Scintillator module, scintillator sensor unit, and manufacturing method
A scintillator module includes a substrate, a columnar scintillator crystal layer formed on the substrate, and a non-adhesive moisture-proof member having a given hardness and opposing a crystal growing side of the columnar scintillator crystal layer. The moisture-proof member ensures a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer under vacuum sealing, and holds the columnar scintillator crystal layer in a moisture-proof state between a moisture-proof layer and the substrate.
1. A scintillator module, comprising:
a substrate;
a columnar scintillator crystal layer formed on the substrate;
a non-adhesive moisture-proof member opposing a crystal growing side of the columnar scintillator crystal layer, and having a hardness to ensure, under a vacuum sealing, a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer, to hold the columnar scintillator crystal layer in a moisture-proof state between the moisture-proof member and the substrate; and
an adhesive seal member having a height to ensure the void and disposed on the substrate to surround the columnar scintillator crystal layer and support the moisture-proof member.
2. The scintillator module according to claim 1 , wherein
the substrate, the columnar scintillator crystal layer, and the moisture-proof member are disposed in order from a radiation incident side,
the substrate is formed of a material having a high visible-light reflectance, and
the moisture-proof member is formed of a material having a high visible-light transmittance.
3. The scintillator module according to claim 1 , wherein
the moisture-proof member, the columnar scintillator crystal layer, and the substrate are disposed in order from a radiation incident side,
the moisture-proof member is formed of a material having a high visible-light reflectance, and
the substrate is formed of a material having a high visible-light transmittance.
4. A scintillator sensor unit, comprising:
the scintillator module according to claim 1 ;
a light receiving unit located opposite a radiation incident side with respect to the scintillator module, the light receiving unit being configured to receive visible light after being converted by the columnar scintillator crystal layer; and
a casing that holds the scintillator module and the light receiving unit in given positions.
5. A scintillator sensor unit, comprising:
the scintillator module according to claim 1 ; and
a casing that holds the scintillator module in a given position, wherein
the moisture-proof member, the columnar scintillator crystal layer, and the substrate are disposed in order from a radiation incident side,
the moisture-proof member is formed of a material having a high visible-light reflectance, and
the substrate includes a sensor board on which photodiodes and thin-film transistors are two-dimensionally arrayed by semiconductor fabrication technology.
6. A manufacturing method of a scintillator module, the method comprising:
forming a columnar scintillator crystal layer on a given substrate;
placing an adhesive seal member on the substrate in such a manner that the seal member surrounds the columnar scintillator crystal layer, and allows the seal member to adhere to the substrate;
placing the substrate and a non-adhesive moisture-proof member under a vacuum environment, the moisture-proof member having a hardness to ensure a void under a vacuum sealing;
setting the moisture-proof member opposite the columnar scintillator crystal layer, and press-bonding the moisture-proof member to the substrate; and
vacuum-sealing the moisture-proof member and the substrate while ensuring a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer.
7. A manufacturing method of a scintillator sensor unit, the method comprising:
forming a columnar scintillator crystal layer on a given substrate;
placing an adhesive seal member on the substrate in such a manner that the adhesive seal member surrounds the columnar scintillator crystal layer and allows the adhesive seal member to adhere to the substrate;
placing the substrate and a non-adhesive moisture-proof member under a vacuum environment, the moisture-proof member having a hardness to ensure a void under a vacuum sealing;
setting the moisture-proof member opposite the columnar scintillator crystal layer, and press-bonding the moisture-proof member to the substrate;
vacuum-sealing the moisture-proof member and the substrate while ensuring a void between the moisture-proof member and individual conic peak portions of columnar scintillator crystals forming the columnar scintillator crystal layer, to form a scintillator module; and
storing and holding the scintillator module and a light receiving unit in a casing in a given positional relationship.