Method for forming silicon or silicon compound pattern in semiconductor manufacturing process
Disclosed is a method of forming a fine silicon pattern with a high aspect ratio for fabrication of a semiconductor device. The method includes a cleaning process of removing organic residue or reside originating in fumes using a cleaning solution, thereby enabling formation of a desired pattern while preventing the pattern from being lifted. Thus, the present disclosure enables formation of a fine pattern by using a novel cleaning method.
1. A method of forming a silicon pattern or a silicon compound pattern in a process of depositing a polymer layer or a predetermined compound layer in the presence of a silicon oxide pattern under a silicon layer or a silicon compound layer, the method comprising:
sequentially performing deposition of an organic film and an inorganic film on a silicon oxide pattern, application of a photoresist film, and formation of a photoresist pattern through exposure and development of the photoresist film;
performing a first dry etching process using an etching gas with the photoresist pattern being served as an etching mask;
cleaning, using a cleaning solution, a wafer with residue of the organic film remaining thereon to prevent pattern lifting attributable to impurities generated during the etching before deposition of the polymer layer or the predetermined compound layer; and
performing a second dry etching process to etch the polymer layer or the predetermined compound layer.
2. The method according to claim 1 ,
wherein the cleaning comprises: spraying the cleaning solution at a rate of 1 to 200 mL/s for 1 to 200 seconds with the wafer being rotated; stopping the spraying; and spin-drying the wafer.
3. The method according to claim 2 ,
wherein in the cleaning, the cleaning solution is sprayed in an amount of 20 to 300 mL.
4. The method according to claim 3 ,
wherein in the cleaning, the cleaning solution is sprayed in an amount of 40 to 300 mL.
5. The method according to claim 4 ,
wherein in the cleaning, the cleaning solution is sprayed in an amount of 50 to 300 mL.
6. The method according to claim 1 ,
wherein the deposition of the organic film and the inorganic film on an etching target is chemically or physically performed.
7. The method according to claim 6 ,
wherein the organic film on the etching target has a carbon content of 30% to 100%.
8. The method according to claim 1 ,
wherein a light source for the formation of the pattern emits light of a 13.5-nm wavelength, a 198-nm wavelength, a 248-nm wavelength, or a 365-nm wavelength or an e-beam.
9. The method according to claim 1 ,
wherein the etching gas used for the dry etching process after the formation of the pattern comprises a gas or a mixture of two or more gases selected from among inert gases such as argon or nitrogen, gases of molecules containing one or more fluorine atoms, and oxygen.
10. The method according to claim 1 ,
wherein the cleaning solution comprises 1% to 100% by weight of a material capable of washing polymer residue off, 0% to 99% by weight of a solvent, 0% to 3% by weight of a surfactant, and 0% to 10% by weight of an alkali compound.
11. The method according to claim 10 ,
wherein the material capable of washing polymer residue off comprises a solvent or a mixture of two or more solvents selected from among alcohol-based solvents, amide-based solvents, ketonic solvents, ester-based solvents, and carbonated hydrogen-based solvents.
12. The method according to claim 10 ,
wherein the alkali compound comprises at least one or a mixture of two or more ones selected from among amines and ammonium hydroxides.