Mounting apparatus
A mounting apparatus for mounting a semiconductor chip on a mounting body includes a stage on which the mounting body is placed, a mounting head provided to be movable up and down above the stage and pressing the semiconductor chip against the mounting body, and a film disposition mechanism which interposes a belt-like cover film between the mounting head and the stage, and the film disposition mechanism includes a film feeding part having a feeding reel around which at least the cover film has been wound, a film recovery part having a recovery reel also winding up at least the fed cover film, and one or more relay shafts provided in the course of a path of the cover film from the feeding reel to the recovery reel and by which the cover film is folded back in order to bend a moving direction of the cover film.
1. A mounting apparatus for mounting a semiconductor chip on a mounting body, the mounting apparatus comprising:
a stage on which the mounting body is placed and supported by a base;
a mounting head which is provided to be movable up and down above the stage and presses the semiconductor chip against the mounting body;
a film disposition mechanism which interposes a belt cover film between the mounting head and the stage; and
a control part, wherein the mounting head is electrically coupled to the control part and the stage,
wherein the film disposition mechanism includes
a film feeding part which comprises a feeding reel around which the cover film has been wound, wherein the film feeding part is installed to be fixed to the base,
a film recovery part which comprises a recovery reel winding up the fed cover film, wherein the film recovery part is installed to be fixed to the base, and
a relay shaft which is provided in the course of a path of the cover film from the feeding reel to the recovery reel and by which the cover film is folded back in order to bend a moving direction of the cover film, the relay shaft extending in a direction in which an axial direction of the relay shaft is inclined with respect to a moving direction immediately before bending of the cover film,
wherein the stage directly coupled to top of the base and spaced apart from the feeding reel, the recovery reel and relay shaft.
2. The mounting apparatus according to claim 1 , wherein
the relay shaft is disposed in a manner of the axial direction being inclined at 45 degrees with respect to the moving direction of the cover film immediately before bending.
3. The mounting apparatus according to claim 1 , wherein
the mounting apparatus comprises an access opening for allowing an operator to access a mounting execution space, and
both the film feeding part and the film recovery part are not disposed behind the stage when seen from the access opening.
4. The mounting apparatus according to claim 3 , wherein
the film disposition mechanism further comprises a film movement mechanism for moving at least two of the film feeding part, the relay shaft, and the film recovery part in a horizontal direction in order to move the cover film crossing the stage in a horizontal direction.
5. The mounting apparatus according to claim 1 , wherein
the film disposition mechanism further comprises a film movement mechanism for moving at least two of the film feeding part, the relay shaft, and the film recovery part in a horizontal direction in order to move the cover film crossing the stage in a horizontal direction.
6. The mounting apparatus according to claim 5 , wherein
the relay shaft includes a first relay shaft and a second relay shaft which are disposed on both sides of the stage in a first direction,
both the first relay shaft and the second relay shaft are disposed such that axial directions of the first and second relay shafts are inclined at 45 degrees with respect to
the moving direction of the cover film immediately before bending, and the film disposition mechanism moves the first relay shaft and the second relay shaft in association with each other in the same direction as a second direction orthogonal to the first direction.
7. The mounting apparatus according to claim 6 , wherein
the cover film forms substantially a U shape moving from the feeding reel to the recovery reel via the first relay shaft and the second relay shaft, and the feeding reel and the recovery reel are disposed to be spaced apart from each other in the second direction.