruthenium-containing conductive layer over a top surface of the via and a top surface of the dielectric layer, and patterning the ruthenium-containing conductive layer to form a conductive line over the top surface of the via, where a thickness of the conductive line is less than a thickness of the via.
1. An interconnect structure, comprising:
a bottom via having a first thickness and disposed in a first dielectric layer;
a ruthenium-containing conductive line having a second thickness disposed over the bottom via, wherein the second thickness is less than the first thickness;
a second dielectric layer disposed over the ruthenium-containing conductive line and the first dielectric layer; and
a top via disposed in the second dielectric layer and over the ruthenium-containing conductive line,
wherein the ruthenium-containing conductive line includes a first conductive bulk layer and a first barrier layer conformally disposed over top and side surfaces of the first conductive bulk layer,
wherein the top via includes a second barrier layer and a second conductive bulk layer over the second barrier layer,
wherein the second barrier layer is disposed over the first barrier layer with a physical interface therebetween.
2. The interconnect structure of claim 1 , wherein the bottom via includes a metal different from ruthenium.
3. The interconnect structure of claim 2 , wherein the bottom via includes cobalt.
4. The interconnect structure of claim 1 , wherein the first barrier layer is not in direct contact with the bottom via.
5. The interconnect structure of claim 4 , wherein the bottom via includes a third barrier layer disposed along sidewall surfaces of the bottom via defined by the first dielectric layer.
6. The interconnect structure of claim 5 , wherein the third barrier layer is further disposed between the ruthenium-containing conductive line and the first dielectric layer.
7. The interconnect structure of claim 1 , wherein a ratio of the second thickness to the first thickness is about 1:2.
8. The interconnect structure of claim 1 , wherein a ratio of the second thickness to the first thickness is about 1:10.
9. A structure comprising:
a via in a dielectric layer, wherein the via includes a first barrier layer and a bulk layer over the first barrier layer; and
a conductive line over a top surface of the via, wherein the conductive line includes a ruthenium-containing conductive layer over the top surface of the via and a top surface of the dielectric layer and in physical contact with the bulk layer, wherein the conductive line further includes a second barrier layer over sidewalls of the ruthenium-containing conductive layer, wherein the structure is free of a nitride layer between the bulk layer and the ruthenium-containing conductive layer, and wherein a thickness of the conductive line is less than a thickness of the via.
10. The structure of claim 9 , wherein the second barrier layer is disposed over top and sidewall surfaces of the ruthenium-containing conductive layer.
11. The structure of claim 9 , wherein the first barrier layer is disposed over surfaces of the dielectric layer defining a via opening in which the bulk layer is formed.
12. The structure of claim 9 , further comprising a contact etch-stop layer over the top surface of the dielectric layer.
13. The structure of claim 9 , wherein a ratio of the thickness of the conductive line to the thickness of the via is about 1:2.
14. The structure of claim 9 , wherein a ratio of the thickness of the conductive line to the thickness of the via is about 1:10.
15. The structure of claim 12 , wherein the first barrier layer is disposed over a top surface of the contact etch-stop layer.
16. The structure of claim 9 , wherein the first barrier layer is further disposed between the conductive line and the dielectric layer.
17. An interconnect structure, comprising:
a first dielectric layer;
a bottom via disposed in the first dielectric layer;
a conductive line disposed over the bottom via, wherein the conductive line includes a first barrier layer and a ruthenium-containing bulk layer, wherein the ruthenium-containing bulk layer is in direct contact with the first dielectric layer, wherein a thickness of the conductive line is less than a thickness of the bottom via;
a second dielectric layer disposed over the conductive line and the first dielectric layer; and
a top via disposed in the second dielectric layer and over the conductive line,
wherein the top via includes a second barrier layer over the first barrier layer and a via bulk layer over the second barrier layer,
wherein the second barrier layer includes a side portion having a first thickness and a bottom portion having a second thickness,
wherein a portion of the first barrier layer directly under the second barrier layer has a third thickness,
wherein the first thickness is smaller than a sum of the second thickness and the third thickness.
18. The interconnect structure of claim 17 , wherein the bottom via includes a metal different from ruthenium.
19. The interconnect structure of claim 18 , wherein the bottom via includes cobalt.
20. The interconnect structure of claim 17 , wherein the thickness of the conductive line is within a range of about 1 nm to about 20 nm.